JPS6379635U - - Google Patents
Info
- Publication number
- JPS6379635U JPS6379635U JP17383386U JP17383386U JPS6379635U JP S6379635 U JPS6379635 U JP S6379635U JP 17383386 U JP17383386 U JP 17383386U JP 17383386 U JP17383386 U JP 17383386U JP S6379635 U JPS6379635 U JP S6379635U
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- semiconductor manufacturing
- coating
- semiconductor wafer
- maintaining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229920002120 photoresistant polymer Polymers 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 239000002904 solvent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17383386U JPS6379635U (ru) | 1986-11-11 | 1986-11-11 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17383386U JPS6379635U (ru) | 1986-11-11 | 1986-11-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6379635U true JPS6379635U (ru) | 1988-05-26 |
Family
ID=31111667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17383386U Pending JPS6379635U (ru) | 1986-11-11 | 1986-11-11 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6379635U (ru) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5687471A (en) * | 1979-12-17 | 1981-07-16 | Matsushita Electric Ind Co Ltd | Coating process |
JPS6010248A (ja) * | 1983-06-30 | 1985-01-19 | Fujitsu Ltd | レジスト塗布方法 |
-
1986
- 1986-11-11 JP JP17383386U patent/JPS6379635U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5687471A (en) * | 1979-12-17 | 1981-07-16 | Matsushita Electric Ind Co Ltd | Coating process |
JPS6010248A (ja) * | 1983-06-30 | 1985-01-19 | Fujitsu Ltd | レジスト塗布方法 |