JPS6379634U - - Google Patents
Info
- Publication number
- JPS6379634U JPS6379634U JP17380986U JP17380986U JPS6379634U JP S6379634 U JPS6379634 U JP S6379634U JP 17380986 U JP17380986 U JP 17380986U JP 17380986 U JP17380986 U JP 17380986U JP S6379634 U JPS6379634 U JP S6379634U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- boat
- aligned
- furnace core
- core tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17380986U JPS6379634U (fi) | 1986-11-12 | 1986-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17380986U JPS6379634U (fi) | 1986-11-12 | 1986-11-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6379634U true JPS6379634U (fi) | 1988-05-26 |
Family
ID=31111620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17380986U Pending JPS6379634U (fi) | 1986-11-12 | 1986-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6379634U (fi) |
-
1986
- 1986-11-12 JP JP17380986U patent/JPS6379634U/ja active Pending
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