JPS61138238U - - Google Patents

Info

Publication number
JPS61138238U
JPS61138238U JP2024785U JP2024785U JPS61138238U JP S61138238 U JPS61138238 U JP S61138238U JP 2024785 U JP2024785 U JP 2024785U JP 2024785 U JP2024785 U JP 2024785U JP S61138238 U JPS61138238 U JP S61138238U
Authority
JP
Japan
Prior art keywords
boat
lid
processing tube
opening
semiconductor articles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0220826Y2 (fi
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2024785U priority Critical patent/JPH0220826Y2/ja
Publication of JPS61138238U publication Critical patent/JPS61138238U/ja
Application granted granted Critical
Publication of JPH0220826Y2 publication Critical patent/JPH0220826Y2/ja
Expired legal-status Critical Current

Links

JP2024785U 1985-02-15 1985-02-15 Expired JPH0220826Y2 (fi)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024785U JPH0220826Y2 (fi) 1985-02-15 1985-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2024785U JPH0220826Y2 (fi) 1985-02-15 1985-02-15

Publications (2)

Publication Number Publication Date
JPS61138238U true JPS61138238U (fi) 1986-08-27
JPH0220826Y2 JPH0220826Y2 (fi) 1990-06-06

Family

ID=30510557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024785U Expired JPH0220826Y2 (fi) 1985-02-15 1985-02-15

Country Status (1)

Country Link
JP (1) JPH0220826Y2 (fi)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63201325U (fi) * 1987-06-17 1988-12-26
JPH0193112A (ja) * 1987-10-05 1989-04-12 Tel Sagami Ltd 加熱装置
JPH01175228A (ja) * 1987-12-29 1989-07-11 Tel Sagami Ltd 縦型熱処理炉
JP2003297770A (ja) * 2002-03-29 2003-10-17 Toshiba Ceramics Co Ltd 半導体熱処理用反射板およびこの半導体熱処理用反射板の製造方法
WO2004070814A1 (ja) * 2003-02-06 2004-08-19 Tokyo Electron Limited リッド付の処理容器を備えた減圧処理装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63201325U (fi) * 1987-06-17 1988-12-26
JPH0193112A (ja) * 1987-10-05 1989-04-12 Tel Sagami Ltd 加熱装置
JPH01175228A (ja) * 1987-12-29 1989-07-11 Tel Sagami Ltd 縦型熱処理炉
JP2003297770A (ja) * 2002-03-29 2003-10-17 Toshiba Ceramics Co Ltd 半導体熱処理用反射板およびこの半導体熱処理用反射板の製造方法
WO2004070814A1 (ja) * 2003-02-06 2004-08-19 Tokyo Electron Limited リッド付の処理容器を備えた減圧処理装置

Also Published As

Publication number Publication date
JPH0220826Y2 (fi) 1990-06-06

Similar Documents

Publication Publication Date Title
JPS6361140U (fi)
US5033927A (en) Device for carrying out sequential thermal treatments under a vacuum
JPS61138238U (fi)
JPS60111037U (ja) 縦形半導体熱処理炉
JPS61100141U (fi)
JPS6113542Y2 (fi)
JPH0787185B2 (ja) 半導体の熱処理方法
JPS6223085Y2 (fi)
JPH0143860Y2 (fi)
JPH0547686A (ja) 縦型半導体熱処理装置
JPS62147332U (fi)
JPS6310546U (fi)
JPH01321638A (ja) 熱処理管
JPS63248125A (ja) 熱処理装置
JPH01173930U (fi)
JPS61143750U (fi)
JPH0426533U (fi)
JPH01185916A (ja) 縦型熱処理装置
JPH0250953U (fi)
JPH01305514A (ja) 半導体ウェハー熱処理炉
Nechaev et al. Redistribution of Iron in Aluminium During Recrystallization Annealing
JPS62140724U (fi)
JPH01146324A (ja) 熱処理装置
JPS62167090U (fi)
JPS6395234U (fi)