JPS6378229U - - Google Patents
Info
- Publication number
- JPS6378229U JPS6378229U JP17225786U JP17225786U JPS6378229U JP S6378229 U JPS6378229 U JP S6378229U JP 17225786 U JP17225786 U JP 17225786U JP 17225786 U JP17225786 U JP 17225786U JP S6378229 U JPS6378229 U JP S6378229U
- Authority
- JP
- Japan
- Prior art keywords
- sensor chip
- integrated semiconductor
- sensor
- diaphragm
- semiconductor pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Pressure Sensors (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17225786U JPS6378229U (US07345094-20080318-C00003.png) | 1986-11-10 | 1986-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17225786U JPS6378229U (US07345094-20080318-C00003.png) | 1986-11-10 | 1986-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6378229U true JPS6378229U (US07345094-20080318-C00003.png) | 1988-05-24 |
Family
ID=31108635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17225786U Pending JPS6378229U (US07345094-20080318-C00003.png) | 1986-11-10 | 1986-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6378229U (US07345094-20080318-C00003.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003302298A (ja) * | 2002-04-10 | 2003-10-24 | Denso Corp | 力学量検出装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53114690A (en) * | 1977-03-17 | 1978-10-06 | Yokogawa Hokushin Electric Corp | Thin film strain gauge convertor |
| JPS53114689A (en) * | 1977-03-17 | 1978-10-06 | Hitachi Ltd | Semiconductor strain gauge type diaphragm |
| JPS53126880A (en) * | 1977-04-13 | 1978-11-06 | Hitachi Ltd | Silicon diaphragm type strain gauge |
-
1986
- 1986-11-10 JP JP17225786U patent/JPS6378229U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53114690A (en) * | 1977-03-17 | 1978-10-06 | Yokogawa Hokushin Electric Corp | Thin film strain gauge convertor |
| JPS53114689A (en) * | 1977-03-17 | 1978-10-06 | Hitachi Ltd | Semiconductor strain gauge type diaphragm |
| JPS53126880A (en) * | 1977-04-13 | 1978-11-06 | Hitachi Ltd | Silicon diaphragm type strain gauge |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003302298A (ja) * | 2002-04-10 | 2003-10-24 | Denso Corp | 力学量検出装置 |
