JPS6377339U - - Google Patents
Info
- Publication number
- JPS6377339U JPS6377339U JP17115786U JP17115786U JPS6377339U JP S6377339 U JPS6377339 U JP S6377339U JP 17115786 U JP17115786 U JP 17115786U JP 17115786 U JP17115786 U JP 17115786U JP S6377339 U JPS6377339 U JP S6377339U
- Authority
- JP
- Japan
- Prior art keywords
- power
- frequency
- amplifier
- incident
- matching circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
- Control Of Electrical Variables (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17115786U JPS6377339U (enrdf_load_stackoverflow) | 1986-11-07 | 1986-11-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17115786U JPS6377339U (enrdf_load_stackoverflow) | 1986-11-07 | 1986-11-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6377339U true JPS6377339U (enrdf_load_stackoverflow) | 1988-05-23 |
Family
ID=31106531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17115786U Pending JPS6377339U (enrdf_load_stackoverflow) | 1986-11-07 | 1986-11-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6377339U (enrdf_load_stackoverflow) |
-
1986
- 1986-11-07 JP JP17115786U patent/JPS6377339U/ja active Pending
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