JPS6376722U - - Google Patents
Info
- Publication number
- JPS6376722U JPS6376722U JP17001286U JP17001286U JPS6376722U JP S6376722 U JPS6376722 U JP S6376722U JP 17001286 U JP17001286 U JP 17001286U JP 17001286 U JP17001286 U JP 17001286U JP S6376722 U JPS6376722 U JP S6376722U
- Authority
- JP
- Japan
- Prior art keywords
- conveyor
- substrate
- transmission roller
- intermediate transmission
- pulley
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 6
Landscapes
- Relays Between Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
- Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
- Specific Conveyance Elements (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170012U JPH0527373Y2 (es) | 1986-11-04 | 1986-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986170012U JPH0527373Y2 (es) | 1986-11-04 | 1986-11-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6376722U true JPS6376722U (es) | 1988-05-21 |
| JPH0527373Y2 JPH0527373Y2 (es) | 1993-07-13 |
Family
ID=31104351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986170012U Expired - Lifetime JPH0527373Y2 (es) | 1986-11-04 | 1986-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527373Y2 (es) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5662329A (en) * | 1979-10-26 | 1981-05-28 | Toshiba Corp | Conveying direction turning device for semiconductor wafer |
| JPS5784146A (en) * | 1980-11-14 | 1982-05-26 | Fujitsu Ltd | Detection of existence of wafer |
| JPS59117230A (ja) * | 1982-12-24 | 1984-07-06 | Hitachi Electronics Eng Co Ltd | 部品移載装置 |
| JPS59215800A (ja) * | 1983-05-24 | 1984-12-05 | 松下電器産業株式会社 | プリント基板搬送方向変換装置 |
-
1986
- 1986-11-04 JP JP1986170012U patent/JPH0527373Y2/ja not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5662329A (en) * | 1979-10-26 | 1981-05-28 | Toshiba Corp | Conveying direction turning device for semiconductor wafer |
| JPS5784146A (en) * | 1980-11-14 | 1982-05-26 | Fujitsu Ltd | Detection of existence of wafer |
| JPS59117230A (ja) * | 1982-12-24 | 1984-07-06 | Hitachi Electronics Eng Co Ltd | 部品移載装置 |
| JPS59215800A (ja) * | 1983-05-24 | 1984-12-05 | 松下電器産業株式会社 | プリント基板搬送方向変換装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527373Y2 (es) | 1993-07-13 |