JPS6375706A - Manufacture of distributed thickness film - Google Patents
Manufacture of distributed thickness filmInfo
- Publication number
- JPS6375706A JPS6375706A JP21977186A JP21977186A JPS6375706A JP S6375706 A JPS6375706 A JP S6375706A JP 21977186 A JP21977186 A JP 21977186A JP 21977186 A JP21977186 A JP 21977186A JP S6375706 A JPS6375706 A JP S6375706A
- Authority
- JP
- Japan
- Prior art keywords
- film
- shape
- light
- thickness distribution
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000000126 substance Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 abstract description 6
- 230000005484 gravity Effects 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 4
- 238000006243 chemical reaction Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 abstract description 2
- 230000003287 optical effect Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 2
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/124—Geodesic lenses or integrated gratings
- G02B6/1245—Geodesic lenses
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
V厚分布膜の作製方法であって、光反応性物質を含む膜
の全部または一部の直下に膜の形状変化を妨げる物がな
い状態で局部的に光照射することにより、膜形状の変化
に重力の作用が加わりその変化量を大とすることを可能
とする。[Detailed Description of the Invention] [Summary] A method for producing a V-thickness distribution film, which involves forming a V-thickness distribution film locally under the whole or part of the film containing a photoreactive substance in a state where there is no object that prevents the film from changing its shape. By irradiating the film with light, the action of gravity is added to the change in the film shape, making it possible to increase the amount of change.
本発明は膜厚分布膜の作製方法に関するもので、さらに
詳しく言えば短焦点レンズ、低損失先導波路などの作製
方法に関するものである。The present invention relates to a method of manufacturing a thickness distribution film, and more specifically, to a method of manufacturing a short focus lens, a low-loss leading waveguide, and the like.
プラスチックレンズは光フアイバ通信における光の分岐
、結合、合波、分波等への応用、光集積回路における発
光ダイオード集光や導波路レンズへの応用などアレイ化
及び微小化の要求が高まっている。There is an increasing demand for plastic lenses to be arrayed and miniaturized for applications such as branching, coupling, multiplexing, and demultiplexing of light in optical fiber communications, as well as for applications in light-emitting diode concentrators and waveguide lenses in optical integrated circuits. .
従来の膜厚分布膜の作製方法は第3図aに示すように基
板1の上に形成された光反応性物質を含む膜2に対しマ
スク3を用いて局部的に光4を照射することにより、第
3図すのように光照射された部分に光反応生成物を生成
させて膜形状を変化させ、レンズ5等を形成していた。The conventional method for producing a thickness distribution film is to locally irradiate a film 2 containing a photoreactive substance formed on a substrate 1 with light 4 using a mask 3, as shown in FIG. 3a. As shown in FIG. 3, a photoreaction product is generated in the irradiated area to change the shape of the film, thereby forming a lens 5 and the like.
上記従来の膜厚分布膜の作製方決では、膜2は基板1の
上にあるため膜形状の変化は重力と反対に上方に膨らむ
ため、盛り上がりに限度があり、レンズの焦点はある程
度以上短かくならない。また盛り上がりに限度があるた
め、凸部は横に広がり、光照射径より不確定に大きい凸
部領域ができてしまう等の欠点があった。In the conventional manufacturing method of the film with thickness distribution described above, since the film 2 is on the substrate 1, changes in the film shape swell upward in opposition to gravity, so there is a limit to the swell, and the focal point of the lens becomes short beyond a certain point. It doesn't get worse. Furthermore, since there is a limit to the bulge, the convex portion spreads laterally, resulting in a convex region that is uncertainly larger than the diameter of the light irradiation.
本発明はこのような点に鑑みて創作されたもので、膜形
状の変化を大きくできる膜厚分布膜の作製方決を提供す
ることを目的としている。The present invention was created in view of the above points, and an object of the present invention is to provide a method for manufacturing a thickness distribution film that can greatly change the film shape.
このため本発明においては、少なくとも光反応性物質を
含む膜11に局部的に光照射し膜形状を変化させる膜厚
分布膜の作製方法において、上記膜11の全部または一
部の直下に膜の形状変化を妨げる物がない状態で光照射
することを特徴としている。For this reason, in the present invention, in the method for producing a thickness distribution film in which the film 11 containing at least a photoreactive substance is locally irradiated with light to change the film shape, a film is placed directly under all or part of the film 11. The feature is that the light is irradiated in a state where there are no objects that prevent the shape from changing.
光照射により光反応性物質から光反応生成物が生成され
て膜形状が変化するとき、膜の盛り上がる方向と重力方
向が同じであるため、膜の盛り上がりに限度がなく、且
つ光照射領域と同じ大きさの凸部領域ができる。When light irradiation generates photoreaction products from photoreactive substances and changes the shape of the film, the direction in which the film swells is the same as the direction of gravity, so there is no limit to the swell of the film and it is the same as the light irradiation area. A convex region of the same size is formed.
第1図は本発明の詳細な説明するための図である。 FIG. 1 is a diagram for explaining the present invention in detail.
本実施例は先ず第1図aに示すように、ガラス基板10
の上に光重合反応物質を含む膜11を形成した後ひっく
り返し、上方または下方から(図は下方から)マスク1
2を用いて光13を照射する。これにより膜11の光照
射部は光反応を起こし膜形状を変化し、第2図すの如く
重力の作用にも加わって下方に膨みレンズ14が形成さ
れる。In this embodiment, first, as shown in FIG. 1a, a glass substrate 10
After forming the film 11 containing a photopolymerization reaction substance on top, it is turned over and the mask 1 is applied from above or below (from below in the figure).
The light 13 is irradiated using the light source 2. As a result, the light irradiated portion of the film 11 undergoes a photoreaction and changes its shape, and as shown in FIG. 2, it bulges downward under the action of gravity to form a lens 14.
本実施例の方法によればほぼ球に近いレンズが作製でき
る。According to the method of this embodiment, a nearly spherical lens can be manufactured.
第2図は本発明の他の実施例を説明するための図である
。FIG. 2 is a diagram for explaining another embodiment of the present invention.
本実施例は先ず第2図aに示すように溝10aを有する
基板lOの上に光重合反応物質を含む膜11をのせ、マ
スク12を用いて光13を照射するのである。これによ
り膜11は表裏両面に膨らむことができ、例えば第2図
すの如く低損失の先導波路I5を形成することができる
。In this embodiment, as shown in FIG. 2a, first, a film 11 containing a photopolymerization reactant is placed on a substrate 10 having a groove 10a, and a mask 12 is used to irradiate the film 11 with light 13. This allows the film 11 to swell on both the front and back sides, forming a low-loss leading wavepath I5, for example, as shown in FIG.
以上述べてきたように、本発明によれば、極めて節易な
方法で膜形状変化′辻の大きな膜厚分布膜を形成するこ
とができ、実用的には極めて有用であるAs described above, according to the present invention, it is possible to form a film with a large film thickness distribution with a large change in film shape using an extremely simple method, which is extremely useful in practice.
第1図は本発明の詳細な説明するための図、第2図は本
発明の他の実施例を説明するための図、
第3図は従来の膜厚分布膜の作製方法を説明するための
図である。
第1図、第2図において、
10は基板、 11は膜、
12はマスク、 13は光、
14はレンズ、 15は先導波路である。FIG. 1 is a diagram for explaining the present invention in detail, FIG. 2 is a diagram for explaining another embodiment of the present invention, and FIG. 3 is a diagram for explaining the conventional method for manufacturing a thickness distribution film. This is a diagram. 1 and 2, 10 is a substrate, 11 is a film, 12 is a mask, 13 is a light, 14 is a lens, and 15 is a leading waveguide.
Claims (1)
に光照射し膜形状を変化させる膜厚分布膜の作製方法に
おいて、 上記膜(11)の全部または一部の直下に膜の形状変化
を妨げる物がない状態で光照射することを特徴とする膜
厚分布膜の作製方法。 2、膜厚分布がレンズまたは導波路を形成することを特
徴とする特許請求の範囲第1項記載の膜厚分布膜の作製
方法。 3、上記膜(11)の光照射する領域の一部または全部
で膜(11)の両面に形状変化を妨げる物がない状態で
光照射することを特徴とする特許請求の範囲第1項記載
の膜厚分布膜の作製方法。[Claims] 1. A method for producing a thickness distribution film in which the film (11) containing at least a photoreactive substance is locally irradiated with light to change the film shape, wherein all or part of the film (11) is 1. A method for producing a thickness distribution film, characterized in that light is irradiated directly under the condition that there is no object that obstructs the shape change of the film. 2. The method for producing a thickness distribution film according to claim 1, wherein the thickness distribution forms a lens or a waveguide. 3. The light irradiation is performed in a part or all of the region of the film (11) to be irradiated with light in a state where there is no object that prevents shape change on both sides of the film (11). A method for producing a film with a film thickness distribution.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21977186A JPS6375706A (en) | 1986-09-19 | 1986-09-19 | Manufacture of distributed thickness film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21977186A JPS6375706A (en) | 1986-09-19 | 1986-09-19 | Manufacture of distributed thickness film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6375706A true JPS6375706A (en) | 1988-04-06 |
Family
ID=16740748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21977186A Pending JPS6375706A (en) | 1986-09-19 | 1986-09-19 | Manufacture of distributed thickness film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6375706A (en) |
-
1986
- 1986-09-19 JP JP21977186A patent/JPS6375706A/en active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2018126760A1 (en) | Resin holographic waveguide lens and preparation method therefor, and three-dimension display device | |
TWI235270B (en) | Plane light source unit and method for manufacturing holographic light-guide plate used for flat panel display | |
US20040109642A1 (en) | Optical coupling arrangement | |
Croutxé-Barghorn et al. | Fabrication of microlenses by direct photo-induced crosslinking polymerization | |
JPS6375706A (en) | Manufacture of distributed thickness film | |
JP2629671B2 (en) | Holographic exposure method | |
JPH11277543A (en) | Production of mold for molding micro-lens array | |
JPH05224396A (en) | Photomask | |
KR100878966B1 (en) | Microlens arrays having high focusing efficency | |
JPH1138203A (en) | Lenticular lens sheet | |
JP2007072459A (en) | Optical element and method of manufacturing the same | |
CN216526375U (en) | Apparatus for manufacturing integrated optical waveguide device | |
US20240134225A1 (en) | Optical film, display module, and display screen | |
DE60237499D1 (en) | Optical waveguide and associated manufacturing method | |
KR20030046047A (en) | Structure of light guide plate and fabrication methods using tilted and curved mono axis lens | |
JPS607405A (en) | Manufacture of optical waveguide | |
JP2530626B2 (en) | Method of producing film thickness distribution film | |
KR101906906B1 (en) | Mold frame for light guide plate, manufacturing method for light guide plate comprising the same and method for pattern forming using mold frame | |
JPH01134310A (en) | Production of light guide | |
JP2541584B2 (en) | Microlens array manufacturing method | |
JPS63136002A (en) | Production of concave lens | |
JP2009151257A (en) | Inclined exposure lithography system | |
JPH02239202A (en) | Lenticular screen and production thereof | |
JPH10293220A (en) | Manufacture of light guide and its device | |
JP2942825B1 (en) | Method of manufacturing optical integrated circuit having out-of-plane branch mirror |