JPS637346Y2 - - Google Patents

Info

Publication number
JPS637346Y2
JPS637346Y2 JP13697481U JP13697481U JPS637346Y2 JP S637346 Y2 JPS637346 Y2 JP S637346Y2 JP 13697481 U JP13697481 U JP 13697481U JP 13697481 U JP13697481 U JP 13697481U JP S637346 Y2 JPS637346 Y2 JP S637346Y2
Authority
JP
Japan
Prior art keywords
evaporator
oil
separation tank
waste liquid
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13697481U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5843992U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13697481U priority Critical patent/JPS5843992U/ja
Publication of JPS5843992U publication Critical patent/JPS5843992U/ja
Application granted granted Critical
Publication of JPS637346Y2 publication Critical patent/JPS637346Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
JP13697481U 1981-09-14 1981-09-14 廃液処理用蒸発装置 Granted JPS5843992U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13697481U JPS5843992U (ja) 1981-09-14 1981-09-14 廃液処理用蒸発装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13697481U JPS5843992U (ja) 1981-09-14 1981-09-14 廃液処理用蒸発装置

Publications (2)

Publication Number Publication Date
JPS5843992U JPS5843992U (ja) 1983-03-24
JPS637346Y2 true JPS637346Y2 (enrdf_load_stackoverflow) 1988-03-02

Family

ID=29930274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13697481U Granted JPS5843992U (ja) 1981-09-14 1981-09-14 廃液処理用蒸発装置

Country Status (1)

Country Link
JP (1) JPS5843992U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6156678B2 (ja) * 2012-10-11 2017-07-05 パナソニックIpマネジメント株式会社 レジスト剥離液の再生方法および再生装置

Also Published As

Publication number Publication date
JPS5843992U (ja) 1983-03-24

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