JPS6373356U - - Google Patents
Info
- Publication number
- JPS6373356U JPS6373356U JP16786286U JP16786286U JPS6373356U JP S6373356 U JPS6373356 U JP S6373356U JP 16786286 U JP16786286 U JP 16786286U JP 16786286 U JP16786286 U JP 16786286U JP S6373356 U JPS6373356 U JP S6373356U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- target
- frequency sputtering
- high frequency
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16786286U JPH033574Y2 (https=) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16786286U JPH033574Y2 (https=) | 1986-10-31 | 1986-10-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373356U true JPS6373356U (https=) | 1988-05-16 |
| JPH033574Y2 JPH033574Y2 (https=) | 1991-01-30 |
Family
ID=31100195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16786286U Expired JPH033574Y2 (https=) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH033574Y2 (https=) |
-
1986
- 1986-10-31 JP JP16786286U patent/JPH033574Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH033574Y2 (https=) | 1991-01-30 |