JPS6373186U - - Google Patents
Info
- Publication number
- JPS6373186U JPS6373186U JP1986168919U JP16891986U JPS6373186U JP S6373186 U JPS6373186 U JP S6373186U JP 1986168919 U JP1986168919 U JP 1986168919U JP 16891986 U JP16891986 U JP 16891986U JP S6373186 U JPS6373186 U JP S6373186U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- polishing
- steam
- cleaning
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims 5
- 238000013020 steam cleaning Methods 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 1
- 230000003028 elevating effect Effects 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986168919U JPS6373186U (enFirst) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986168919U JPS6373186U (enFirst) | 1986-10-31 | 1986-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373186U true JPS6373186U (enFirst) | 1988-05-16 |
Family
ID=31102249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986168919U Pending JPS6373186U (enFirst) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373186U (enFirst) |
-
1986
- 1986-10-31 JP JP1986168919U patent/JPS6373186U/ja active Pending
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