JPS637158U - - Google Patents
Info
- Publication number
- JPS637158U JPS637158U JP9681986U JP9681986U JPS637158U JP S637158 U JPS637158 U JP S637158U JP 9681986 U JP9681986 U JP 9681986U JP 9681986 U JP9681986 U JP 9681986U JP S637158 U JPS637158 U JP S637158U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation source
- substrate
- electrons
- applying
- collecting electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 238000007733 ion plating Methods 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986096819U JPS6350289Y2 (de) | 1986-06-26 | 1986-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986096819U JPS6350289Y2 (de) | 1986-06-26 | 1986-06-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS637158U true JPS637158U (de) | 1988-01-18 |
| JPS6350289Y2 JPS6350289Y2 (de) | 1988-12-23 |
Family
ID=30963018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986096819U Expired JPS6350289Y2 (de) | 1986-06-26 | 1986-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350289Y2 (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4990685A (de) * | 1972-12-29 | 1974-08-29 |
-
1986
- 1986-06-26 JP JP1986096819U patent/JPS6350289Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4990685A (de) * | 1972-12-29 | 1974-08-29 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6350289Y2 (de) | 1988-12-23 |
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