JPH0379153U - - Google Patents
Info
- Publication number
- JPH0379153U JPH0379153U JP13979189U JP13979189U JPH0379153U JP H0379153 U JPH0379153 U JP H0379153U JP 13979189 U JP13979189 U JP 13979189U JP 13979189 U JP13979189 U JP 13979189U JP H0379153 U JPH0379153 U JP H0379153U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- generation chamber
- plasma generation
- target
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021645 metal ion Inorganic materials 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 238000005192 partition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13979189U JPH0379153U (de) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13979189U JPH0379153U (de) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0379153U true JPH0379153U (de) | 1991-08-12 |
Family
ID=31686816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13979189U Pending JPH0379153U (de) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0379153U (de) |
-
1989
- 1989-11-30 JP JP13979189U patent/JPH0379153U/ja active Pending
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