JPS6318746U - - Google Patents
Info
- Publication number
- JPS6318746U JPS6318746U JP11204886U JP11204886U JPS6318746U JP S6318746 U JPS6318746 U JP S6318746U JP 11204886 U JP11204886 U JP 11204886U JP 11204886 U JP11204886 U JP 11204886U JP S6318746 U JPS6318746 U JP S6318746U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- ion source
- plasma chamber
- extracting ions
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11204886U JPS6318746U (de) | 1986-07-23 | 1986-07-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11204886U JPS6318746U (de) | 1986-07-23 | 1986-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6318746U true JPS6318746U (de) | 1988-02-06 |
Family
ID=30992551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11204886U Pending JPS6318746U (de) | 1986-07-23 | 1986-07-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6318746U (de) |
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1986
- 1986-07-23 JP JP11204886U patent/JPS6318746U/ja active Pending