JPS6371141U - - Google Patents
Info
- Publication number
- JPS6371141U JPS6371141U JP16390286U JP16390286U JPS6371141U JP S6371141 U JPS6371141 U JP S6371141U JP 16390286 U JP16390286 U JP 16390286U JP 16390286 U JP16390286 U JP 16390286U JP S6371141 U JPS6371141 U JP S6371141U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- vacuum path
- path
- vacuum
- suction collet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006378 damage Effects 0.000 claims 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16390286U JPS6371141U (ko) | 1986-10-24 | 1986-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16390286U JPS6371141U (ko) | 1986-10-24 | 1986-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6371141U true JPS6371141U (ko) | 1988-05-13 |
Family
ID=31092531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16390286U Pending JPS6371141U (ko) | 1986-10-24 | 1986-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6371141U (ko) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185387A (ja) * | 1989-01-11 | 1990-07-19 | Aloka Co Ltd | ビーズ移送装置 |
| JPH10305937A (ja) * | 1997-05-02 | 1998-11-17 | Sharp Corp | エアー給紙装置 |
| JP2007030139A (ja) * | 2005-07-29 | 2007-02-08 | Seiko Instruments Inc | 真空チャック |
| JP2010146927A (ja) * | 2008-12-22 | 2010-07-01 | Hitachi High-Technologies Corp | 試料搬送機構、及び試料搬送機構を備えた走査電子顕微鏡 |
| JP2014136263A (ja) * | 2013-01-15 | 2014-07-28 | Sinfonia Technology Co Ltd | 吸着装置及びこれを備えた搬送装置 |
| JP5610658B1 (ja) * | 2014-03-31 | 2014-10-22 | アキム株式会社 | ノズル構造及び吸着方法 |
-
1986
- 1986-10-24 JP JP16390286U patent/JPS6371141U/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02185387A (ja) * | 1989-01-11 | 1990-07-19 | Aloka Co Ltd | ビーズ移送装置 |
| JPH10305937A (ja) * | 1997-05-02 | 1998-11-17 | Sharp Corp | エアー給紙装置 |
| JP2007030139A (ja) * | 2005-07-29 | 2007-02-08 | Seiko Instruments Inc | 真空チャック |
| JP4544529B2 (ja) * | 2005-07-29 | 2010-09-15 | セイコーインスツル株式会社 | 真空チャック |
| JP2010146927A (ja) * | 2008-12-22 | 2010-07-01 | Hitachi High-Technologies Corp | 試料搬送機構、及び試料搬送機構を備えた走査電子顕微鏡 |
| JP2014136263A (ja) * | 2013-01-15 | 2014-07-28 | Sinfonia Technology Co Ltd | 吸着装置及びこれを備えた搬送装置 |
| JP5610658B1 (ja) * | 2014-03-31 | 2014-10-22 | アキム株式会社 | ノズル構造及び吸着方法 |