JPS6370044U - - Google Patents
Info
- Publication number
- JPS6370044U JPS6370044U JP16350986U JP16350986U JPS6370044U JP S6370044 U JPS6370044 U JP S6370044U JP 16350986 U JP16350986 U JP 16350986U JP 16350986 U JP16350986 U JP 16350986U JP S6370044 U JPS6370044 U JP S6370044U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- fixed
- movable electrode
- electrode
- fixed electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
Description
第１図は本考案の小型の圧力センサの例を示す
断面図であり、第２図はそれに用いられる固定電
極板の斜視図である。第３図は従来の静電容量型
の圧力センサの断面図であり、第４図は静電容量
型のセンサと組合わせて用いられる静電容量測定
回路の例の構成図である。
１，２１…固定電極板、１′…出力用ピン、２
，２２…可動電極板、３，２３…ダイヤフラム、
４，２４…ハンダ、５，２０…ハウジング、７…
出力導線、２５…ダイヤフラム支持板、２６…Ｏ
リング、Ｃ…容量、ＯＳＣ…発振器、ｆ―Ｖ…ｆ
Ｖ変換器。
FIG. 1 is a sectional view showing an example of a small pressure sensor of the present invention, and FIG. 2 is a perspective view of a fixed electrode plate used therein. FIG. 3 is a sectional view of a conventional capacitance type pressure sensor, and FIG. 4 is a configuration diagram of an example of a capacitance measuring circuit used in combination with the capacitance type sensor. 1, 21...Fixed electrode plate, 1'...Output pin, 2
, 22...movable electrode plate, 3, 23... diaphragm,
4, 24...Solder, 5,20...Housing, 7...
Output conductor, 25...Diaphragm support plate, 26...O
Ring, C...capacitance, OSC...oscillator, f-V...f
V converter.
Claims (1)
ムと、該ダイヤフラムに対して固着された可動電
極と、該可動電極に対向しかつ平行に設けられた
固定電極とをハウジング内に組込んでなる静電容
量型の圧力センサにおいて、該固定電極の周縁部
に一体として高剛性の出力用ピンを形成したこと
を特徴とする小型の圧力センサ。 An electrostatic device that incorporates a diaphragm that generates displacement in response to measured pressure, a movable electrode fixed to the diaphragm, and a fixed electrode facing and parallel to the movable electrode in a housing. A small capacitive pressure sensor, characterized in that a highly rigid output pin is integrally formed on the peripheral edge of the fixed electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16350986U JPS6370044U (en) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16350986U JPS6370044U (en) | 1986-10-27 | 1986-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6370044U true JPS6370044U (en) | 1988-05-11 |
Family
ID=31091773
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16350986U Pending JPS6370044U (en) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370044U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59171826A (en) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | Temperature compensator for electrostatic capacitance type pressure sensor |
-
1986
- 1986-10-27 JP JP16350986U patent/JPS6370044U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59171826A (en) * | 1983-03-22 | 1984-09-28 | Copal Takeda Medical Kenkyusho:Kk | Temperature compensator for electrostatic capacitance type pressure sensor |