JPS6247150U - - Google Patents
Info
- Publication number
- JPS6247150U JPS6247150U JP13969885U JP13969885U JPS6247150U JP S6247150 U JPS6247150 U JP S6247150U JP 13969885 U JP13969885 U JP 13969885U JP 13969885 U JP13969885 U JP 13969885U JP S6247150 U JPS6247150 U JP S6247150U
- Authority
- JP
- Japan
- Prior art keywords
- gauge body
- semiconductor
- voltage supply
- diaphragm
- gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 3
- 239000013078 crystal Substances 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
第１図は本考案の一実施例の要部構成説明図、
第２図、第３図は第１図の動作説明図、第４図、
第５図はそれぞれ本考案の他お実施例の構成説明
図、第６図、第７図、第８図は従来より一般に使
用されている従来例の構成説明図である。
１……ダイアフラム、２……剪断形ゲージ、２
２……電圧供給端子、２４……ゲージ本体。
FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
Figures 2 and 3 are operation explanatory diagrams of Figure 1, Figure 4,
FIG. 5 is an explanatory diagram of the configuration of other embodiments of the present invention, and FIGS. 6, 7, and 8 are explanatory diagrams of the configuration of conventional examples that have been commonly used. 1...Diaphragm, 2...Shear type gauge, 2
2... Voltage supply terminal, 24... Gauge body.
Claims (1)
半導体単結晶からなるダイアフラムと、該ダイア
フラムに設けられ半導体からなるゲージ本体と該
ゲージ本体に取付けられた電圧供給端子と出力端
子とを備える剪断形ゲージとを具備する半導体圧
力センサにおいて、前記ゲージ本体が電圧供給端
子から出力端子へ徐々に広がるテーパー形状をな
すことを特徴とする半導体圧力センサ。 It includes a diaphragm made of a semiconductor single crystal that receives measurement pressure and whose crystal plane is in the (100) direction, a gauge body made of a semiconductor provided on the diaphragm, and a voltage supply terminal and an output terminal attached to the gauge body. 1. A semiconductor pressure sensor comprising a shear type gauge, wherein the gauge body has a tapered shape that gradually widens from a voltage supply terminal to an output terminal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13969885U JPH058683Y2 (en) | 1985-09-12 | 1985-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13969885U JPH058683Y2 (en) | 1985-09-12 | 1985-09-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6247150U true JPS6247150U (en) | 1987-03-23 |
| JPH058683Y2 JPH058683Y2 (en) | 1993-03-04 |
Family
ID=31045847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13969885U Expired - Lifetime JPH058683Y2 (en) | 1985-09-12 | 1985-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH058683Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107479743B (en) * | 2017-07-28 | 2020-08-18 | 上海天马微电子有限公司 | Display substrate, display panel and display device |
-
1985
- 1985-09-12 JP JP13969885U patent/JPH058683Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH058683Y2 (en) | 1993-03-04 |