JPS6355559U

JPS6355559U -

Info

Publication number: JPS6355559U
Application number: JP14969586U
Authority: JP
Priority date: 1986-09-30
Filing date: 1986-09-30
Publication date: 1988-04-14
Anticipated expiration: 2001-09-30
Also published as: JPH0533017Y2

Description

[Brief explanation of drawings]

第１図は本考案の一実施例の要部構成説明図、
第２図は第１図の０―０′断面図、第３図は第１
図の駆動動回路例、第４図は本考案の他の実施例
の構成説明図、第５図は従来より一般に使用され
ている従来例の構成説明図、第６図は第５図の側
面図、第７図は第５図の要部構成説明図である。１……ダイアフラム、２……剪断形ゲージ、２
１……ゲージ本体、２２……電源供給リード、２
３……出力リード、２４……電源供給端子、２５
……出力端子、３１……フイードバツクリード、
３２……フイードバツク端子。 FIG. 1 is an explanatory diagram of the main part configuration of an embodiment of the present invention,
Figure 2 is a 0-0' sectional view of Figure 1, Figure 3 is a cross-sectional view of Figure 1.
4 is an explanatory diagram of the configuration of another embodiment of the present invention, FIG. 5 is an explanatory diagram of the configuration of a conventional example commonly used, and FIG. 6 is a side view of FIG. 5. FIG. 7 is an explanatory diagram of the main part configuration of FIG. 5. 1...Diaphragm, 2...Shear type gauge, 2
1... Gauge body, 22... Power supply lead, 2
3... Output lead, 24... Power supply terminal, 25
...Output terminal, 31...Feedback lead,
32...Feedback terminal.

Claims

[Scope of utility model registration request]

A diaphragm made of a semiconductor single crystal that receives measurement pressure and whose crystal plane is in the direction of the 100 plane, a gauge body made of a semiconductor provided on the diaphragm, and an impurity diffusion layer whose one end is attached to the gauge body and whose concentration is higher than that of the gauge body. A power supply lead consisting of a power supply lead, a power supply terminal attached to the other end of the power supply lead, an output lead having one end attached to the gauge body and comprising an impurity diffusion layer having a higher concentration than the gauge body, and the output lead other than the output lead. In a semiconductor pressure sensor equipped with a shear type gauge having an output terminal attached to an end side, a flap is connected at one end perpendicularly to the power supply lead and is made of an impurity diffusion layer having the same concentration as the power supply lead. A semiconductor pressure sensor comprising a feedback lead and a feedback terminal provided at the other end of the feedback lead.