JPS6370011U - - Google Patents
Info
- Publication number
- JPS6370011U JPS6370011U JP16441786U JP16441786U JPS6370011U JP S6370011 U JPS6370011 U JP S6370011U JP 16441786 U JP16441786 U JP 16441786U JP 16441786 U JP16441786 U JP 16441786U JP S6370011 U JPS6370011 U JP S6370011U
- Authority
- JP
- Japan
- Prior art keywords
- reference mirror
- beam splitter
- mirror
- measurement surface
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案の一実施例を示す分解斜視図、
第２図は同上の側面図、第３図は本考案に係る光
干渉式変位測定装置を示す概略構成図である。
１は光源、２はビームスプリツタ、３は測定面
、４は参照鏡、１２はベース、１３はスライド体
である。
FIG. 1 is an exploded perspective view showing an embodiment of the present invention;
FIG. 2 is a side view of the same as the above, and FIG. 3 is a schematic configuration diagram showing the optical interference type displacement measuring device according to the present invention. 1 is a light source, 2 is a beam splitter, 3 is a measurement surface, 4 is a reference mirror, 12 is a base, and 13 is a slide body.
Claims (1)
照鏡とに照射され測定面と参照鏡とでそれぞれ反
射された光線による干渉縞を、ビームスプリツタ
と参照鏡との距離を変えて複数回観測し、各観測
値に基づいて測定面の変位量を測定する光干渉式
変位測定装置において、参照鏡は上記測定回数と
同数個設けられるとともに、各参照鏡をそれぞれ
ビームスプリツタの光軸上に選択的に位置させる
鏡選択ユニツトに装着され、鏡選択ユニツトは各
参照鏡がそれぞれ装着されるとともにビームスプ
リツタの光軸上に位置する各参照鏡とビームスプ
リツタとの距離をそれぞれ個別に設定するスライ
ド体を具備して成る光干渉式変位測定装置の参照
鏡位置決め装置。 The interference fringes created by the light rays emitted from the light source through the beam splitter onto the measurement surface and the reference mirror and reflected by the measurement surface and the reference mirror were observed multiple times while changing the distance between the beam splitter and the reference mirror. In an optical interferometric displacement measuring device that measures the amount of displacement of a measurement surface based on observed values, reference mirrors are provided in the same number as the number of measurements mentioned above, and each reference mirror is selectively positioned on the optical axis of the beam splitter. The mirror selection unit is attached to a mirror selection unit, on which each reference mirror is attached, and a slide body that individually sets the distance between each reference mirror located on the optical axis of the beam splitter and the beam splitter. A reference mirror positioning device for an optical interference type displacement measuring device, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16441786U JPS6370011U (en) | 1986-10-27 | 1986-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16441786U JPS6370011U (en) | 1986-10-27 | 1986-10-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6370011U true JPS6370011U (en) | 1988-05-11 |
Family
ID=31093516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16441786U Pending JPS6370011U (en) | 1986-10-27 | 1986-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6370011U (en) |
-
1986
- 1986-10-27 JP JP16441786U patent/JPS6370011U/ja active Pending