JPH0167514U - - Google Patents
Info
- Publication number
- JPH0167514U JPH0167514U JP1987162988U JP16298887U JPH0167514U JP H0167514 U JPH0167514 U JP H0167514U JP 1987162988 U JP1987162988 U JP 1987162988U JP 16298887 U JP16298887 U JP 16298887U JP H0167514 U JPH0167514 U JP H0167514U
- Authority
- JP
- Japan
- Prior art keywords
- axis
- tilt detection
- mirror
- interferometer
- detection mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
第１図は本考案による干渉計用アライメント装
置の一実施例を示す概略構成図、第２図Ａ〜Ｃは
各々同実施例を説明するための模式図である。
１……レーザ光源、４……ビームスプリツタ、
６……傾き検知用ミラー、５……基準ミラー、１
０……被検物。
FIG. 1 is a schematic diagram showing an embodiment of an interferometer alignment apparatus according to the present invention, and FIGS. 2A to 2C are schematic diagrams for explaining the embodiment. 1... Laser light source, 4... Beam splitter,
6...Mirror for tilt detection, 5...Reference mirror, 1
0...Test object.
Claims (1)
し、この傾き検知用ミラーと、基準ミラーとの間
で、トワイマングリーン干渉計を構成し、このト
ワイマングリーン干渉計によつて得られるＸ軸、
Ｙ軸の干渉縞本数が所定の関係となるように傾き
調整を行うことを特徴とする干渉計用アライメン
ト装置。 A tilt detection mirror is placed behind the test object mount, and a Twyman Green interferometer is configured between this tilt detection mirror and a reference mirror. X axis,
An interferometer alignment device characterized by adjusting the inclination so that the number of interference fringes on the Y axis has a predetermined relationship.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162988U JPH0167514U (en) | 1987-10-23 | 1987-10-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162988U JPH0167514U (en) | 1987-10-23 | 1987-10-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0167514U true JPH0167514U (en) | 1989-05-01 |
Family
ID=31447310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162988U Pending JPH0167514U (en) | 1987-10-23 | 1987-10-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0167514U (en) |
-
1987
- 1987-10-23 JP JP1987162988U patent/JPH0167514U/ja active Pending
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