JPS60113506U - position measuring device - Google Patents
position measuring deviceInfo
- Publication number
- JPS60113506U JPS60113506U JP32284U JP32284U JPS60113506U JP S60113506 U JPS60113506 U JP S60113506U JP 32284 U JP32284 U JP 32284U JP 32284 U JP32284 U JP 32284U JP S60113506 U JPS60113506 U JP S60113506U
- Authority
- JP
- Japan
- Prior art keywords
- tool
- stage
- measuring device
- position measuring
- interferometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図（１従来のレーザ干渉計を用いた電子ビーム描画
装置のステージ位置測長システムを示す 。
図、第２図はその要部を示す説明図、第３図は本考案の
一実施例を示す眸第−４図はミラーを示す ］平面図
、第５図は干渉計の内部構造を示す図、第６図は本考案
の他の実施例を示す図である。Figure 1 (1) shows a stage position and length measurement system for an electron beam lithography apparatus using a conventional laser interferometer. Figure 4 is a plan view showing the mirror, Figure 5 is a diagram showing the internal structure of the interferometer, and Figure 6 is a diagram showing another embodiment of the present invention.
Claims (1)
する装置であって、前記ステージに設けられたミラーと
、前記工具に近接して設けられたミラーと、この両ミラ
ーに周波数の異なる光を照射し、その両ミラーからの反
射光を互いに干渉状態として出力する干渉計とを備え、
この干渉計から出力される両反射光の干渉状態の移相に
よってステージと工具との相対位置を測定することを特
徴とする位置測定装置。A device for measuring the relative position of a stage on which a workpiece is placed and a tool, the device including a mirror provided on the stage, a mirror provided close to the tool, and a mirror that has different frequencies. Equipped with an interferometer that emits light and outputs the reflected light from both mirrors as mutual interference,
A position measuring device that measures the relative position of a stage and a tool by phase shifting the interference state of both reflected lights output from the interferometer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32284U JPS60113506U (en) | 1984-01-05 | 1984-01-05 | position measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32284U JPS60113506U (en) | 1984-01-05 | 1984-01-05 | position measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60113506U true JPS60113506U (en) | 1985-08-01 |
Family
ID=30472057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32284U Pending JPS60113506U (en) | 1984-01-05 | 1984-01-05 | position measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60113506U (en) |
-
1984
- 1984-01-05 JP JP32284U patent/JPS60113506U/en active Pending
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