JPS6237704U - - Google Patents
Info
- Publication number
- JPS6237704U JPS6237704U JP12881685U JP12881685U JPS6237704U JP S6237704 U JPS6237704 U JP S6237704U JP 12881685 U JP12881685 U JP 12881685U JP 12881685 U JP12881685 U JP 12881685U JP S6237704 U JPS6237704 U JP S6237704U
- Authority
- JP
- Japan
- Prior art keywords
- light source
- interference
- light
- projector
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Description
第１図は本考案の一実施例を示す平面図、第２
図および第３図はそれぞれ倍率可変光学系の他の
実施例を示す正面図および平面図、第４図は投影
器用光源を振らした状態を示す図、第５図は従来
のフイゾー型レーザー干渉計の一例を示す平面図
である。
１…レーザー光源、４…コリメーターレンズ、
５…平面原器、６…被検物、７…反射鏡、９…撮
像素子、２０…投影器用光源、２２…倍率可変光
学系、２３…ピンホール、Ｂ…観測光路、Ｓ…被
検面。
Fig. 1 is a plan view showing one embodiment of the present invention;
3 and 3 are respectively a front view and a plan view showing another embodiment of the variable magnification optical system, FIG. 4 is a diagram showing a state in which the projector light source is swung, and FIG. 5 is a conventional Fizeau type laser interferometer. It is a top view showing an example. 1...Laser light source, 4...Collimator lens,
5... Planar prototype, 6... Test object, 7... Reflector, 9... Image pickup element, 20... Projector light source, 22... Magnification variable optical system, 23... Pinhole, B... Observation optical path, S... Test surface .
Claims (1)
被検面に導き、その戻つてくる反射光の相互干渉
に基づいて干渉縞からなる干渉像を観測し、前記
被検面の面形状を測定する干渉計において、前記
光源とは別に投影器用光源を配設すると共に観測
光路中に倍率可変光学系を配設し、前記両光源を
同時にもしくは選択的に点灯し、前記被検面の干
渉像と、拡大像とを得るようにしたことを特徴と
する投影器兼用型干渉計。 Light emitted from a light source is guided to the test surface of the test object through an optical element, and an interference image consisting of interference fringes is observed based on the mutual interference of the reflected light that returns, and the surface shape of the test surface is determined. In the interferometer to be measured, a light source for a projector is provided separately from the light source, and a variable magnification optical system is provided in the observation optical path, and both light sources are turned on simultaneously or selectively to prevent interference on the surface to be measured. A projector-type interferometer characterized by being configured to obtain an image and an enlarged image.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12881685U JPS6237704U (en) | 1985-08-26 | 1985-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12881685U JPS6237704U (en) | 1985-08-26 | 1985-08-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6237704U true JPS6237704U (en) | 1987-03-06 |
Family
ID=31024821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12881685U Pending JPS6237704U (en) | 1985-08-26 | 1985-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6237704U (en) |
-
1985
- 1985-08-26 JP JP12881685U patent/JPS6237704U/ja active Pending