JPS636729U - - Google Patents
Info
- Publication number
- JPS636729U JPS636729U JP10130186U JP10130186U JPS636729U JP S636729 U JPS636729 U JP S636729U JP 10130186 U JP10130186 U JP 10130186U JP 10130186 U JP10130186 U JP 10130186U JP S636729 U JPS636729 U JP S636729U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- cooler
- semiconductor wafers
- piping
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10130186U JPS636729U (US06168776-20010102-C00028.png) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10130186U JPS636729U (US06168776-20010102-C00028.png) | 1986-06-30 | 1986-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS636729U true JPS636729U (US06168776-20010102-C00028.png) | 1988-01-18 |
Family
ID=30971919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10130186U Pending JPS636729U (US06168776-20010102-C00028.png) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS636729U (US06168776-20010102-C00028.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007500431A (ja) * | 2003-07-24 | 2007-01-11 | ケムトレース プレシジョン クリーニング， インコーポレイテッド | 腐食液を使用する超音波補助式エッチング |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59213133A (ja) * | 1983-05-18 | 1984-12-03 | Hitachi Ltd | 半導体基体のエツチング方法 |
| JPS6010733A (ja) * | 1983-06-30 | 1985-01-19 | Nec Corp | 半導体ウエハ−の製造装置 |
| JPS61101032A (ja) * | 1984-10-24 | 1986-05-19 | Hitachi Ltd | 処理装置 |
-
1986
- 1986-06-30 JP JP10130186U patent/JPS636729U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59213133A (ja) * | 1983-05-18 | 1984-12-03 | Hitachi Ltd | 半導体基体のエツチング方法 |
| JPS6010733A (ja) * | 1983-06-30 | 1985-01-19 | Nec Corp | 半導体ウエハ−の製造装置 |
| JPS61101032A (ja) * | 1984-10-24 | 1986-05-19 | Hitachi Ltd | 処理装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007500431A (ja) * | 2003-07-24 | 2007-01-11 | ケムトレース プレシジョン クリーニング， インコーポレイテッド | 腐食液を使用する超音波補助式エッチング |
