JPS636728U - - Google Patents
Info
- Publication number
- JPS636728U JPS636728U JP1986100176U JP10017686U JPS636728U JP S636728 U JPS636728 U JP S636728U JP 1986100176 U JP1986100176 U JP 1986100176U JP 10017686 U JP10017686 U JP 10017686U JP S636728 U JPS636728 U JP S636728U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- substrate
- mounting base
- support
- spray device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986100176U JPH0325400Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-06-30 | 1986-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986100176U JPH0325400Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-06-30 | 1986-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS636728U true JPS636728U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-18 |
| JPH0325400Y2 JPH0325400Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-06-03 |
Family
ID=30969748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986100176U Expired JPH0325400Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-06-30 | 1986-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0325400Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007052300A (ja) * | 2005-08-19 | 2007-03-01 | Pre-Tech Co Ltd | マスク基板用の洗浄装置及びそれを用いたマスク基板の洗浄方法 |
| JP2008192963A (ja) * | 2007-02-07 | 2008-08-21 | Oki Electric Ind Co Ltd | ガイド部材の位置決め方法、及び基板の位置決め方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51137177U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-04-26 | 1976-11-05 | ||
| JPS5455785U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1977-09-21 | 1979-04-18 | ||
| JPS5498574A (en) * | 1978-01-20 | 1979-08-03 | Matsushita Electric Ind Co Ltd | Rotary coating unit of viscous material |
| JPS5571547U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1978-11-08 | 1980-05-16 | ||
| JPS614772U (ja) * | 1984-06-12 | 1986-01-13 | ホ−ヤ株式会社 | スプレ−装置 |
-
1986
- 1986-06-30 JP JP1986100176U patent/JPH0325400Y2/ja not_active Expired
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51137177U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1975-04-26 | 1976-11-05 | ||
| JPS5455785U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1977-09-21 | 1979-04-18 | ||
| JPS5498574A (en) * | 1978-01-20 | 1979-08-03 | Matsushita Electric Ind Co Ltd | Rotary coating unit of viscous material |
| JPS5571547U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1978-11-08 | 1980-05-16 | ||
| JPS614772U (ja) * | 1984-06-12 | 1986-01-13 | ホ−ヤ株式会社 | スプレ−装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007052300A (ja) * | 2005-08-19 | 2007-03-01 | Pre-Tech Co Ltd | マスク基板用の洗浄装置及びそれを用いたマスク基板の洗浄方法 |
| JP2008192963A (ja) * | 2007-02-07 | 2008-08-21 | Oki Electric Ind Co Ltd | ガイド部材の位置決め方法、及び基板の位置決め方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325400Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-06-03 |