JPS6366266B2 - - Google Patents

Info

Publication number
JPS6366266B2
JPS6366266B2 JP632283A JP632283A JPS6366266B2 JP S6366266 B2 JPS6366266 B2 JP S6366266B2 JP 632283 A JP632283 A JP 632283A JP 632283 A JP632283 A JP 632283A JP S6366266 B2 JPS6366266 B2 JP S6366266B2
Authority
JP
Japan
Prior art keywords
liquid
nozzle
electric vibrator
atomization
inductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP632283A
Other languages
Japanese (ja)
Other versions
JPS59132963A (en
Inventor
Shinichi Nakane
Naoyoshi Maehara
Kazushi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP632283A priority Critical patent/JPS59132963A/en
Priority to US06/563,522 priority patent/US4632311A/en
Publication of JPS59132963A publication Critical patent/JPS59132963A/en
Publication of JPS6366266B2 publication Critical patent/JPS6366266B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B05B17/0646Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Special Spraying Apparatus (AREA)

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、灯油や軽油等の液体燃料・水・薬溶
液・記録液等を、電気的振動子を用いて霧化する
液体の霧化装置に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a liquid atomization device that atomizes liquid fuel such as kerosene or light oil, water, medicinal solution, recording liquid, etc. using an electric vibrator. .

従来例の構成とその問題点 従来から液体の霧化装置には、種々のものが提
案されており、圧電素子等の電気的振動子を用い
たものも多く見うけられる。
Configurations of Conventional Examples and Their Problems Various types of liquid atomization devices have been proposed in the past, and many of them use electric vibrators such as piezoelectric elements.

例えば、(1)ホーン型の振動子に圧電素子をボル
ト締め、又は接着し、圧電素子の機械的振動振幅
をホーン型振動子で増幅し、ホーン先端の振幅拡
大面に液体を供給、滴下して霧化する振幅増幅型
超音波霧化装置、あるいは、(2)近年インクジエツ
ト記録装置に実用化されている超音波霧化粒子列
を噴射するもので、液室の一端に圧電振動子を設
け、他端にオリフイスを設けた構成で、圧電振動
子の振動による液室内の圧力上昇を液体を介して
オリフイスに伝え、その結果オリフイスより霧化
粒子をかなりの飛散速度をもつて噴射することが
出来る霧化装置がある。
For example, (1) a piezoelectric element is bolted or glued to a horn-shaped vibrator, the mechanical vibration amplitude of the piezoelectric element is amplified by the horn-shaped vibrator, and a liquid is supplied and dripped onto the amplitude amplifying surface at the tip of the horn. (2) A device that injects an array of ultrasonic atomized particles, which has been put into practical use in inkjet recording devices in recent years, and has a piezoelectric vibrator installed at one end of the liquid chamber. , with an orifice installed at the other end, the pressure increase in the liquid chamber due to the vibration of the piezoelectric vibrator is transmitted to the orifice via the liquid, and as a result, atomized particles can be sprayed from the orifice at a considerable scattering speed. There are atomization devices that can do this.

しかし、上記従来の超音波霧化装置は種々の欠
点を有していた。
However, the conventional ultrasonic atomization device described above had various drawbacks.

(1)の霧化装置は、ホーン型振動子の高い加工精
度と、液体を供給するポンプ等が必要となるため
高価とならざるを得ない上、霧化面への液体供給
方法が複雑であつた。また、20c.c./minの霧化量
を得るためには、5〜10ワツトとかなり大きな消
費電力が必要な上、その霧化能力も十分なもので
はなかつた。
The atomization device (1) requires high machining precision for the horn-shaped vibrator and a pump to supply the liquid, so it is expensive, and the method of supplying the liquid to the atomization surface is complicated. It was hot. Further, in order to obtain an atomization amount of 20 c.c./min, a considerably large power consumption of 5 to 10 watts is required, and the atomization ability is not sufficient.

(2)の霧化装置は、インクジエツトに利用されて
いる事実からも明らかなように、構成が簡単で動
作も安定という長所を有していたが、振動子の振
動による液室内の圧力上昇を液体を介してオリフ
イスに伝達する構成であるため、溶存空気を多量
に含む一般的な液体を使用した場合には、液室内
にキヤビテーシヨン気泡が発生し、この気泡のた
めに安定した霧化動作を維持できないという欠点
を有していた。そこで、一般の液体を霧化するに
は溶存空気を脱気しなければならず、極めて汎用
性に欠けていた。
The atomizing device (2) had the advantage of being simple in structure and stable in operation, as is clear from the fact that it is used in inkjet. Since the configuration transmits the information to the orifice via the liquid, when a typical liquid containing a large amount of dissolved air is used, cavitation bubbles will occur in the liquid chamber, and these bubbles will prevent stable atomization operation. It had the disadvantage of being unsustainable. Therefore, in order to atomize ordinary liquids, dissolved air must be degassed, which is extremely lacking in versatility.

発明の目的 本発明は、このような従来の欠点を除去するも
ので、コンパクトな構成で、しかも、低消費電力
で十分な霧化量を得ると共に、環境変化に対して
も安定な霧化動作を維持する霧化装置の提供を目
的とする。
Purpose of the Invention The present invention aims to eliminate such conventional drawbacks, and has a compact configuration, obtains sufficient atomization amount with low power consumption, and provides stable atomization operation even under environmental changes. The purpose is to provide an atomization device that maintains

発明の構成 この目的を達成するために本発明は、液体を充
填する加圧室を備えたボデイーと、前記加圧室に
液体を供給するための供給部と、前記加圧室に臨
むように設けたノズルを有するノズル部と、前記
ノズル部を付勢して前記ノズルを加振する電気的
振動子とで霧化器を構成し、インダクタを介して
前記電気的振動子へ発振信号を伝達する発振駆動
部と、前記電気的振動子に並列接続された抵抗部
から霧化装置を構成している。
Structure of the Invention In order to achieve this object, the present invention includes a body including a pressurizing chamber filled with liquid, a supply section for supplying liquid to the pressurizing chamber, and a supply section facing the pressurizing chamber. An atomizer is constituted by a nozzle part having a nozzle provided therein, and an electric vibrator that energizes the nozzle part to vibrate the nozzle, and transmits an oscillation signal to the electric vibrator via an inductor. The atomizing device is composed of an oscillation driving section and a resistor section connected in parallel to the electric vibrator.

この構成により、電気的振動子はインダクタと
で電気的タンク回路をなし、増幅部の供給電圧を
昇圧して振動を行うので低消費電力化が図られる
と共に、電気的振動子と並列接続した抵抗成分に
よつてタンク回路のQを所定値まで下げている。
また、実際の霧化動作時にはノズル板の振動によ
り、加圧室が液体の自給ポンプ作用をし、全体の
霧化器システムとしてはコンパクトになる。
With this configuration, the electric vibrator forms an electric tank circuit with the inductor, which boosts the voltage supplied to the amplification section to generate vibrations, reducing power consumption. Depending on the component, the Q of the tank circuit is lowered to a predetermined value.
Furthermore, during actual atomization operation, the pressurized chamber acts as a self-sufficient liquid pump due to the vibration of the nozzle plate, making the entire atomizer system compact.

実施例の説明 第1図で本発明の一実施例である霧化器につい
て説明する。液体を充填する加圧室1を備えたボ
デイー2は、ビス3で取付板4に固定されてい
る。液体は供給パイプ5を介して前記加圧室1に
入り、実霧化時には気体排出用のパイプ6の途中
まで満たされる。7は加圧室1の一面に臨んで配
されたノズル部で、外周はボデイー2に接合され
ている。ノズル部7の中央には、液滴吐出用の微
細な孔を有する球面状の突起8が形成されてい
る。さらにノズル部7には、円環状の電気的振動
子、ここでは圧電素子9が装着されている。この
圧電素子9は厚さ方向に分極された圧電セラミツ
クで、ノズルとの接合面及び反対側の面には電極
を有している。10は圧電素子9へ駆動信号を伝
達するリード線で、一方は圧電素子9の片面へハ
ンダ付けされ、他方はボデイー2へビス11で接
続されている。駆動信号により圧電素子9の機械
的振動が励起されるとノズル部7も付勢されて加
振するので、結果として加圧室1内の液体が霧化
粒子12となつて吐出される。
DESCRIPTION OF EMBODIMENTS An atomizer which is an embodiment of the present invention will be described with reference to FIG. A body 2 including a pressurized chamber 1 filled with liquid is fixed to a mounting plate 4 with screws 3. The liquid enters the pressurizing chamber 1 through the supply pipe 5, and the gas discharge pipe 6 is filled halfway during actual atomization. Reference numeral 7 denotes a nozzle portion facing one side of the pressurizing chamber 1, and its outer periphery is joined to the body 2. A spherical protrusion 8 having a fine hole for ejecting droplets is formed in the center of the nozzle portion 7 . Furthermore, an annular electric vibrator, here a piezoelectric element 9, is attached to the nozzle portion 7. This piezoelectric element 9 is a piezoelectric ceramic polarized in the thickness direction, and has electrodes on the surface to be joined to the nozzle and on the opposite surface. Reference numeral 10 denotes a lead wire for transmitting a drive signal to the piezoelectric element 9, one of which is soldered to one side of the piezoelectric element 9, and the other connected to the body 2 with a screw 11. When the mechanical vibration of the piezoelectric element 9 is excited by the drive signal, the nozzle part 7 is also urged and vibrated, and as a result, the liquid in the pressurizing chamber 1 is discharged as atomized particles 12.

ところで、加圧室1へ供給される液体は、霧化
器設置構成で前記気体排出用のパイプ6途中まで
充填してもよいが、別手段として、霧化器の設置
構成では加圧室1及び排気パイプ6中は空で、液
滴吐出シーケンスに入る前に例えば排気パイプ6
を通じて負圧を加え、液体を加圧室1に充填する
と共に排気パイプ6途中まで引き上げてもよい。
後者の方法によれば、ノズル孔部で液体中の不純
物等が固化し液滴を噴出できないという不具合が
生じない。
Incidentally, the liquid supplied to the pressurizing chamber 1 may be filled halfway into the gas discharge pipe 6 in the atomizer installation configuration, but as an alternative, the liquid supplied to the pressurizing chamber 1 may be and the exhaust pipe 6 is empty, for example, the exhaust pipe 6 is empty before entering the droplet ejection sequence.
Negative pressure may be applied through the pressure chamber 1 to fill the pressurized chamber 1 with liquid, and at the same time, the exhaust pipe 6 may be pulled up halfway.
According to the latter method, there is no problem that impurities in the liquid solidify in the nozzle hole and droplets cannot be ejected.

次に、第2図で霧化部の構成の細部について示
す。aは上面図であり、bはaのC〜C′線断面図
上方を示し、13は圧電素子9の片面電極を表し
ている。後述するが、可聴周波数帯に近い超音波
域で駆動するときには、径が約10mm、厚さが約1
mmの圧電素子9に、厚さが約数10μmのノズル部
7を接着させており、一方の電極13と他方の電
極であるノズル部7との縁面距離は約1mmしかな
い。
Next, FIG. 2 shows details of the configuration of the atomizing section. a is a top view, b is a cross-sectional view taken along line C-C' of a, and 13 represents a single-sided electrode of piezoelectric element 9; As will be explained later, when driving in the ultrasonic range close to the audible frequency band, the diameter is about 10 mm and the thickness is about 1 mm.
A nozzle portion 7 having a thickness of about 10 μm is bonded to a piezoelectric element 9 having a thickness of 1 mm, and the distance between the edges of one electrode 13 and the nozzle portion 7, which is the other electrode, is only about 1 mm.

第3図は、インダクタとでタンク回路構成をな
した自励発振回路系の動作特性を示す図である。
14は増幅部で、電気的振動子9に流れる電流を
検出する電流検出器15からの信号を増幅し、イ
ンダクタL16を介して前記圧電素子9へ駆動信
号を伝達している。
FIG. 3 is a diagram showing the operating characteristics of a self-excited oscillation circuit system having a tank circuit configuration with an inductor.
Reference numeral 14 denotes an amplification section that amplifies a signal from a current detector 15 that detects the current flowing through the electric vibrator 9, and transmits a drive signal to the piezoelectric element 9 via an inductor L16.

また第4図は、前記圧電素子9を近似した電気
的等価回路であり、17の等価並列容量Csと、
18,19,20のそれぞれ直列インダクタンス
分Lo、容量分Co、抵抗分Roで構成されている。
第3図のインダクタLは、等価並列容量Csを主
体として直列共振構成としている。このLとCs
でタンク回路を形成し、増幅器から伝達される駆
動電圧が電気的振動子両端で昇圧されると共に、
正弦波形となる。
FIG. 4 is an electrical equivalent circuit that approximates the piezoelectric element 9, with 17 equivalent parallel capacitances Cs,
18, 19, and 20, each consisting of a series inductance Lo, a capacitance Co, and a resistance Ro.
The inductor L shown in FIG. 3 has a series resonance configuration mainly consisting of the equivalent parallel capacitance Cs. This L and Cs
forms a tank circuit, and the driving voltage transmitted from the amplifier is boosted across the electric vibrator, and
It becomes a sine waveform.

ところが、前述したように圧電素子9の電極間
の縁面距離が大きく取れない構成の場合には、電
極間への湿気等の付着によつて電気的バイパス路
が形成され、前述したタンク回路での昇圧値が異
なる。そこで第5図に示すように、圧電素子9両
端に抵抗21を並列接続してタンク回路のQを下
げた回路構成で噴霧状態を得、上記のように電極
間での漏洩分が問題とならないようにするのが本
発明の電子霧化装置である。
However, as described above, in the case of a configuration in which the edge surface distance between the electrodes of the piezoelectric element 9 cannot be made large, an electrical bypass path is formed due to adhesion of moisture between the electrodes, and the tank circuit described above is The boost values are different. Therefore, as shown in Fig. 5, a spray state is obtained with a circuit configuration in which a resistor 21 is connected in parallel to both ends of the piezoelectric element 9 to lower the Q of the tank circuit, so that the leakage between the electrodes does not become a problem as described above. The electronic atomization device of the present invention does this.

第6図は、抵抗21の大きさを変えたときの霧
化器両端電圧の変化を示している。この並列に挿
入する抵抗値が小さくなる程、昇圧値が下がつて
いる。一点鎖線の電圧レヴエルは、増幅部14か
らインダクタL16に印加される増幅部電源電圧
の値である。前述したように、漏洩インピーダン
スが並列に入つた状態でも、霧化器両端電圧が大
きく変化しない並列抵抗値を選択して接続してお
けば、環境変化に対しても安定動作は可能とな
る。
FIG. 6 shows the change in the voltage across the atomizer when the size of the resistor 21 is changed. The smaller the resistance value inserted in parallel, the lower the boost value becomes. The voltage level indicated by the one-dot chain line is the value of the amplifier power supply voltage applied from the amplifier 14 to the inductor L16. As mentioned above, even when leakage impedances are connected in parallel, if a parallel resistance value is selected and connected so that the voltage across the atomizer does not change significantly, stable operation is possible even against environmental changes.

また、第7図では、圧電素子9単体に所定周波
数の駆動電圧を印加したときの電流、及び、霧化
量の変化特性であり、fr、fmはそれぞれ電気的
共振点と機械的共振点を表している。前述した自
動発振系でインダクタを調整して発振周波数を決
める場合には、このfr付近の実際に噴霧する周波
数に合わせる。
In addition, Fig. 7 shows the change characteristics of the current and the amount of atomization when a driving voltage of a predetermined frequency is applied to the piezoelectric element 9 alone, and fr and fm indicate the electrical resonance point and mechanical resonance point, respectively. represents. When determining the oscillation frequency by adjusting the inductor in the automatic oscillation system described above, it is adjusted to the actual spraying frequency near this fr.

第8図は、本発明の具体的実施例である。前図
と同一番号は、同一機能を有する構成要素を示
す。22は電流検出器を構成する抵抗で、この検
出信号がコンデンサー23を介して、コンプリメ
ンタリーSEPP型増幅回路へ送られ、この出力段
のスイツチングトランジスタ34,35の動作に
てインダクタ16を介して圧電素子9へ伝達され
ている。前記増幅回路は、抵抗24,25,2
6,27,29,31,32と、トランジスタ2
8,33,34,35と、コンデンサ30とから
構成されている。この閉ループにて、L及び前記
Csにて決まる発振周期の自励発振回路係をなし
ている。なお、出力段がスイツチング動作のた
め、トランジスタ自体の損失が少なく、増幅部と
しても低消費電力化が図られている。
FIG. 8 shows a specific embodiment of the present invention. The same numbers as in the previous figure indicate components having the same function. 22 is a resistor that constitutes a current detector, and this detection signal is sent to a complementary SEPP type amplifier circuit via a capacitor 23, and is transmitted via an inductor 16 by the operation of switching transistors 34 and 35 in the output stage. It is transmitted to the piezoelectric element 9. The amplifier circuit includes resistors 24, 25, 2
6, 27, 29, 31, 32 and transistor 2
8, 33, 34, 35, and a capacitor 30. In this closed loop, L and the above
It is responsible for a self-excited oscillation circuit with an oscillation period determined by Cs. Note that since the output stage performs a switching operation, the loss of the transistor itself is small, and the power consumption of the amplifier section is also reduced.

第9図は、本発明の別の構成例であり、発振器
36と増幅部37で発振駆動部38を形成し、イ
ンダクタ16を介して、並列抵抗21が接続され
た電気的振動子9へ駆動信号が伝達される。
FIG. 9 shows another configuration example of the present invention, in which an oscillator 36 and an amplification section 37 form an oscillation drive section 38, which is driven via an inductor 16 to an electric vibrator 9 connected to a parallel resistor 21. A signal is transmitted.

発明の効果 本発明の霧化装置によれば次のような効果が得
られる。
Effects of the Invention According to the atomization device of the present invention, the following effects can be obtained.

(1) 霧化器自体がコンパクトな構成である上に、
駆動装置の低電力化が図られ、霧化装置として
低消費電力化、すなわち、効率化が実現でき
る。
(1) The atomizer itself has a compact configuration, and
The power consumption of the drive device can be reduced, and the atomization device can achieve lower power consumption, that is, higher efficiency.

(2) 電気的振動子と並列に抵抗部を接続すること
により、電極間隔が十分に取れない構成のもの
においても結露等の環境変化にて霧化特性の低
下をきたすことがない。
(2) By connecting the resistor section in parallel with the electric vibrator, the atomization characteristics will not deteriorate due to environmental changes such as dew condensation, even if the electrodes are not sufficiently spaced apart.

(3) 電極間の表面コーテイングによる漏洩防止に
加えて本発明を用いれば、各種の環境条件に対
して、さらに駆動上の信頼性が上がる。
(3) If the present invention is used in addition to preventing leakage by surface coating between electrodes, driving reliability will be further improved under various environmental conditions.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の構成を示す断面
図、第2図aは同振動子側正面図、第2図bは電
極部断面図、第3図は自励式発振回路動作説明ブ
ロツク図、第4図は電気的振動子の電気的等価回
路図、第5図は本発明の一実施例の霧化装置のブ
ロツク図、第6図は並列抵抗値と霧化器両端電圧
との関係図、第7図は駆動周波数に対する電流と
霧化量の特性図、第8図は本発明の一実施例を示
す回路図、第9図は本発明の他の実施例を示す図
である。 1……加圧室、2……ボデイー、5……供給
部、7……ノズル部、9……圧電素子(電気的振
動子)、15……電流検出器、16……インダク
タ、21……抵抗部、38……発振駆動部。
Fig. 1 is a sectional view showing the configuration of an embodiment of the present invention, Fig. 2a is a front view of the vibrator side, Fig. 2b is a sectional view of the electrode section, and Fig. 3 is a block diagram explaining the operation of the self-excited oscillation circuit. 4 is an electrical equivalent circuit diagram of an electric vibrator, FIG. 5 is a block diagram of an atomizing device according to an embodiment of the present invention, and FIG. 6 is a diagram showing parallel resistance values and voltages across the atomizer. A relationship diagram, FIG. 7 is a characteristic diagram of current and atomization amount with respect to drive frequency, FIG. 8 is a circuit diagram showing one embodiment of the present invention, and FIG. 9 is a diagram showing another embodiment of the present invention. . DESCRIPTION OF SYMBOLS 1... Pressure chamber, 2... Body, 5... Supply part, 7... Nozzle part, 9... Piezoelectric element (electrical vibrator), 15... Current detector, 16... Inductor, 21... ...resistance section, 38... oscillation drive section.

Claims (1)

【特許請求の範囲】 1 液体を充填する加圧室を備えたボデイーと、
前記加圧室に液体を供給するための供給部と、前
記加圧室に臨むように設けたノズルを有するノズ
ル部と、前記ノズル部を付勢して前記ノズルを加
振する電気的振動子とからなる霧化器と、インダ
クタと、前記インダクタを介して前記電気的振動
子へ発振信号を伝達する発振駆動部と、前記電気
的振動子に並列接続された抵抗部とから構成され
た霧化装置。 2 電気的振動子に流れる電流を検出する電流検
出器と、前記電流検出器の信号を増幅する増幅部
とで構成された前記発振駆動部を有する特許請求
の範囲第1項記載の霧化装置。
[Claims] 1. A body equipped with a pressurized chamber filled with liquid;
a supply unit for supplying liquid to the pressurizing chamber; a nozzle unit having a nozzle facing the pressurizing chamber; and an electric vibrator that biases the nozzle unit and vibrates the nozzle. an atomizer consisting of an inductor, an oscillation drive section that transmits an oscillation signal to the electric vibrator via the inductor, and a resistor section connected in parallel to the electric vibrator. conversion device. 2. The atomization device according to claim 1, which has the oscillation drive section that includes a current detector that detects a current flowing through an electric vibrator, and an amplification section that amplifies the signal of the current detector. .
JP632283A 1982-12-20 1983-01-18 Atomizing apparatus Granted JPS59132963A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP632283A JPS59132963A (en) 1983-01-18 1983-01-18 Atomizing apparatus
US06/563,522 US4632311A (en) 1982-12-20 1983-12-20 Atomizing apparatus employing a capacitive piezoelectric transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP632283A JPS59132963A (en) 1983-01-18 1983-01-18 Atomizing apparatus

Publications (2)

Publication Number Publication Date
JPS59132963A JPS59132963A (en) 1984-07-31
JPS6366266B2 true JPS6366266B2 (en) 1988-12-20

Family

ID=11635125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP632283A Granted JPS59132963A (en) 1982-12-20 1983-01-18 Atomizing apparatus

Country Status (1)

Country Link
JP (1) JPS59132963A (en)

Also Published As

Publication number Publication date
JPS59132963A (en) 1984-07-31

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