JP2644621B2 - Ultrasonic atomizer - Google Patents
Ultrasonic atomizerInfo
- Publication number
- JP2644621B2 JP2644621B2 JP2273001A JP27300190A JP2644621B2 JP 2644621 B2 JP2644621 B2 JP 2644621B2 JP 2273001 A JP2273001 A JP 2273001A JP 27300190 A JP27300190 A JP 27300190A JP 2644621 B2 JP2644621 B2 JP 2644621B2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrator
- liquid
- ultrasonic
- vibrating
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
- B05B17/0638—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
- B05B17/0646—Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto
Landscapes
- Special Spraying Apparatus (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、超音波励振器により発生させた弾性振動に
より液体を霧化する超音波霧化装置に関する。Description: TECHNICAL FIELD The present invention relates to an ultrasonic atomizing device for atomizing a liquid by elastic vibration generated by an ultrasonic exciter.
（従来の技術） 従来の超音波霧化装置としては、ボルト締ランジェバ
ン型振動子を応用した超音波霧化装置およびネブライザ
ーが挙げられる。ボルト締ランジュバン型振動子による
霧化装置は数10KHzという周波数の超音波を利用したも
ので、多量の霧を発生しうるという長所を有するが、構
造が複雑で、装置が大がかりであるという短所をあわせ
もつ。一方、ネブライザーは、MHz領域の超音波を利用
したもので、粒子が微小で均一性に優れるという長所を
有するものの、霧化効率が悪く、多量の霧を発生させる
のが難しいという短所をもつ。(Prior Art) Conventional ultrasonic atomizers include ultrasonic atomizers and nebulizers to which a bolted Langevin type vibrator is applied. The atomization device using a bolted Langevin type vibrator uses ultrasonic waves with a frequency of several tens of KHz and has the advantage of generating a large amount of fog, but has the disadvantage that the structure is complicated and the device is large-scale. I also have it. On the other hand, the nebulizer uses ultrasonic waves in the MHz range, and has the advantages of fine particles and excellent uniformity, but has the disadvantage of poor atomization efficiency and difficulty in generating a large amount of fog.
（発明が解決しようとする課題） 従来の超音波霧化装置では、霧化効率、多量霧化、粒
子の微小性、均一性、または駆動電源のコストのいずれ
かにおいて難点があった。(Problems to be Solved by the Invention) The conventional ultrasonic atomizer has a problem in any of atomization efficiency, mass atomization, fineness and uniformity of particles, or cost of a driving power supply.
本発明の目的は、霧化効率、多量霧化、粒子の微小
性、均一性、および駆動電源コストのどの面からみても
満足のできる超音波霧化装置を提供することにある。SUMMARY OF THE INVENTION An object of the present invention is to provide an ultrasonic atomizing device that can satisfy all aspects of atomization efficiency, large-volume atomization, fineness of particles, uniformity, and drive power cost.
（課題を解決するための手段） 請求項１に記載の超音波霧化装置は、圧電振動子に舌
片状の振動板を固着してなる超音波励振器により発生さ
せた弾性振動により液体を霧化する超音波霧化装置であ
って、 前記液体を収容する貯液室と、該貯液室から前記液体
を導き出し前記振動板上に滴下させる手段とが備えてあ
り、 前記振動板には多数の穴が設けてある ことを特徴とする。(Means for Solving the Problems) The ultrasonic atomizing device according to claim 1, wherein a liquid is generated by elastic vibration generated by an ultrasonic exciter having a tongue-shaped diaphragm fixed to a piezoelectric vibrator. An ultrasonic atomizer for atomizing, comprising: a liquid storage chamber for storing the liquid; and means for guiding the liquid from the liquid storage chamber and dropping the liquid on the diaphragm. It is characterized by having many holes.
請求項２に記載の超音波霧化装置は、前記圧電振動子
は圧電磁器と、該圧電磁器の分極軸に垂直な両面に形成
されている電極とから成ることを特徴とする。The ultrasonic atomizer according to claim 2 is characterized in that the piezoelectric vibrator is composed of a piezoelectric ceramic and electrodes formed on both surfaces perpendicular to the polarization axis of the piezoelectric ceramic.
請求項３に記載の超音波霧化装置は、前記振動板は、
前記圧電振動子の少なくとも一方の面上に一体的に連な
って固着されており、前記圧電振動子の外方に向けて前
記圧電振動子の該面にほぼ平行に突出する振動部を有
し、前記穴は該振動部に設けられていてすり鉢状の形を
なしていることを特徴とする。The ultrasonic atomizer according to claim 3, wherein the diaphragm is
A vibrating part, which is integrally connected and fixed on at least one surface of the piezoelectric vibrator, and protrudes outwardly of the piezoelectric vibrator substantially parallel to the surface of the piezoelectric vibrator, The hole is provided in the vibrating part and has a mortar shape.
請求項４に記載の超音波霧化装置は、前記振動部の共
振周波数は前記圧電振動子の共振周波数にほぼ等しいか
またはその整数倍にほぼ等しいことを特徴とする。According to a fourth aspect of the present invention, in the ultrasonic atomizing device, a resonance frequency of the vibrating part is substantially equal to a resonance frequency of the piezoelectric vibrator or substantially equal to an integral multiple thereof.
（作用） 請求項１に記載の超音波霧化装置の使用時、前記圧電
振動子には前記圧電振動子と前記振動板との複合体の共
振周波数にほぼ等しい周波数の交流信号が印加され、前
記圧電振動子は励振される。前記圧電振動子の励振は前
記振動板を振動させ、前記貯液室に収容されている液体
は、導き出されて前記振動板上に滴下され、前記振動板
に設けられている多数の穴の効果により、霧化される。
穴を有する前記振動板による霧化は、粒子の微小性、均
一性を促し、前記液体滴下手段は霧化効率を高める。従
って、本発明の装置は多量の液体を効率よく霧化でき、
小形化も容易である。(Operation) When the ultrasonic atomizer according to claim 1 is used, an AC signal having a frequency substantially equal to a resonance frequency of a complex of the piezoelectric vibrator and the diaphragm is applied to the piezoelectric vibrator, The piezoelectric vibrator is excited. The excitation of the piezoelectric vibrator causes the vibration plate to vibrate, and the liquid contained in the liquid storage chamber is led out and dropped on the vibration plate, and the effect of the large number of holes provided in the vibration plate is obtained. Is atomized.
Atomization by the vibrating plate having holes promotes fineness and uniformity of particles, and the liquid dropping unit increases atomization efficiency. Therefore, the device of the present invention can efficiently atomize a large amount of liquid,
Miniaturization is also easy.
請求項２に記載の超音波霧化装置では、前記圧電振動
子が前記圧電磁器と、前記圧電磁器の分極軸に垂直な両
面に形成されている電極とからなる。交流電圧は該電極
を介して前記圧電振動子に印加され、前記振動子は励振
される。このような簡単な構造の圧電振動子の採用によ
り、超音波霧化装置を小形化でき、しかもこの装置では
高い効率で液体を霧化することができる。In the ultrasonic atomizing device according to the second aspect, the piezoelectric vibrator includes the piezoelectric ceramic and electrodes formed on both surfaces perpendicular to the polarization axis of the piezoelectric ceramic. An AC voltage is applied to the piezoelectric vibrator through the electrode, and the vibrator is excited. By employing the piezoelectric vibrator having such a simple structure, the ultrasonic atomizing device can be downsized, and the device can atomize the liquid with high efficiency.
請求項３に記載の超音波霧化装置は、前記振動板が前
記圧電振動子の少なくとも一方の面上に一体的に連なっ
て固着されていることにより、前記振動部は前記固着部
を固定端とする片持ち梁の形で屈曲振動するから、前記
振動板に滴下された液体はその弾性振動により霧化さ
れ、その振動板に垂直な上方に向けて霧として放散され
る。前記穴がすり鉢状であることによる作用と前記振動
部の振動との相乗効果によって液体の霧化作用は促進さ
れ、霧の発生量が増加しかつ粒子の径が均一になる。The ultrasonic atomizer according to claim 3, wherein the vibrating portion is fixedly connected to at least one surface of the piezoelectric vibrator so that the vibrating portion fixes the fixed portion. Therefore, the liquid dropped on the diaphragm is atomized by its elastic vibration, and is diffused upward as a mist perpendicular to the diaphragm. The synergistic effect of the action of the hole in the shape of a mortar and the vibration of the vibrating part promotes the atomization action of the liquid, increases the amount of mist generated and makes the particle diameter uniform.
請求項４に記載の超音波霧化装置では、前記振動部の
共振周波数が前記圧電振動子の共振周波数にほぼ等しい
かまたはその整数倍にほぼ等しくなるような電圧が前記
圧電振動子に印加されることにより、霧化効率が促進さ
れ、霧の発生量はさらに増大する。In the ultrasonic atomizer according to claim 4, a voltage is applied to the piezoelectric vibrator such that the resonance frequency of the vibrating portion is substantially equal to the resonance frequency of the piezoelectric vibrator or substantially equal to an integral multiple thereof. This promotes atomization efficiency and further increases the amount of fog generated.
（実施例） 次に実施例を挙げて本発明を一層詳しく説明する。(Example) Next, the present invention will be described in more detail with reference to examples.
第１図は本発明の超音波霧化装置の一実施例を示す断
面図である。本実施例は接着剤により、銅箔からなる端
子P,Qが取りつけられている圧電振動子１と、振動板２
と、貯液室３と、流速調整バルブ４と、液体供給チュー
ブ５とからなる。但し、第１図には圧電振動子１に交流
電圧を供給する電源回路が併せて示してある。FIG. 1 is a sectional view showing an embodiment of the ultrasonic atomizing apparatus of the present invention. In this embodiment, a piezoelectric vibrator 1 to which terminals P and Q made of copper foil are attached by an adhesive, and a vibrating plate 2
, A liquid storage chamber 3, a flow rate adjusting valve 4, and a liquid supply tube 5. However, FIG. 1 also shows a power supply circuit for supplying an AC voltage to the piezoelectric vibrator 1.
本図において、圧電振動子１および振動板２が超音波
励振器をなしている。使用時には液体は、貯液室３から
流速調整バルブ４によって流速がコントロールされ、液
体供給チューブ５を通過して、振動板２の上面に滴下さ
れる。このような液体滴下手段によれば、振動板２に触
れる液体の量を制御し、霧化効率の最も高くなるような
液量を常に供給することができる。In this figure, the piezoelectric vibrator 1 and the diaphragm 2 form an ultrasonic exciter. During use, the flow rate of the liquid is controlled from the liquid storage chamber 3 by the flow rate adjusting valve 4, passes through the liquid supply tube 5, and is dropped on the upper surface of the diaphragm 2. According to such a liquid dropping means, it is possible to control the amount of the liquid that comes into contact with the diaphragm 2 and to always supply the liquid amount that maximizes the atomization efficiency.
第２図（ａ）は第１図実施例における超音波励振器を
示す平面図、第２図（ｂ）は同図（ａ）における振動部
20の部分拡大平面図であり、本図では第２図（ａ）と同
方向から見たときの穴22の形および配列並びに寸法が示
されている。第３図（ａ）は第２図（ａ）の超音波励振
器の側面図、第３図（ｂ）は板面に垂直な平面で切断し
たときに現れる振動部20の断面を示す図であり、本図で
は穴22の縦断面形状および寸法が示されている。FIG. 2 (a) is a plan view showing an ultrasonic exciter in the embodiment of FIG. 1, and FIG. 2 (b) is a vibrating section in FIG.
FIG. 20 is a partially enlarged plan view of FIG. 20, showing the shape, arrangement and dimensions of the holes 22 when viewed from the same direction as FIG. 2 (a). FIG. 3 (a) is a side view of the ultrasonic exciter of FIG. 2 (a), and FIG. 3 (b) is a diagram showing a cross section of the vibrating part 20 which appears when cut along a plane perpendicular to the plate surface. In this drawing, the vertical sectional shape and dimensions of the hole 22 are shown in this drawing.
圧電振動子１は矩形板状の圧電磁器30を有し、圧電磁
器30の材質はTDK72A材（製品名）で、その長さは40mm、
幅は20mm、厚さは1mmである。TDK72A材は電気機械結合
係数が大きいことから、ここでの実施例に用いている。
圧電磁器30の分極軸の方向は厚さ方向に一致しており、
この厚さ方向に垂直な両面にAu電極31およびAu電極32が
形成されている。Au電極31は圧電磁器30の一方の面をお
おい、Au電極32は圧電磁器30のもう一方の面をおおって
いる。Au電極31には端子Ｐが取り付けられ、Au電極32に
は端子Ｑが取り付けられている。端子Ｐおよび端子Ｑは
圧電磁器30の幅方向に沿う一方の縁部に配置されてい
る。The piezoelectric vibrator 1 has a rectangular plate-shaped piezoelectric ceramic 30, and the material of the piezoelectric ceramic 30 is TDK72A material (product name), its length is 40 mm,
The width is 20 mm and the thickness is 1 mm. The TDK72A material has a large electromechanical coupling coefficient and is used in the examples here.
The direction of the polarization axis of the piezoelectric ceramic 30 coincides with the thickness direction,
An Au electrode 31 and an Au electrode 32 are formed on both surfaces perpendicular to the thickness direction. The Au electrode 31 covers one surface of the piezoelectric ceramic 30, and the Au electrode 32 covers the other surface of the piezoelectric ceramic 30. A terminal P is attached to the Au electrode 31, and a terminal Q is attached to the Au electrode 32. The terminal P and the terminal Q are arranged at one edge along the width direction of the piezoelectric ceramic 30.
圧電振動子１の一方の面には、舌片状の振動板２が取
り付けられている。振動板２はニッケル製で、細長い板
状の固着部21において圧電振動子１と一体的に連なって
固着されており、圧電振動子１より突出している部分の
振動板２が振動部20をなしている。A tongue-shaped diaphragm 2 is attached to one surface of the piezoelectric vibrator 1. The vibrating plate 2 is made of nickel, and is integrally fixed to the piezoelectric vibrator 1 at an elongated plate-like fixing portion 21, and the vibrating plate 20 protruding from the piezoelectric vibrator 1 forms the vibrating portion 20. ing.
固着部21はAu電極31を介して圧電振動子１に接着剤33
で接着されている。振動板２は長さ25mm、幅20mm、厚さ
0.05mmである。固着部21は長さ20mm、幅5mm、厚さ0.05m
mである。The fixing portion 21 is bonded to the piezoelectric vibrator 1 through the Au electrode 31 with an adhesive 33.
It is glued. Diaphragm 2 is 25mm long, 20mm wide, and thickness
It is 0.05 mm. Fixing part 21 is 20mm long, 5mm wide, 0.05m thick
m.
振動部20は圧電振動子１の幅方向に沿う縁部から外方
に向けて、圧電振動子１の板面に平行に伸び、突出して
いる。振動部20は長さ20mm、幅20mm、厚さ0.05mmであ
る。振動部20にはその厚さ方向に貫通する微細な複数の
穴22が設けられていて、穴22の形状はすり鉢状であっ
て、その入口側の直径は0.1mm、出口側の直径は0.02mm
である。各穴22は等しいピッチで配列されている。The vibrating portion 20 extends outward from an edge along the width direction of the piezoelectric vibrator 1 in parallel with the plate surface of the piezoelectric vibrator 1 and protrudes. The vibrating part 20 has a length of 20 mm, a width of 20 mm, and a thickness of 0.05 mm. The vibrating part 20 is provided with a plurality of fine holes 22 penetrating in its thickness direction, the shape of the hole 22 is a mortar shape, the diameter on the inlet side is 0.1 mm, and the diameter on the outlet side is 0.02. mm
It is. Each hole 22 is arranged at an equal pitch.
第１図の超音波霧化装置の駆動時、圧電振動子１と振
動板２との複合体の共振周波数に等しい周波数を有する
交流信号を端子Ｐおよび端子Ｑを介して圧電振動子１に
印加する。圧電振動子１は励振され、振動板２はその固
着部21を固定端とする片持ち梁の形で振動される。振動
部20に生じる振動は屈曲振動であり、振動部20の弾性振
動が液体の霧化に有効に機能する。When driving the ultrasonic atomizer shown in FIG. 1, an AC signal having a frequency equal to the resonance frequency of the composite of the piezoelectric vibrator 1 and the vibration plate 2 is applied to the piezoelectric vibrator 1 via the terminals P and Q. I do. The piezoelectric vibrator 1 is excited, and the vibrating plate 2 is vibrated in the form of a cantilever having the fixed portion 21 as a fixed end. The vibration generated in the vibrating section 20 is bending vibration, and the elastic vibration of the vibrating section 20 functions effectively for atomizing the liquid.
貯液室３から液体供給チューブ５を通って振動部20の
上面に滴下された液体は、振動部20の振動、穴22の効
果、および滴下構造を用いたことによる振動部20の上面
への液量制御作用により効率よく霧化される。The liquid dropped from the liquid storage chamber 3 onto the upper surface of the vibrating section 20 through the liquid supply tube 5 is transferred to the upper surface of the vibrating section 20 due to the vibration of the vibrating section 20, the effect of the hole 22, and the use of the dripping structure. It is atomized efficiently by the liquid volume control action.
第４図は圧電振動子１の周波数に対するアドミタンス
および位相の関係を示す特性図である。霧化装置として
有効に動作する周波数の１つは100.8KHz付近の共振に対
応するものである。FIG. 4 is a characteristic diagram showing the relationship between the admittance and the phase with respect to the frequency of the piezoelectric vibrator 1. One of the frequencies that effectively operate as an atomizer corresponds to resonance near 100.8 KHz.
第５図は印加電圧と霧化量との関係を示す特性図であ
る。印加電圧が０〜30Vp−ｐ付近までは霧の発生は観察
できないが、30Vp−ｐ以上にると、霧が振動部20から吹
き上がる。FIG. 5 is a characteristic diagram showing the relationship between the applied voltage and the amount of atomization. The generation of fog cannot be observed until the applied voltage is around 0 to 30 Vp-p. However, when the applied voltage is 30 Vp-p or more, the fog blows up from the vibration part 20.
共振周波数100.8KHzにおいては、霧化量が最大となる
印加電圧は76Vp−ｐで、それ以上の電圧では霧化量は飽
和する。本図が示すように、60Vp−ｐ付近まで霧化量は
印加電圧に応じて急激に増えている。At a resonance frequency of 100.8 KHz, the applied voltage at which the amount of atomization is maximized is 76 Vp-p, and at voltages higher than that, the amount of atomization is saturated. As shown in the figure, the amount of atomization rapidly increases to around 60 Vp-p according to the applied voltage.
第６図は吹き上げた霧の軌跡の最高点および飛距離
と、印加電圧との関係を示す特性図である。第５図と同
様な変化を示し、40Vp−ｐ付近から急激に霧の勢いが増
し60Vp−ｐ付近で飽和する。FIG. 6 is a characteristic diagram showing the relationship between the highest point and the flight distance of the trajectory of the blown-up fog and the applied voltage. The same change as in FIG. 5 is shown, and the fog rapidly increases from around 40 Vp-p and saturates around 60 Vp-p.
第７図は印加電圧と消費電力との関係を示す特性図で
ある。消費電力が20W前後から霧化装置としての機能を
果たすことがわかる。FIG. 7 is a characteristic diagram showing a relationship between applied voltage and power consumption. It can be seen that the function as an atomizing device is achieved when the power consumption is around 20W.
（発明の効果） 以上に詳しく説明したように、本発明の超音波霧化装
置によれば、振動部に設けられた多数の穴の効果によ
り、霧の粒子の微小性、均一性を促すことができる。さ
らに、振動部に液体を滴下させる構造を採用することに
より、供給された液体を効率良く霧化でき、従って多量
の霧化が低消費電力で実現でき、あわせて装置の小形化
も容易に実現できる。(Effects of the Invention) As described in detail above, according to the ultrasonic atomizing device of the present invention, the fineness and uniformity of the mist particles are promoted by the effect of the large number of holes provided in the vibrating part. Can be. Furthermore, by adopting a structure in which the liquid is dropped onto the vibrating part, the supplied liquid can be atomized efficiently, so that a large amount of atomization can be realized with low power consumption, and the device can be easily downsized. it can.
圧電振動子として圧電磁器と電極とからなる簡単な構
造を採用することにより、装置を小形化でき、しかもこ
の装置では高い効率で液体を霧化することができる。By adopting a simple structure including a piezoelectric ceramic and an electrode as the piezoelectric vibrator, the device can be downsized, and the device can atomize the liquid with high efficiency.
振動板を圧電振動子の少なくとも一方の面上に一体的
に連なって固着させる構造の採用により、振動部は固着
部を固定端とする片持ち梁の形で屈曲振動をするから、
強い弾性振動の状態にある振動部に滴下された液体を垂
直上方に向けて霧化される。また、振動部に設けられた
穴がすり鉢状である構造の採用により、霧の粒子の微小
形、均一性をさらに促進させることができる。従って、
振動部の振動と穴の作用との相乗効果により液体の霧化
作用は促進され、霧の発生量は増加しかつ粒子の径は微
小かつ均一になる。By adopting a structure in which the vibration plate is integrally connected and fixed on at least one surface of the piezoelectric vibrator, the vibrating portion performs bending vibration in the form of a cantilever having the fixed portion as a fixed end,
The liquid dropped on the vibrating part in a state of strong elastic vibration is atomized vertically upward. Further, by adopting a structure in which the holes provided in the vibrating portion are mortar-shaped, the fine shape and uniformity of the fog particles can be further promoted. Therefore,
By the synergistic effect of the vibration of the vibrating part and the function of the hole, the atomization of the liquid is promoted, the amount of generated mist increases, and the diameter of the particles becomes fine and uniform.
圧電振動子と振動板との複合体としての超音波励振器
の共振周波数が圧電振動子の共振周波数にほぼ等しいか
またはその整数倍にほぼ等しくなるような構造を採用す
ることにより霧化効率が促進され、霧の発生量はさらに
増加する。The atomization efficiency is improved by adopting a structure in which the resonance frequency of the ultrasonic exciter as a composite of the piezoelectric vibrator and the vibration plate is almost equal to the resonance frequency of the piezoelectric vibrator or almost equal to an integral multiple thereof. It is promoted and the amount of fog is further increased.
印加電圧を増加させるとそれにつれて霧化量も増加す
るので、目的に応じて電圧を変えれば霧化量を自由に変
えることができる。As the applied voltage increases, the amount of atomization also increases. Therefore, if the voltage is changed according to the purpose, the amount of atomization can be freely changed.
第１図は本発明の超音波霧化装置の一実施例を示す断面
図、第２図（ａ）は第１図実施例における超音波励振器
を示す平面図、第２図（ｂ）は同図（ａ）における振動
部20の部分拡大平面図、第３図（ａ）は第２図（ａ）の
超音波励振器の側面図、第３図（ｂ）は板面に垂直な平
面で切断したときに現れる振動部20の断面図、第４図は
圧電振動子１の周波数に対するアドミタンスおよび位相
の関係を示す特性図、第５図は印加電圧と霧化量との関
係を示す特性図、第６図は吹き上げた霧の軌跡の最高点
および飛距離と、印加電圧との関係を示す特性図、第７
図は印加電圧と消費電力との関係を示す特性図である。 １……圧電振動子、２……振動板、３……貯液室、４…
…流速調整バルブ、５……液体供給チューブ、20……振
動部、21……固着部、22……穴、30……圧電磁器、31,3
2……Au電極、33……接着剤。FIG. 1 is a sectional view showing an embodiment of an ultrasonic atomizer according to the present invention, FIG. 2 (a) is a plan view showing an ultrasonic exciter in the embodiment of FIG. 1, and FIG. 3A is a partially enlarged plan view of the vibrating section 20, FIG. 3A is a side view of the ultrasonic exciter in FIG. 2A, and FIG. 3B is a plane perpendicular to the plate surface. FIG. 4 is a characteristic diagram showing the relationship between the admittance and the phase with respect to the frequency of the piezoelectric vibrator 1, and FIG. 5 is a characteristic diagram showing the relationship between the applied voltage and the amount of atomization. FIG. 6 is a characteristic diagram showing the relationship between the applied point and the highest point and flight distance of the trajectory of the blown-up fog.
The figure is a characteristic diagram showing the relationship between applied voltage and power consumption. 1 ... piezoelectric vibrator, 2 ... diaphragm, 3 ... liquid storage chamber, 4 ...
... Velocity control valve, 5 ... Liquid supply tube, 20 ... Vibrating part, 21 ... Fixed part, 22 ... Hole, 30 ... Piezoelectric ceramic, 31,3
2 ... Au electrode, 33 ... Adhesive.
Claims (4)
る超音波励振器により発生させた弾性振動により液体を
霧化する超音波霧化装置において、 前記液体を収容する貯液室と、該貯液室から前記液体を
導き出し前記振動板上に滴下させる手段とが備えてあ
り、 前記振動板には多数の穴が設けてある ことを特徴とする超音波霧化装置。1. An ultrasonic atomizer for atomizing a liquid by elastic vibration generated by an ultrasonic exciter having a tongue-shaped vibrating plate fixed to a piezoelectric vibrator, wherein the liquid containing the liquid is stored. An ultrasonic atomizing device, comprising: a chamber; and means for guiding the liquid from the liquid storage chamber and dropping the liquid on the vibration plate, wherein the vibration plate has a large number of holes.
の分極軸に垂直な両面に形成されている電極とから成る
ことを特徴とする請求項１に記載の超音波霧化装置。2. The ultrasonic atomizer according to claim 1, wherein said piezoelectric vibrator comprises a piezoelectric ceramic and electrodes formed on both surfaces perpendicular to a polarization axis of said piezoelectric ceramic.
も一方の面上に一体的に連なって固着されており、前記
圧電振動子の外方に向けて前記圧電振動子の該面にほぼ
平行に突出する振動部を有し、前記穴は該振動部に設け
られていてすり鉢状の形をなしていることを特徴とする
請求項１または２に記載の超音波霧化装置。3. The piezoelectric vibrating plate is integrally and continuously fixed on at least one surface of the piezoelectric vibrator, and is substantially fixed to the surface of the piezoelectric vibrator toward the outside of the piezoelectric vibrator. The ultrasonic atomizer according to claim 1 or 2, further comprising a vibrating portion projecting in parallel, wherein the hole is provided in the vibrating portion and has a mortar shape.
の共振周波数にほぼ等しいかまたはその整数倍にほぼ等
しい ことを特徴とする請求項１から３までに記載の超音波霧
化装置。4. The ultrasonic atomizing apparatus according to claim 1, wherein a resonance frequency of said vibrating section is substantially equal to a resonance frequency of said piezoelectric vibrator or substantially equal to an integral multiple thereof.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2273001A JP2644621B2 (en) | 1990-10-11 | 1990-10-11 | Ultrasonic atomizer |
| EP91308995A EP0480615B1 (en) | 1990-10-11 | 1991-10-01 | Ultrasonic atomizing device |
| DE69117127T DE69117127T2 (en) | 1990-10-11 | 1991-10-01 | Ultrasonic atomizer |
| US07/774,098 US5297734A (en) | 1990-10-11 | 1991-10-11 | Ultrasonic vibrating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2273001A JP2644621B2 (en) | 1990-10-11 | 1990-10-11 | Ultrasonic atomizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04150968A JPH04150968A (en) | 1992-05-25 |
| JP2644621B2 true JP2644621B2 (en) | 1997-08-25 |
Family
ID=17521767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2273001A Expired - Lifetime JP2644621B2 (en) | 1990-10-11 | 1990-10-11 | Ultrasonic atomizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2644621B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008207054A (en) * | 2007-02-23 | 2008-09-11 | Mitsubishi Electric Corp | Ultrasonic atomizing device and equipment provided with the same |
| CN105057157A (en) * | 2015-09-22 | 2015-11-18 | 深圳市杰仕博科技有限公司 | Atomized liquid storage device and atomizer |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2698483B2 (en) * | 1991-03-25 | 1998-01-19 | 耕司 戸田 | Ultrasonic liquid atomizer |
| JP2698488B2 (en) * | 1991-06-21 | 1998-01-19 | 耕司 戸田 | Ultrasonic spray device |
| FR2705911B1 (en) * | 1993-06-02 | 1995-08-11 | Oreal | Piezoelectric nebulization device. |
| JP4860286B2 (en) * | 2006-02-03 | 2012-01-25 | エステー株式会社 | Drug atomizer |
| JP5487509B2 (en) * | 2010-10-15 | 2014-05-07 | バブコック日立株式会社 | Boiler combustion system and its operating method |
| JP6144398B1 (en) * | 2016-09-26 | 2017-06-07 | 株式会社タカラトミー | Liquid atomizer |
-
1990
- 1990-10-11 JP JP2273001A patent/JP2644621B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008207054A (en) * | 2007-02-23 | 2008-09-11 | Mitsubishi Electric Corp | Ultrasonic atomizing device and equipment provided with the same |
| CN105057157A (en) * | 2015-09-22 | 2015-11-18 | 深圳市杰仕博科技有限公司 | Atomized liquid storage device and atomizer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04150968A (en) | 1992-05-25 |
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