JPH067721A - Ultrasonic spraying apparatus - Google Patents

Ultrasonic spraying apparatus

Info

Publication number
JPH067721A
JPH067721A JP19347492A JP19347492A JPH067721A JP H067721 A JPH067721 A JP H067721A JP 19347492 A JP19347492 A JP 19347492A JP 19347492 A JP19347492 A JP 19347492A JP H067721 A JPH067721 A JP H067721A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
liquid
vibrating
piezoelectric vibrator
piezoelectric
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19347492A
Other languages
Japanese (ja)
Inventor
Koji Toda
耕司 戸田
Original Assignee
Koji Toda
耕司 戸田
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B17/00Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
    • B05B17/04Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
    • B05B17/06Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
    • B05B17/0607Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
    • B05B17/0638Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers spray being produced by discharging the liquid or other fluent material through a plate comprising a plurality of orifices
    • B05B17/0646Vibrating plates, i.e. plates being directly subjected to the vibrations, e.g. having a piezoelectric transducer attached thereto

Abstract

PURPOSE:To attempt to improve spraying efficiency and to make the amt. of spraying large by providing a lot of holes in an oscillating part surrounded by a fixed part fixed by means of a piezoelectric oscillator and making at least a part of the oscillating part into a curved structure. CONSTITUTION:When a composite body consisting of a piezoelectric oscillator 1 and an oscillating body 2 is driven, the piezoelectric oscillator 1 is oscillated and the oscillation is transmitted to the oscillating body 2. A liq. fed to the lower face of the oscillating body 2 being brought into contact with a liq. holding material 3 is sprayed through holes provided in the oscillating body 2 according to oscillation of the oscillating body 2. The direction of spraying can be diverged as the central part of the oscillating body 2 is curved into a concave or convex curved structure, with which the liq. holding material is brought into contact. A simple and lightweight structure can be obtd. thereby and spraying efficiency, a large amt. of spraying and fineness and uniformity of the sprayed particle can be improved thereby, too and the direction of spraying can be diverged or converged.

Description

【発明の詳細な説明】 DETAILED DESCRIPTION OF THE INVENTION

【0001】 [0001]

【産業上の利用分野】本発明は、超音波励振器により発生させた弾性振動により液体を霧化する超音波霧化装置に関する。 The present invention relates to an ultrasonic atomizing device for atomizing a liquid by the elastic vibrations are generated by the ultrasonic exciter.

【0002】 [0002]

【従来の技術】従来の超音波霧化装置としては、ボルト締ランジュバン型振動子を応用した超音波霧化装置およびネブライザーが挙げられる。 BACKGROUND ART As a conventional ultrasonic atomizing device, an ultrasonic atomizing device and nebulizer by applying the bolt tightening Langevin type transducer and the like. ボルト締ランジュバン型振動子による霧化装置は数10kHzという周波数の超音波を利用したもので、多量の霧を発生しうるという長所を有するが、構造が複雑で装置が大がかりであるという短所をあわせもつ。 Bolting Langevin transducer atomization apparatus according to utilizes the ultrasonic frequency of several 10 kHz, has the advantage that can generate a large amount of mist, combined disadvantage structure is large-scale complicated device with. 一方、ネブライザーは、MHz領域の超音波を利用したもので、粒子が微小で均一性に優れるという長所を有するものの、霧化効率が悪く低電力で多量の霧を発生させるのが難しいという短所をもつ。 Meanwhile, nebulizer utilizes the ultrasound in the MHz region, but has the advantage that particles excellent micro uniformity, the disadvantage that it is difficult to generate a large amount of mist atomization efficiency is poor low power with.
つまり、従来の超音波霧化装置では、霧化効率、多量霧化、粒子の微小性または駆動電源コストのいずれかにおいて難点があった。 In other words, in the conventional ultrasonic atomizer, atomization efficiency, large amounts atomization, there is a drawback in either small or drive power cost of the particles.

【0003】 [0003]

【発明が解決しようとする課題】本発明の目的は、霧化効率、多量霧化、粒子の微小性かつ均一性、装置が小型かつ軽量であること、構造が簡単であることおよび駆動電源コストのどの面からみても満足のできる超音波霧化装置を提供することにある。 The purpose of the 0008] The present invention, atomization efficiency, large amounts atomization, micro properties and homogeneity of the particles, that the device is small and light, and that the driving power cost structure is simple even when viewed from the plane of the throat can satisfactory is to provide an ultrasonic atomization apparatus.

【0004】 [0004]

【課題を解決するための手段】請求項1に記載の超音波霧化装置は、圧電振動子に振動体を固着してなる超音波励振器により発生させた弾性振動により液体を霧化する超音波霧化装置において、前記圧電振動子は圧電磁器と、該圧電磁器の厚さ方向に垂直な両端面にそれぞれ形成されている電極AおよびBとから成り、前記圧電磁器は、該圧電磁器の厚さ方向に平行に貫通された貫通穴を有し、前記厚さ方向に垂直な断面の形が枠型構造を成し、前記厚さ方向の長さと、前記枠型の外縁と内縁との最短距離との比がほぼ1に等しく、前記振動体は、前記貫通穴の開口を覆う位置または該貫通穴の内部に少なくとも1箇所に設けてあり、前記圧電振動子に固着された固着部と、該固着部に囲まれた振動部とから成り、前記振動部には多数の穴が Means for Solving the Problems An ultrasonic atomizing apparatus according to claim 1, super atomizes the liquid by resilient vibration which is generated by the ultrasonic exciter which is formed by fixing the vibration body to the piezoelectric vibrator in sonic atomizer, wherein consists piezoelectric vibrator and a piezoelectric ceramic, the electrodes a and B are respectively formed on the vertical end faces in the thickness direction of the piezoelectric ceramic device, wherein the piezoelectric ceramic, the piezoelectric ceramic device has a through hole in parallel to the through-thickness direction, the shape of the cross section perpendicular to the thickness direction form a frame structure, wherein the length in the thickness direction, the outer edge and the inner edge of the frame-type substantially equal to 1 the ratio of the shortest distance, the vibrating body, said inside position or through hole to cover the opening of the through hole is provided with at least one position, said fixed to the piezoelectric vibrator fixing portion , consists of a vibrating portion surrounded by the solid deposition section, the vibrating section has a plurality of holes けてあり、前記振動部の少なくとも一部分は湾曲構造を成していることを特徴とする。 Only Yes, the at least a portion of the vibrating section, characterized in that it forms a curved structure.

【0005】請求項2に記載の超音波霧化装置は、前記枠型が円環状であることを特徴とする。 [0005] ultrasonic atomizing apparatus according to claim 2, characterized in that the frame type is a circular ring.

【0006】請求項3に記載の超音波霧化装置は、前記振動部へ前記液体を供給する手段は、液体を吸収し該液体を前記振動部に供給する保液材を備え、該保液材は前記湾曲構造の凹部または凸部に接触されることを特徴とする。 [0006] Ultrasonic atomizer according to claim 3, means for supplying the liquid to the vibrating portion, the liquid absorbs the liquid comprises a liquid retaining material supplied to the vibrating portion,-holding liquid Material is characterized in that it is in contact with the concave or convex portion of the curved structure.

【0007】請求項4に記載の超音波霧化装置は、前記穴における前記振動部の一方の開口面積と他方の開口面積とが互いに異なることを特徴とする。 [0007] The ultrasonic atomizer according to claim 4, characterized in that the one open area and the other open area of ​​the vibrating section of the hole are different from each other.

【0008】請求項5に記載の超音波霧化装置は、前記圧電振動子の共振周波数は、該圧電振動子と前記振動体との複合体における共振周波数にほぼ等しいことを特徴とする。 [0008] Ultrasonic atomizer according to claim 5, the resonance frequency of the piezoelectric vibrator is characterized by substantially equal to the resonant frequency in complex with the vibrator and the piezoelectric vibrator.

【0009】 [0009]

【作用】本発明の超音波霧化装置の使用時、前記圧電振動子には前記圧電振動子と前記振動体との複合体の共振周波数にほぼ等しい周波数を有する交流信号が印加され前記圧電振動子は励振される。 When using the ultrasonic atomizing device of the present invention, the piezoelectric to vibrator is AC signal applied with a frequency substantially equal to the resonant frequency of a complex between the vibrator and the piezoelectric vibrator wherein the piezoelectric vibrating child is excited. 前記圧電振動子の励振は前記振動体を振動させる。 The excitation of the piezoelectric vibrator to vibrate the vibrator. 前記振動体に供給された液体は前記振動部に設けられている穴を通して霧化される。 The supplied to the vibrating body liquid is atomized through a hole provided in the vibration part.
穴を通しての霧化は粒子の微小性、均一性を促し、しかも霧化効率を増大させることができる。 Atomization through holes encourage small, uniformity of the particles, yet it is possible to increase the atomization efficiency. また、霧化効率が高いことから多量の霧化が低消費電力で実現できるだけでなく装置の小型化も容易にできる。 Further, a large amount of atomization because of high atomization efficiency can be easily downsize the device not only can be realized with low power consumption. 自励式駆動も可能で電池での駆動も容易なことから環境変化に対応しうる形で低消費電力での駆動が可能となる。 It is possible to drive with low power consumption in a form capable of corresponding to environmental changes because the driving also easy in the self-excited driving is also possible battery. また、前記振動部の少なくとも一部分は湾曲構造を成していることから霧の存在域の発散を可能ならしめることができる。 Further, at least a portion of the vibrating unit can makes it possible divergence of the presence area of ​​the fog since it is a curved structure.

【0010】前記圧電振動子は圧電磁器と、前記圧電磁器の厚さ方向に垂直な両端面にそれぞれ形成されている電極A,Bとから成る。 [0010] The piezoelectric vibrator consists of a piezoelectric ceramic, the electrodes are formed perpendicular end surfaces in the thickness direction of the piezoelectric ceramic A, and B. 交流電圧は該電極A,Bを介して前記圧電振動子に印加され、前記圧電振動子は励振される。 AC voltage is applied to the piezoelectric vibrator via the electrodes A, B, the piezoelectric vibrator is excited. このような簡単な構造の圧電振動子の採用により超音波霧化装置を小型化でき、しかもこの装置では高い効率で液体を霧化することができる。 Such can be miniaturized ultrasonic atomization apparatus by adoption of a piezoelectric vibrator of a simple structure, yet it is possible to atomize the liquid at a high efficiency in this system.

【0011】前記圧電磁器は前記圧電磁器の厚さ方向に平行に貫通された貫通穴を有し、前記振動体は前記貫通穴の開口を覆う位置または該貫通穴の内部に少なくとも1箇所に設けられていることから、前記圧電振動子の振動エネルギーは効率良く前記振動体に伝搬し前記振動体を振動させるので、霧化効率を増大させることができる。 [0011] The piezoelectric ceramic has a through hole in parallel to penetrate in the thickness direction of the piezoelectric ceramic, the vibrator is provided in at least one place inside the position or through hole to cover the opening of the through hole is the fact that the vibration energy of the piezoelectric vibrator is so vibrating the vibrator propagate efficiently the vibrator, it is possible to increase the atomization efficiency. 前記圧電振動子に固着されている固着部分に囲まれた部分の振動体は振動部を成すことにより、該振動部は前記圧電振動子と一体となった結合振動をするから、前記振動部に供給された液体はその結合振動により霧化され前記振動部の上方へ向けて霧として放散される。 Since the vibrating body of said surrounded by anchoring portion is fixed to the piezoelectric vibrator portion by forming the vibrating portion, the vibrating portion is a bond vibrations together with the piezoelectric vibrator, the vibrating portion supplied liquid is dissipated as mist upwards of the vibrating portion is atomized by the coupled vibration. 前記振動部の振動と前記振動部に設けられている穴の作用との相乗効果によって、液体の霧化効率は促進され霧の発生量は増大しかつ粒子の径が均一になる。 By the synergistic effect with the action of the holes provided in the vibration part and the vibration of the vibrating portion, atomization efficiency of the liquid generation amount of promoted fog becomes uniform diameter increased and particles.

【0012】前記圧電磁器の厚さ方向に垂直な断面の形が枠型構造を成し、前記厚さ方向の長さと、前記枠型の外縁と内縁との最短距離との比がほぼ1に等しい構造を採用することにより、前記圧電振動子と前記振動体との複合体の結合振動が増強され霧化効率が増大する。 [0012] The form of the shape frame structure of a cross-section perpendicular to the thickness direction of the piezoelectric ceramic, the the length of the thickness direction, the ratio of the shortest distance between the outer edge and the inner edge of the frame type almost 1 by adopting the same structure, the atomization efficiency bond vibrations are enhanced composites of the piezoelectric vibrator and the vibrator is increased. また、前記枠型が円環状であることにより前記圧電振動子と前記振動体との複合体の結合振動がさらに増強されるから、霧化効率がさらに増大する。 Further, the since coupling vibrations of the complex of the piezoelectric vibrator and said vibrating body is further enhanced, atomization efficiency is further increased by the frame type is a circular ring.

【0013】前記振動部へ前記液体を供給する手段は、 [0013] means for supplying the liquid to the vibrating portion,
液体を吸収し該液体を前記振動部に供給する保液材を備える。 The liquid absorbs liquid comprises a liquid retaining material supplied to the vibrating portion. 前記保液材が前記振動部における湾曲構造の凹部または凸部に接触している。 It said liquid retaining member is in contact with the concave or convex portion of the curved configuration of the vibration part. 前記保液材が前記凹部に接触しているとき、前記凹部に供給された液体は前記振動部に設けられている穴を通して前記湾曲構造の凸部に向けて霧化される。 When the liquid retaining member is in contact with the recess, the liquid supplied to said recess is atomized towards the convex portion of the curved structure through the hole provided in the vibration part. また、前記保液材が前記凸部に接触しているとき、前記凸部に供給された液体は前記振動部に設けられている穴を通して前記湾曲構造の凹部に向けて霧化される。 Further, when the liquid retaining member is in contact with the protrusion, the liquid supplied to the convex portion is atomized toward the recess of the curved structure through the hole provided in the vibration part. 穴を通しての霧化は粒子の微小性、均一性を促ししかも霧化効率を増大させることができるばかりでなく霧化される霧の方向を制御できる。 Atomization through hole can control the direction of the mist to be atomized it is possible not only to increase the fine properties, encourage uniformity Moreover atomization efficiency of the particles. すなわち、前記保液材が前記凹部に接触しているときには霧化される霧の方向が発散され、前記保液材が前記凸部に接触しているときには霧化される霧の方向が収束される。 That is, when the liquid retaining member is in contact with the concave portion is divergence direction of the mist to be atomized, the direction of the mist to be atomized is converged when the liquid retaining member is in contact with the protrusion that.

【0014】前記穴における前記振動部の一方の開口面積が他方の開口面積より大きいことからその一方の開口を入口側とし他方を出口側とすることにより、前記穴の液体の通過面積が入口側から出口側に向けて減少する。 [0014] By opening one of its inlet side to the other as an outlet-side since one opening area of ​​the vibrating section of the hole is larger than the other open area, passing area of ​​liquid in the hole inlet side decrease towards the outlet side from the.
従って、前記液体が前記穴を通過するときに前記液体は前記穴によって絞り作用を受ける。 Therefore, the liquid when the liquid passes through the holes is subjected to throttling action by the hole. その結果、前記絞り作用と前記振動部の振動との相乗効果によって液体の霧化作用が促進され、霧の発生量が増加しかつ粒子の径が均一になる。 Consequently, atomizing the liquid is accelerated by the synergistic effect of the vibration of the diaphragm acting as the vibration portion, the amount of mist becomes uniform diameter increased and particles.

【0015】前記圧電振動子の共振周波数が該圧電振動子と前記振動体との複合体における共振周波数にほぼ等しくなるときの電圧が前記圧電振動子に印加されることにより、前記振動体は効率的に励振され、霧化効率が促進され、霧の発生量はさらに増大する。 [0015] By the resonance frequency of the piezoelectric vibrator voltage when approximately equal to the resonant frequency in complex with the vibrator and the piezoelectric vibrator is applied to the piezoelectric vibrator, the vibrator efficiency to be excited, atomization efficiency is promoted, the amount of fog is further increased.

【0016】 [0016]

【実施例】図1は本発明の超音波霧化装置の一実施例を示す断面図である。 DETAILED DESCRIPTION FIG. 1 is a sectional view showing an embodiment of an ultrasonic atomizing device of the present invention. 本実施例は圧電振動子1、振動体2 This embodiment piezoelectric vibrator 1, the vibrating body 2
および保液材3から成る。 And it consists of the liquid holding material 3. 圧電振動子1には銅箔から成る端子が導電性接着剤によって固着されている。 Terminals made of copper foil is fixed by a conductive adhesive to the piezoelectric vibrator 1. 圧電振動子1には振動体2が設けられている。 Vibrating body 2 is provided in the piezoelectric vibrator 1. 図1では圧電振動子1に交流電圧を供給する電源回路および端子が省いて描かれている。 Figure 1, the power supply circuit and the terminal for supplying an AC voltage to the piezoelectric vibrator 1 are drawn omitted. 振動体2の中央付近は湾曲している。 Near the center of the vibrating body 2 is curved.
保液材3は振動体2の湾曲した凹部に接触していて、使用時には保液材3からその凹部に液体を供給する。 Hoekizai 3 is in contact with the concave curved vibrating body 2, and supplies the liquid in the concave portion from Hoekizai 3 at the time of use.

【0017】図2は図1の超音波霧化装置における圧電振動子1を示す斜視図である。 [0017] FIG. 2 is a perspective view of a piezoelectric vibrator 1 in the ultrasonic atomization apparatus of Fig. 圧電振動子1は圧電磁器11、電極DおよびGから成る。 The piezoelectric vibrator 1 is made of piezoelectric ceramic 11, the electrodes D and G. 圧電磁器11は円柱状でその分極軸に垂直な両面をそれぞれ端面とし前記分極軸に平行に貫通された貫通穴を有する。 The piezoelectric ceramic 11 has a through hole in parallel to the through the polarization axis and each end face perpendicular both sides thereof polarization axis cylindrical. 圧電磁器11の材質はTDK72A材(製品名)で、直径24mm、厚さ6mmで、前記貫通穴も円柱状でありその直径は12 The material is TDK72A material of the piezoelectric ceramic 11 (product name), diameter 24 mm, a thickness of 6 mm, the through hole also has a columnar shape whose diameter 12
mmである。 A mm. TDK72A材は電気機械結合係数が大きいことからここでの実施例に用いている。 TDK72A material is used in the examples herein because the electromechanical coupling coefficient is large. 前記両端面にはそれぞれ電極Dおよび電極Gが形成されている。 Electrode D and the electrode G are respectively formed on the both end faces. 電極D Electrode D
には端子Pが取り付けられ電極Gには端子Qが取り付けられている。 Terminal Q is attached to the electrode G terminal P attached to.

【0018】図3は圧電振動子1と振動体2とから成る複合体を上面方向から見たときの平面図である。 [0018] FIG. 3 is a plan view when viewed composite of the piezoelectric vibrator 1 vibrator 2 which from the top direction. 圧電振動子1の上端面の前記貫通穴の開口を覆う位置には中央部が湾曲した円板状の振動体2が取り付けられている。 Disk-shaped vibrating body 2 on the cover the opening of the through hole position of the upper end surface of the central portion is curved in the piezoelectric vibrator 1 is mounted.
振動体2はニッケル製で、輪状の固着部12によって圧電振動子1と一体的に連なって固着されており、固着部12に囲まれた振動体2が振動部13をなしている。 Vibrator 2 is made of nickel, it is fixed continuous with the piezoelectric vibrator 1 and integrally by a fixing portion 12 of the annular vibrating body 2 surrounded by the fixing portion 12 forms a vibration unit 13. 固着部12は電極Dを介して圧電振動子1に固着されている。 Fixing part 12 is fixed to the piezoelectric vibrator 1 through the electrode D. 前記貫通穴の直径は14mm、厚さ0.05mmである。 The diameter of the through hole 14 mm, a thickness of 0.05 mm.

【0019】図4は板面に垂直な平面で切断したときに現れる振動部13の断面を示す図である。 [0019] FIG. 4 is a diagram showing a cross section of the vibrating portion 13 that appears when cut along a plane perpendicular to the plate surface. 振動部13にはその厚さ方向に貫通する微細な多数の穴20が設けられている。 Number of holes 20 fine penetrating in its thickness direction is provided on the vibrating section 13. 図4では穴20の縦断面形状および寸法が示されている。 Longitudinal sectional shape and dimensions of Figure 4, the holes 20 are shown. 穴20の形状はすり鉢状であって、一方の開口面積が他方の開口面積より大きいものをここでの実施例で用いていて、一方の開口を入口側とし、他方を出口側としている。 Shape of the hole 20 is a conical shape, those one aperture area is larger than the other opening area are used in examples herein, the one opening the inlet side to the other as an outlet side. 入口側の直径は0.1mm、出口側の直径は0.01mmであって、穴20は等しいピッチで配列されている。 The inlet side of the diameter 0.1 mm, the diameter of the outlet side a 0.01 mm, hole 20 are arranged at equal pitches.

【0020】図5は振動部13の部分拡大平面図である。 [0020] FIG. 5 is a partially enlarged plan view of the vibrating section 13. 図5では穴20の形状および配列ならびに寸法が示されている。 Shape and arrangement as well as the dimensions in figure 5, hole 20 is shown.

【0021】図1の超音波霧化装置の駆動時、圧電振動子1と振動体2との複合体の共振周波数にほぼ等しい周波数を有する交流信号を端子Pおよび端子Qを介して圧電振動子1に印加すると圧電振動子1は励振される。 [0021] During operation of the ultrasonic atomizing device of FIG. 1, the piezoelectric vibrator via the terminal P and the terminal Q of the AC signal having a frequency substantially equal to the resonant frequency of the complex of the piezoelectric vibrator 1 and the vibrating member 2 the piezoelectric vibrator 1 is applied to 1 is excited. このとき、その交流信号の周波数は圧電振動子1単体の共振周波数のうちの1つにほぼ一致している。 At this time, the frequency of the AC signal is approximately equal to one of the resonance frequency of the piezoelectric vibrator 1 alone. 圧電振動子1の励振に伴い固着部12に囲まれた振動部13は圧電振動子1と一体となって結合振動する。 Vibrating section 13 surrounded by the fixed portion 12 with the excitation of the piezoelectric vibrator 1 is attached vibrates a piezoelectric vibrator 1 integrally. この振動部13 The vibration unit 13
の結合振動が液体の霧化に有効に機能する。 Coupling vibrations of effectively functions to atomize the liquid. 保液材3は吸液能力が大きくかつ圧電振動子1に比べて音響インピーダンスが低いものをここでの実施例に用いている。 Hoekizai 3 is used in the examples herein what are low acoustic impedance in comparison with the large and the piezoelectric vibrator 1 is liquid-absorbing capacity. これは圧電振動子1からの超音波が保液材3を介して液体中に伝搬し散失するのを抑制し、振動体2を効率良く振動させるためである。 This will prevent the err scattered propagates in a liquid through an ultrasonic liquid retention member 3 from the piezoelectric vibrator 1, in order to vibrate the vibrating body 2 efficiently. 保液材3によって吸収された液体は保液材3と接触している部分の振動体2に達し毛細管現象により各穴20に導かれる。 Absorbed liquid by Hoekizai 3 is led to each well 20 by a capillary phenomenon reaches to the vibrating body 2 in the portion provided in contact with Hoekizai 3. 前記液体が各穴20を通過するとき各穴20の液体の通過面積はその入口側から出口側に向けて減少するから、前記液体は穴20によって絞り作用を受け、微小でかつ均一な粒子となって穴20の出口側に流出する。 Since the liquid passing area of ​​liquid in each well 20 when passing through the respective holes 20 decreases toward from the inlet side to the outlet side, the liquid is subjected to throttling action by holes 20, and the minute and uniform particles It is to flow out to the outlet side of the hole 20. その結果、前記絞り作用、振動部13の弾性振動により穴20から流出した液体は効率良く霧化される。 As a result, the throttling effect, the liquid flowing out of the hole 20 by elastic vibration of the vibration portion 13 is efficiently atomized. 図1の超音波霧化装置によれば、印加電圧が10.7Vのときには周波数が290.6kH According to the ultrasonic atomization apparatus 1, the applied voltage is a frequency at the time of 10.7 V 290.6KH
zで霧化量が最大となり、そのときの消費電力は320 Atomization amount becomes maximum at z, the power consumption at that time is 320
mW、電流は30mAである。 mW, current is 30mA. また、電源を含む装置全体においては消費電力は642mW、電流は60mAである。 Further, power consumption in the entire apparatus including the power 642MW, current is 60 mA.

【0022】 [0022]

【発明の効果】本発明の超音波霧化装置によれば振動部に設けられた穴を通過しながら液体が霧化されるので、 Since the liquid is atomized while passing through a hole provided in the oscillating unit according to the ultrasonic atomizing device of the present invention,
霧の粒子の微小性、均一性を促すことができる。 Minute of mist particles, can be promoted uniformity. さらに、振動部の少なくとも一部分は湾曲構造を成していることから霧の存在域の発散を可能ならしめることができる。 Further, at least a portion of the vibrating portion can makes it possible divergence of the presence area of ​​the fog since it is a curved structure. 霧化効率が高いことから多量の霧化が低消費電力で実現できるだけでなく装置の小型化も容易にできる。 Miniaturization of large amounts of atomization because of high atomization efficiency device can be implemented not only with low power consumption can be easily. 自励式駆動も可能で電池での駆動も容易なことから環境変化に対応しうる形で低消費電力での駆動が可能となる。 It is possible to drive with low power consumption in a form capable of corresponding to environmental changes because the driving also easy in the self-excited driving is also possible battery.

【0023】圧電振動子として圧電磁器と、その圧電磁器の厚さ方向に垂直な両端面に形成されている電極とから成る簡単な構造を採用することにより、装置を小型化できしかも高い効率で液体を霧化することができ低消費電力での駆動が可能となる。 The piezoelectric ceramic as the piezoelectric vibrator, by adopting a simple structure composed of its piezoelectric ceramic thickness direction are formed in the vertical end faces to the electrodes, it can reduce the size of the device moreover with high efficiency liquid driven with low power consumption can be atomized is possible to.

【0024】圧電磁器として、その圧電磁器の厚さ方向に平行に貫通された貫通穴を有し、厚さ方向に垂直な断面の形が枠型構造を成し、厚さ方向の長さと、枠型の外縁と内縁との最短距離との比がほぼ1に等しい構造を採用することにより、圧電振動子と振動体との複合体の結合振動が増強される。 [0024] As the piezoelectric ceramic, the thickness direction of the piezoelectric ceramic has a through hole in parallel to the through, the shape of the cross section perpendicular to the thickness direction form a frame structure, the length in the thickness direction, by a ratio of the shortest distance between the outer edge and the inner edge of the frame type to adopt equal structure approximately 1, coupled vibration of the complex between the vibrating body and the piezoelectric vibrator is enhanced. 従って、圧電振動子の振動エネルギーは効率良く振動体に伝搬し振動体を振動させ霧化効率が増大する。 Thus, vibration energy of the piezoelectric vibrator atomization efficiency by vibrating the vibrator propagated efficiently vibrator is increased. さらに、枠型として円環状構造を採用することにより圧電振動子と振動体との複合体の結合振動がさらに増強されるから、霧化効率がさらに増大する。 Further, since the coupling vibrations of a complex between the vibrator a piezoelectric vibrator is further enhanced by employing an annular structure as a frame type, atomization efficiency is further increased.
また、振動体を貫通穴の開口を覆う位置または貫通穴の内部に少なくとも1箇所に設ける構造を採用することにより、圧電振動子の振動エネルギーは効率良く振動体に伝搬し振動体を振動させるので、霧化効率を増大させることができる。 Further, by adopting a structure in which at least one location vibrator inside position or through holes to cover an opening of the through hole, the vibration energy of the piezoelectric vibrator to vibrate the vibrating body propagates efficiently vibrator , thereby increasing the atomization efficiency. また振動体は圧電振動子に固着されている固着部と、その固着部に囲まれている振動部とで成ることから、振動部は圧電振動子と一体となった結合振動をする。 The vibrator and the fixing portion which is fixed to the piezoelectric vibrator, since made in the vibrating portion is surrounded by the fixing portion, the vibrating portion is a bond vibrations together with the piezoelectric vibrator. 従って、振動部に供給された溶液はその結合振動により霧化され振動部の上方に向けて霧として放散される。 Therefore, solution fed to the vibrating portion is dissipated as mist upwards of atomized vibrating unit by its binding vibrations. 振動部の振動は液体の霧化効率を高め霧の発生量を増大させる。 Vibration of the vibrating unit increases the amount of generated mist increases the atomization efficiency of the liquid. なお、振動体を複数個用いることにより、さらに霧の粒子の微小性を向上できる。 Note that by using a plurality of vibrating bodies can be further improved fine of the particles of the mist.

【0025】印加電圧を増加させるとそれにつれて霧化量も増加するので、目的に応じて電圧を変えれば霧化量を自由に変えることができる。 [0025] Since also increases atomization amount as it is increased the applied voltage can alter the atomization amount freely be changed the voltage depending on the purpose.

【0026】振動部へ液体を供給する手段として液体を吸い上げ振動部に供給するための保液材を備え、その保液材としてスポンジその他の吸液能力が大きくしかも音響インピーダンスが圧電振動子よりも低い物質を採用することにより、液体の供給を無駄なく効率良く行うことができるばかりでなく圧電振動子からの超音波の液中への伝搬が遮断され圧電振動子の励振の保液材自身への伝搬も抑制されるので、圧電振動子の励振は効率よく振動板を振動させることができる。 [0026] provided with a liquid retaining material to be supplied to the vibration part sucked up liquid as a means for supplying liquid to the vibrating portion, than larger Moreover acoustic impedance Sponge other liquid absorbing ability as a liquid retaining member is a piezoelectric vibrator by employing a low substance, the liquid retaining material itself of the excitation of the piezoelectric vibrator propagation to ultrasound in the liquid is blocked from the piezoelectric vibrator not only can be carried out without waste efficiently the supply of the liquid since also the propagation is suppressed, excitation of the piezoelectric vibrator can be vibrated efficiently diaphragm. 従って液体の霧化効率を高めしかも低消費電力での液体の多量霧化を可能にし、 Thus Moreover enhance atomization efficiency of the liquid to allow a large amount atomization of liquids with low power consumption,
あわせて装置の小型化も容易に実現できる。 Size of the combined device can be easily realized.

【0027】保液材を振動部における湾曲構造の凹部に接触させる構造を採用することにより、その凹部に供給された液体は振動部に設けられている穴を通過しながら湾曲構造の凸部に向けて霧化される。 [0027] By adopting the structure of contacting the liquid retaining member in the recess of the curved structure of the vibration part, the liquid supplied to the concave portion to the convex portion of the curved structure while passing through a hole provided in the oscillating portion It is atomized toward. 穴を通しての霧化は粒子の微小性、均一性を促ししかも霧化効率を増大させることができるばかりでなく霧化される霧の方向を発散できる。 Atomization through hole can diverge in the direction of the mist to be atomized it is possible not only to increase the fine properties, encourage uniformity Moreover atomization efficiency of the particles. 保液材を振動部における湾曲構造の凸部に接触させる構造を採用することにより、その凸部に供給された液体は振動部に設けられている穴を通過しながら湾曲構造の凹部に向けて霧化される。 By adopting the structure of contacting the liquid retaining member in the convex portion of the curved configuration of the vibration unit, the liquid supplied to the convex portion toward the recess of the curved structure while passing through a hole provided in the oscillating portion It is atomized. 穴を通しての霧化は粒子の微小性、均一性を促ししかも霧化効率を増大させることができるばかりでなく霧化される霧の方向を収束できる。 Atomization through holes converge in the direction of the mist to be atomized it is possible not only to increase the fine properties, encourage uniformity Moreover atomization efficiency of the particles.

【0028】振動部に設けられている穴の一方の開口面積が他方の開口面積より大きいことから、その一方の開口を入口側とし他方の開口を出口側とする構造の採用により、液体の通過面積がその穴の入口側から出口側に向けて減少するから、液体が穴を通過するときに液体は穴によって絞り作用を受ける。 [0028] Since one opening area of ​​the hole provided in the oscillating portion is larger than the other open area, the adoption of the structure of the other opening by the opening of the one and the inlet side and the outlet side passage of the liquid because the area decreases toward the outlet side from the inlet side of the hole, the liquid is subjected to throttling action by holes when the liquid passes through the holes. その結果、絞り作用と振動部の振動との相乗効果によって液体の霧化作用が促進され霧の発生量が増加しかつ粒子の径が均一になる。 As a result, the diameter of the generated amount of the atomizing fluid by the synergistic effect of the vibration of the diaphragm acting vibration unit is promoted fog increases and the particle is uniform.

【0029】圧電振動子と振動体との複合体における共振周波数が圧電振動子単体の共振周波数にほぼ等しくなるような構造を採用することにより、圧電振動子と振動体との複合体の結合振動が増強するから霧の発生量はさらに増加する。 [0029] By the resonance frequency in the complex of the piezoelectric vibrator and the vibrating body is adopted substantially equal such structures the resonant frequency of a single piezoelectric vibrator, coupled vibration of the complex between the vibrating body and the piezoelectric vibrator There generation amount of mist from enhancing further increases.

【図面の簡単な説明】 BRIEF DESCRIPTION OF THE DRAWINGS

【図1】本発明の超音波霧化装置の一実施例を示す断面図。 Sectional view showing an embodiment of an ultrasonic atomizing device of the present invention; FIG.

【図2】図1の超音波霧化装置における圧電振動子1を示す斜視図。 Figure 2 is a perspective view showing a piezoelectric vibrator 1 in the ultrasonic atomization apparatus of Fig.

【図3】圧電振動子1と振動体2とから成る複合体の平面図。 Figure 3 is a plan view of a composite body made of a piezoelectric vibrator 1 and the vibrating body 2.

【図4】板面に垂直な平面で切断したときに現れる振動部13の断面を示す図。 FIG. 4 shows a cross section of the vibrating portion 13 that appears when cut along a plane perpendicular to the plate surface.

【図5】振動部13の部分拡大平面図。 Figure 5 is a partial enlarged plan view of the vibrating section 13.

【符号の説明】 DESCRIPTION OF SYMBOLS

1 圧電振動子 2 振動体 3 保液材 11 圧電磁器 12 固着部 13 振動部 20 穴 1 the piezoelectric vibrator 2 vibrator 3 Hoekizai 11 piezoelectric ceramic 12 fixed portion 13 vibrating portion 20 holes

Claims (5)

    【特許請求の範囲】 [The claims]
  1. 【請求項1】 圧電振動子に振動体を固着してなる超音波励振器により発生させた弾性振動により液体を霧化する超音波霧化装置において、 前記圧電振動子は圧電磁器と、該圧電磁器の厚さ方向に垂直な両端面にそれぞれ形成されている電極AおよびB 1. A ultrasonic atomizing device for atomizing a liquid by the elastic vibrations are generated by the ultrasonic exciter which is formed by fixing the vibration body to the piezoelectric vibrator, the piezoelectric vibrator and a piezoelectric ceramic, piezoelectric electrodes a and B are respectively formed on the vertical end faces in the thickness direction of the ceramic
    とから成り、 前記圧電磁器は、該圧電磁器の厚さ方向に平行に貫通された貫通穴を有し、前記厚さ方向に垂直な断面の形が枠型構造を成し、前記厚さ方向の長さと、前記枠型の外縁と内縁との最短距離との比がほぼ1に等しく、 前記振動体は、前記貫通穴の開口を覆う位置または該貫通穴の内部に少なくとも1箇所に設けてあり、前記圧電振動子に固着された固着部と、該固着部に囲まれた振動部とから成り、 前記振動部には多数の穴が設けてあり、 前記振動部の少なくとも一部分は湾曲構造を成していることを特徴とする超音波霧化装置。 Consists of a, the piezoelectric ceramic has a through hole in parallel to the through-thickness direction of the piezoelectric ceramic device, the shape of the cross section perpendicular to the thickness direction form a frame structure, said thickness direction of the length, equal to the ratio approximately 1 of the shortest distance between the outer edge and the inner edge of the frame type, the vibrating body is provided at at least one location inside the position or through hole to cover the opening of the through hole There, said piezoelectric vibrator anchored fixed part consists of a vibrating portion surrounded by the solid attachment part, the vibrating portion is provided with a large number of holes, at least in part curved configuration of the vibrating section ultrasonic atomization apparatus characterized by forms.
  2. 【請求項2】 前記枠型が円環状であることを特徴とする請求項1に記載の超音波霧化装置。 Wherein the ultrasonic atomizing device according to claim 1, wherein the frame type is a circular ring.
  3. 【請求項3】 前記振動部へ前記液体を供給する手段は、液体を吸収し該液体を前記振動部に供給する保液材を備え、該保液材は前記湾曲構造の凹部または凸部に接触されることを特徴とする請求項1または2に記載の超音波霧化装置。 Wherein means for supplying the liquid to the vibrating portion, the liquid absorbs the liquid comprises a liquid retaining material supplied to the vibrating portion,-holding liquid material in recesses or protrusions of the curved structure ultrasonic atomizing apparatus according to claim 1 or 2, characterized in that it is in contact.
  4. 【請求項4】 前記穴における前記振動部の一方の開口面積と他方の開口面積とが互いに異なることを特徴とする請求項1,2または3に記載の超音波霧化装置。 4. An ultrasonic atomizer according to claim 1, 2 or 3, characterized in that the one open area and the other open area of ​​the vibrating section of the hole are different from each other.
  5. 【請求項5】 前記圧電振動子の共振周波数は、該圧電振動子と前記振動体との複合体における共振周波数にほぼ等しいことを特徴とする請求項1,2,3または4に記載の超音波霧化装置。 Resonant frequency according to claim 5, wherein the piezoelectric vibrator is super according to claim 1, 2, 3 or 4, wherein the substantially equal to the resonant frequency in complex with the piezoelectric vibrator and the vibrator sonic atomizer.
JP19347492A 1992-06-26 1992-06-26 Ultrasonic spraying apparatus Pending JPH067721A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19347492A JPH067721A (en) 1992-06-26 1992-06-26 Ultrasonic spraying apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19347492A JPH067721A (en) 1992-06-26 1992-06-26 Ultrasonic spraying apparatus

Publications (1)

Publication Number Publication Date
JPH067721A true true JPH067721A (en) 1994-01-18

Family

ID=16308622

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19347492A Pending JPH067721A (en) 1992-06-26 1992-06-26 Ultrasonic spraying apparatus

Country Status (1)

Country Link
JP (1) JPH067721A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0794838A1 (en) * 1995-08-31 1997-09-17 FLUID PROPULSION TECHNOLOGIES, Inc. Liquid dispensing apparatus and methods
US6085740A (en) * 1996-02-21 2000-07-11 Aerogen, Inc. Liquid dispensing apparatus and methods
US6921020B2 (en) 1991-04-24 2005-07-26 Aerogen, Inc. Method and apparatus for dispensing liquids as an atomized spray
US6926208B2 (en) 1991-04-24 2005-08-09 Aerogen, Inc. Droplet ejector with oscillating tapered aperture
WO2010090169A1 (en) * 2009-02-09 2010-08-12 株式会社村田製作所 Atomizing member and atomizer equipped with same
WO2013161985A1 (en) 2012-04-27 2013-10-31 住友化学株式会社 Ultrasonic atomization device
WO2013161986A1 (en) 2012-04-27 2013-10-31 住友化学株式会社 Ultrasonic atomization device
WO2013161987A1 (en) 2012-04-27 2013-10-31 住友化学株式会社 Ultrasonic atomization device
JP5365690B2 (en) * 2009-03-31 2013-12-11 株式会社村田製作所 Atomizing unit and atomizer with it

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6921020B2 (en) 1991-04-24 2005-07-26 Aerogen, Inc. Method and apparatus for dispensing liquids as an atomized spray
US6926208B2 (en) 1991-04-24 2005-08-09 Aerogen, Inc. Droplet ejector with oscillating tapered aperture
EP0794838A1 (en) * 1995-08-31 1997-09-17 FLUID PROPULSION TECHNOLOGIES, Inc. Liquid dispensing apparatus and methods
EP0794838A4 (en) * 1995-08-31 1999-12-01 Aerogen Inc Liquid dispensing apparatus and methods
US6085740A (en) * 1996-02-21 2000-07-11 Aerogen, Inc. Liquid dispensing apparatus and methods
WO2010090169A1 (en) * 2009-02-09 2010-08-12 株式会社村田製作所 Atomizing member and atomizer equipped with same
WO2010089822A1 (en) * 2009-02-09 2010-08-12 株式会社村田製作所 Atomizing member and atomizer equipped with same
JP5382004B2 (en) * 2009-02-09 2014-01-08 株式会社村田製作所 Atomizing member and atomizer with it
JP5365690B2 (en) * 2009-03-31 2013-12-11 株式会社村田製作所 Atomizing unit and atomizer with it
WO2013161985A1 (en) 2012-04-27 2013-10-31 住友化学株式会社 Ultrasonic atomization device
WO2013161986A1 (en) 2012-04-27 2013-10-31 住友化学株式会社 Ultrasonic atomization device
WO2013161987A1 (en) 2012-04-27 2013-10-31 住友化学株式会社 Ultrasonic atomization device

Similar Documents

Publication Publication Date Title
US5217165A (en) Ultrasonic wave nebulizer
US3103310A (en) Sonic atomizer for liquids
US5582348A (en) Ultrasonic spray coating system with enhanced spray control
US5145113A (en) Ultrasonic generation of a submicron aerosol mist
US4474326A (en) Ultrasonic atomizing device
US5299739A (en) Ultrasonic wave nebulizer
US4912357A (en) Ultrasonic MHz oscillator, in particular for liquid atomization
US6273342B1 (en) Atomizer
GB2073616A (en) Apparatus for atomising liquids
JP2003136005A (en) Immobilizing device
US5996903A (en) Atomizer and atomizing method utilizing surface acoustic wave
US2855244A (en) Sonic liquid-spraying and atomizing apparatus
US4753579A (en) Ultrasonic resonant device
US6659364B1 (en) Droplet generation method and device
US5020724A (en) Nozzle for water jet cutting
US20060191562A1 (en) Ultrasonic washing device
WO1993010910A1 (en) Fluid droplet production apparatus and method
DE4444525A1 (en) Ultrasonic liquid vaporiser using sonotrode
WO2000058022A1 (en) A method and apparatus for nebulizing a liquid particularly useful for the aerosol delivery of biopharmaceuticals
US20060243820A1 (en) Piezoelectric fluid atomizer apparatuses and methods
US5297734A (en) Ultrasonic vibrating device
JP2008104974A (en) Acoustic surface wave atomizer
JP2003265939A (en) Apparatus and method for generating air bubble, and apparatus and method for producing fine particle
WO2000051747A1 (en) Control system for atomizing liquids with a piezoelectric vibrator
US7229028B2 (en) Aerosol impingement baffle