JP2000233158A - Spraying device - Google Patents
Spraying deviceInfo
- Publication number
- JP2000233158A JP2000233158A JP11033861A JP3386199A JP2000233158A JP 2000233158 A JP2000233158 A JP 2000233158A JP 11033861 A JP11033861 A JP 11033861A JP 3386199 A JP3386199 A JP 3386199A JP 2000233158 A JP2000233158 A JP 2000233158A
- Authority
- JP
- Japan
- Prior art keywords
- comb
- mesh
- shaped electrodes
- mesh portion
- spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B17/00—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups
- B05B17/04—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods
- B05B17/06—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations
- B05B17/0607—Apparatus for spraying or atomising liquids or other fluent materials, not covered by the preceding groups operating with special methods using ultrasonic or other kinds of vibrations generated by electrical means, e.g. piezoelectric transducers
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】この発明は、吸入器等の噴霧
装置に関する。The present invention relates to a spray device such as an inhaler.
【０００２】[0002]
【従来の技術】本願の発明者は、図１に原理的構成を示
す噴霧部を採用した噴霧装置を開発し、すでに出願して
いる〔特願平９−２７１８１６号〕。この噴霧装置の噴
霧部は、平板上の圧電素子１の上面に、一方の櫛形電極
２と他方の櫛形電極３を互い違いに配置するとともに、
前方に金属、セラミック等からなる多数の微小孔を有す
るメッシュ４を配置し、さらにこの圧電素子１とメッシ
ュ４は、厳密には図２に示すように、対向面が鋭角に交
差するように角度を持たせ、この間に給液パイプ８で霧
化液５を供給する。この状態で、櫛形電極２、３に高周
波信号６を印加し、圧電素子１から発生する超音波振動
とメッシュ４の作用で、霧化液を霧７として噴霧する。2. Description of the Related Art The inventor of the present application has developed a spraying device employing a spraying unit whose principle configuration is shown in FIG. 1 and has already filed an application [Japanese Patent Application No. 9-271816]. The spray unit of the spray device has one comb-shaped electrode 2 and the other comb-shaped electrode 3 alternately arranged on the upper surface of the piezoelectric element 1 on a flat plate.
A mesh 4 having a large number of fine holes made of metal, ceramic, or the like is disposed in front of the piezoelectric element 1. Further, as shown in FIG. 2, the piezoelectric element 1 and the mesh 4 are angled so that the opposing surfaces intersect at an acute angle. , And during this time, the atomization liquid 5 is supplied by the liquid supply pipe 8. In this state, the high-frequency signal 6 is applied to the comb-shaped electrodes 2 and 3, and the atomizing liquid is sprayed as a mist 7 by the action of the ultrasonic vibration generated from the piezoelectric element 1 and the mesh 4.
【０００３】[0003]
【発明が解決しようとする課題】上記した噴霧部を持つ
噴霧装置では、メッシュ部材と振動子は独立した２つの
部材で構成され、またメッシュ部材と振動子の微小間隙
側（給液パイプ側）から噴霧液を供給する必要があり、
製造時の両者の位置決め精度が要求され、噴霧部を構成
する構造が複雑である。また噴霧液の供給箇所が櫛形電
極を設けていない圧電振動子上であり、本来の圧力振動
子の目的である砺振作用を起こさない、単なる噴霧液を
のせる箇所のためにだけ振動子面積を大きくしていたの
で、高価な部品である圧電振動子の大きさを有効に利用
できず、コスト高である等の問題があった。In the spraying apparatus having the above-described spraying section, the mesh member and the vibrator are constituted by two independent members, and the mesh member and the vibrator are on the minute gap side (the liquid supply pipe side). Need to supply the spray liquid from
Accuracy of positioning of both is required at the time of manufacturing, and the structure constituting the spray unit is complicated. Also, the spray liquid supply point is on a piezoelectric vibrator that does not have a comb-shaped electrode, and the vibrator area is only for the place where the spray liquid is applied, which does not cause the vibration effect that is the purpose of the original pressure vibrator Therefore, the size of the piezoelectric vibrator, which is an expensive component, cannot be effectively used, and there is a problem that the cost is high.
【０００４】この発明は上記問題点に着目してなされた
ものであって、位置決め精度を従前よりも要求されるこ
となく、かつ安価に実現し得る噴霧装置を提供すること
を目的としている。この発明は、さらに噴霧効率を向上
させることも目的としている。The present invention has been made in view of the above problems, and has as its object to provide a spraying device which can be realized at a low cost without requiring higher positioning accuracy than before. Another object of the present invention is to further improve the spray efficiency.
【０００５】[0005]
【課題を解決するための手段】この出願の特許請求の範
囲の請求項１に係る噴霧装置は、圧電素子体に対の櫛形
電極を形成し、この櫛形電極に信号を印加し、発生する
振動により、メッシュ部を有する噴霧部で霧化を行うも
のにおいて、前記圧電素子体とメッシュ部を一体的に形
成している。ここで一体的とは、接着等で固着の他、半
導体を成長させて層形成する場合も含むものである。According to a first aspect of the present invention, there is provided a spraying device in which a pair of comb-shaped electrodes is formed on a piezoelectric element body, a signal is applied to the comb-shaped electrodes, and the generated vibration is generated. Accordingly, in the case where atomization is performed by the spraying section having the mesh section, the piezoelectric element and the mesh section are integrally formed. Here, the term “integrally” includes the case where a semiconductor is grown to form a layer in addition to the case where the semiconductor is fixed by adhesion or the like.
【０００６】また、請求項５に係る噴霧装置は、圧電素
子体に対の櫛形電極を形成し、この櫛形電極に信号を印
加し、発生する振動により、メッシュ部を有する噴霧部
で霧化を行うものにおいて、前記櫛形電極を複数対配置
し、これらの櫛形電極対間の中心位置に、メッシュ部を
配置している。また、請求項６に係る噴霧装置は、圧電
素子体に対の櫛形電極を形成し、この櫛形電極に信号を
印加し、発生する振動により、メッシュ部を有する噴霧
部で霧化を行うものにおいて、前記櫛形電極は、中心方
向に曲率を持った形状とし、この中心位置にメッシュ部
を配置している。According to a fifth aspect of the present invention, a pair of comb-shaped electrodes are formed on the piezoelectric element body, a signal is applied to the comb-shaped electrodes, and the generated vibration causes atomization by the spraying section having the mesh portion. In what is performed, a plurality of pairs of the comb-shaped electrodes are arranged, and a mesh portion is arranged at a center position between these comb-shaped electrode pairs. Further, the spraying device according to claim 6 forms a pair of comb-shaped electrodes on the piezoelectric element body, applies a signal to the comb-shaped electrodes, and performs atomization by the generated vibration by the spraying portion having the mesh portion. The comb-shaped electrode has a shape having a curvature in the center direction, and a mesh portion is arranged at the center position.
【０００７】[0007]
【発明の実施の形態】以下、実施の形態により、この発
明をさらに詳細に説明する。図３は、この発明の一実施
形態である噴霧装置の噴霧部を示す斜視図である。図４
は同噴霧部の断面図である。図３、図４において噴霧部
１０は、長方形の平板状のメッシュ部材１１と、振動子
１２とから構成されている。メッシュ部材１１は一部の
領域にメッシュ部１３が形成されるとともに、メッシュ
部１３が形成されない他の領域の上面に、振動子１２が
一体的に固着されている。メッシュ部１３は多数の微小
孔１４を有し、孔１４は振動子１２の固着される面側が
大径、振動子１２の固着される面とは反対側の面が小径
となる貫通孔である。メッシュ部材１１としては、シリ
コン（Ｓｉ）、セラミック、金属等が使用される。DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail with reference to embodiments. FIG. 3 is a perspective view showing a spray unit of the spray device according to one embodiment of the present invention. FIG.
Fig. 3 is a sectional view of the spraying unit. In FIGS. 3 and 4, the spray unit 10 includes a rectangular flat plate-shaped mesh member 11 and a vibrator 12. In the mesh member 11, a mesh portion 13 is formed in a partial region, and the vibrator 12 is integrally fixed to an upper surface of another region where the mesh portion 13 is not formed. The mesh portion 13 has a large number of minute holes 14, and the holes 14 are through holes having a large diameter on the surface to which the vibrator 12 is fixed and a small diameter on the surface opposite to the surface to which the vibrator 12 is fixed. . As the mesh member 11, silicon (Si), ceramic, metal or the like is used.
【０００８】振動子１２は平板状にカットした圧電振動
子１５の上面に一対の櫛形電極１６、１７を形成されて
いる。圧電振動子１５の素材としては、Ｌｉｎｂｏ3 、
ＰＺＴ等が使用される。この実施形態の噴霧装置の噴霧
部１０において、薬液を噴霧させる場合には、メッシュ
部１３の大孔側よりメッシュ部１３に噴霧液１８を滴下
する。そして、櫛形電極１６、１７間に信号源１９より
高周波信号（例えば６ＭＨＺ）を印加する。これによ
り、圧電振動子１５が振動し、矢印Ａの方向に超音波が
伝搬し、そのエネルギー及び孔１４に噴霧液が霧化さ
れ、小径の孔１４より図３では下方に霧２０が出てゆ
く。超音波は、圧電振動子１５の表面だけでなく、圧電
振動子１５の内部を伝搬するものであってもよい。The vibrator 12 has a pair of comb-shaped electrodes 16 and 17 formed on the upper surface of a piezoelectric vibrator 15 cut in a plate shape. The material of the piezoelectric vibrator 15 is Linbo 3 ,
PZT or the like is used. When spraying a chemical solution in the spray unit 10 of the spray device of this embodiment, a spray liquid 18 is dropped onto the mesh unit 13 from the large hole side of the mesh unit 13. Then, a high-frequency signal (for example, 6 MHZ) is applied between the comb electrodes 16 and 17 from the signal source 19. As a result, the piezoelectric vibrator 15 vibrates, the ultrasonic wave propagates in the direction of arrow A, the energy and the spray liquid are atomized into the hole 14, and the mist 20 emerges from the small-diameter hole 14 below in FIG. go. The ultrasonic wave may propagate not only on the surface of the piezoelectric vibrator 15 but also inside the piezoelectric vibrator 15.
【０００９】この実施形態の噴霧部では上方よりメッシ
ュ部の広い領域で薬液を滴下できるため、従来のよう
に、メッシュと振動子の位置精度を気にすることなく、
設計が容易となる。図５は、この発明の他の実施形態で
ある噴霧装置の噴霧部を示す斜視図である。この実施形
態の噴霧部１０は、メッシュ部材１１の長手方向の両端
部に、それぞれ振動子１２ａ、１２ｂを配置したもので
ある。また、振動子１２ａと１２ｂの間の中央部にメッ
シュ部１３が配置されている。振動子１２ａ、１２ｂ、
メッシュ部１３の構造は、図３、図４のものと同様であ
る。この振動子１２ａ、１２ｂのそれぞれの櫛形電極１
６ａ、１７ａ、１６ｂ、１７ｂに信号を印加すると、両
方の振動子１２ａ、１２ｂからの超音波により、中央の
メッシュ部１３で噴霧が行われ、図３の１個の振動子
（一対の櫛形電極）の場合に比し、噴霧の効率を向上す
ることができる。In the spraying section of this embodiment, the chemical solution can be dripped in a region wider than the upper portion of the mesh portion.
Design becomes easy. FIG. 5 is a perspective view showing a spray unit of a spray device according to another embodiment of the present invention. In the spray unit 10 of this embodiment, vibrators 12a and 12b are arranged at both ends in the longitudinal direction of a mesh member 11, respectively. Further, a mesh portion 13 is disposed at a central portion between the transducers 12a and 12b. Vibrators 12a, 12b,
The structure of the mesh part 13 is the same as that of FIGS. The respective comb-shaped electrodes 1 of the vibrators 12a and 12b
When signals are applied to 6a, 17a, 16b and 17b, ultrasonic waves from both vibrators 12a and 12b cause spraying to be performed in the central mesh portion 13, and a single vibrator (a pair of comb-shaped electrodes) shown in FIG. ), The efficiency of spraying can be improved.
【００１０】図５に示す噴霧部１０は一対の振動子１２
ａ、１２ｂの間の中央にメッシュ部１３を配置したが、
３個、４個あるいはそれ以上の複数の振動子（複数対の
櫛形電極）を周囲に配置し、その中心にメッシュ部を配
置し、噴霧の際に各振動子より中心に向けて、超音波を
伝搬させるようにしてもよい。図６は、この発明のさら
に他の実施形態である噴霧装置の噴霧部を示す斜視図で
ある。この実施形態噴霧部１０の特徴は、櫛形電極１
６、１７の、メッシュ部１３方向に向けて交互に配置さ
れる部分１６Ａ、１７Ａの形状として、メッシュ部１３
の位置を中心とする曲率を持たせた円弧状としたことで
ある。これにより、圧電振動子１５の振動で発生した超
音波エネルギーが曲率の中心方向に集中的に伝搬するの
で、噴霧効率が向上する。The spray unit 10 shown in FIG.
Although the mesh part 13 was arranged in the center between a and 12b,
Three, four or more transducers (a plurality of pairs of comb-shaped electrodes) are arranged around the periphery, a mesh portion is arranged at the center, and ultrasonic waves are directed toward the center from each transducer when spraying. May be propagated. FIG. 6 is a perspective view showing a spray unit of a spray device according to still another embodiment of the present invention. The feature of this embodiment spraying unit 10 is that the comb-shaped electrode 1
The shape of the portions 16A and 17A of the portions 6 and 17 alternately arranged in the direction of the mesh portion 13
In the form of an arc having a curvature centered at the position of. Thereby, the ultrasonic energy generated by the vibration of the piezoelectric vibrator 15 is intensively propagated toward the center of the curvature, so that the spray efficiency is improved.
【００１１】図７は、この発明のさらに他の実施形態で
ある噴霧装置の噴霧部１０を示す平面図である。この実
施形態の噴霧部１０の特徴は、メッシュ部１３をメッシ
ュ部材１１の中心に配置し、その周囲にメッシュ部１３
の位置を中心とする曲率を持たせた４個の櫛形電極２１
ａ、２１ｂ、２１ｃ、２１ｄを配置したことである。こ
の実施形態の噴霧部１０において、櫛形電極２１ａ、２
１ｃを共通に接続し、櫛形電極２１ｂ、２１ｄを共通に
接続し、櫛形電極２１ａ、２１ｃと櫛形電極２１ｂ、２
１ｄ間に高周波の信号を印加すると、櫛形電極２１ａと
２１ｂ間、櫛形電極２１ｂと２１ｃ間、櫛形電極２１ｃ
と２１ｄ間及び櫛形電極２１ｄと２１ａ間の圧電振動子
の振動で生じた超音波は、いずれも中心方向に伝搬し、
メッシュ部１３に集中する。そのため、効率の良い噴霧
を行うことができる。FIG. 7 is a plan view showing a spray section 10 of a spray apparatus according to still another embodiment of the present invention. The feature of the spray unit 10 of this embodiment is that the mesh unit 13 is arranged at the center of the mesh member 11 and the mesh unit 13
Four comb-shaped electrodes 21 having a curvature centered on the position of
a, 21b, 21c, and 21d. In the spray unit 10 of this embodiment, the comb-shaped electrodes 21a,
1c, the comb electrodes 21b, 21d are connected in common, and the comb electrodes 21a, 21c and the comb electrodes 21b, 21b,
When a high-frequency signal is applied between 1d, the interdigital transducers 21a and 21b, the interdigital electrodes 21b and 21c, the interdigital electrode 21c
The ultrasonic waves generated by the vibration of the piezoelectric vibrator between the electrodes 21d and between the comb-shaped electrodes 21d and 21a propagate in the center direction,
Focus on the mesh unit 13. Therefore, efficient spraying can be performed.
【００１２】なお、上記した各実施形態では、メッシュ
部材に振動子を固着して一体的とする場合を説明した
が、メッシュ部材にシリコン等半導体材料を用いること
により、成長による層形成で両者を一体的とすることも
可能である。また、櫛形電極を複数対配置し、その中心
にメッシュ部を配置することは、図５のように、メッシ
ュ部材に振動子を一体的に形成する場合に限ることな
く、従来のような振動子とメッシュ部を別体として構成
される場合でも適用できる。In each of the embodiments described above, the case where the vibrator is fixed to the mesh member to be integrated has been described. However, by using a semiconductor material such as silicon for the mesh member, both layers can be formed by growing a layer by growth. It is also possible to be integrated. In addition, the arrangement of a plurality of pairs of comb-shaped electrodes and the arrangement of the mesh portion at the center thereof is not limited to the case where the oscillator is integrally formed on the mesh member as shown in FIG. The present invention can be applied to a case where the and the mesh part are configured separately.
【００１３】また、櫛形電極を中心に対して曲率を持つ
形状とすることも、図５のように、メッシュ部材に振動
子を一体的に形成する場合に限ることなく、従来のよう
な振動子とメッシュ部を別体にして構成される場合で
も、やはり適用可能である。The shape of the comb-shaped electrode having a curvature with respect to the center is not limited to the case where the vibrator is formed integrally with the mesh member as shown in FIG. However, the present invention is also applicable to a case where the and the mesh part are configured separately.
【００１４】[0014]
【発明の効果】この明細書の特許請求の範囲の請求項
１、請求項２、請求項３、請求項４に係る発明によれ
ば、対の櫛形電極からなる圧電振動子を貫通穴の有する
メッシュ部材に一体的に形成したので、必要最小限の圧
振動子面積でよく、コストダウンの効果が得られる。ま
た噴霧液をメッシュ部に滴下するだけよく、給液構成が
単純化され、設計、制作が容易となり、コスト低減をは
かることができる。According to the first, second, third and fourth aspects of the present invention, a piezoelectric vibrator comprising a pair of comb electrodes has a through hole. Since the pressure transducer is formed integrally with the mesh member, the required area of the pressure transducer is sufficient, and the effect of cost reduction is obtained. Also, it is only necessary to drop the spray liquid on the mesh portion, so that the liquid supply structure is simplified, design and production are facilitated, and cost can be reduced.
【００１５】また、請求項３、請求項５に係る発明によ
れば、複数対の櫛形電極を設け、この中心位置にメッシ
ュ部を配置しているので、メッシュ部に振動の集中が起
こり、噴霧効率が向上する。また、請求項４、請求項６
に係る発明によれは、貫通穴を有するメッシュ部材を中
心方向に曲率を持たせた１ないし複数の櫛形電極を持つ
圧電振動子で形成される超音波振動子を利用するので、
メッシュ部に振動の集中が起こり、噴霧効率が向上す
る。According to the third and fifth aspects of the present invention, since a plurality of pairs of comb-shaped electrodes are provided and the mesh portion is disposed at the center position, vibration is concentrated on the mesh portion, and the Efficiency is improved. Claims 4 and 6
According to the invention according to the present invention, since the ultrasonic vibrator formed of a piezoelectric vibrator having one or a plurality of comb-shaped electrodes in which a mesh member having a through hole has a curvature in the center direction is used,
Concentration of vibration occurs in the mesh portion, and the spray efficiency is improved.
【図１】先行する噴霧装置の噴霧部を示す斜視図であ
る。FIG. 1 is a perspective view showing a spray unit of a preceding spray device.
【図２】同噴霧装置の噴霧部への給液を説明する図であ
る。FIG. 2 is a view for explaining liquid supply to a spray unit of the spray device.
【図３】この発明の一実施形態である噴霧装置の噴霧部
を示す斜視図である。FIG. 3 is a perspective view showing a spray unit of the spray device according to one embodiment of the present invention.
【図４】同実施形態の噴霧部の断面図である。FIG. 4 is a cross-sectional view of the spraying unit of the embodiment.
【図５】この発明の他の実施形態である噴霧装置の噴霧
部を示す斜視図である。FIG. 5 is a perspective view showing a spray unit of a spray device according to another embodiment of the present invention.
【図６】この発明のさらに他の実施形態である噴霧装置
の噴霧部を示す斜視図である。FIG. 6 is a perspective view showing a spray unit of a spray device according to still another embodiment of the present invention.
【図７】この発明のさらに他の実施形態である噴霧装置
の噴霧部を示す平面図である。FIG. 7 is a plan view showing a spray unit of a spray device according to still another embodiment of the present invention.
１０ 噴霧部 １１ メッシュ部材 １３ メッシュ部 １４ 微小孔 １５ 圧電振動子 １６、１７ 櫛形電極 １８ 噴霧液 １９ 信号 ２０ 霧 DESCRIPTION OF SYMBOLS 10 Spray part 11 Mesh member 13 Mesh part 14 Microhole 15 Piezoelectric vibrator 16, 17 Comb-shaped electrode 18 Spray liquid 19 Signal 20 Fog
Claims (6)
櫛形電極に信号を印加し、発生する振動により、メッシ
ュ部を有する噴霧部で霧化を行う噴霧装置において、 前記圧電素子体とメッシュ部を一体的に形成したことを
特徴とする噴霧装置。1. A spraying device in which a pair of comb-shaped electrodes are formed on a piezoelectric element body, a signal is applied to the comb-shaped electrodes, and atomization is performed by a generated vibration in a spraying section having a mesh portion. And a mesh unit integrally formed with the spray unit.
する板状体であり、前記圧電素子体を固着形成したこと
を特徴とする請求項１記載の噴霧装置。2. The spraying device according to claim 1, wherein said mesh portion is a plate-like body having a through hole in a thickness direction, and said piezoelectric element body is fixedly formed.
これらの櫛形電極対間の中心位置に、前記メッシュ部を
配置したことを特徴とする請求項１または請求項２記載
の噴霧装置。3. A plurality of pairs of comb-shaped electrodes are formed on said plate-like body,
The spray device according to claim 1, wherein the mesh portion is disposed at a center position between the pair of comb-shaped electrodes.
形状とし、この中心位置にメッシュ部を配置したことを
特徴とする請求項１、請求項２または請求項３記載の噴
霧装置。4. The spray device according to claim 1, wherein the comb-shaped electrode has a shape having a curvature in a center direction, and a mesh portion is arranged at the center position.
櫛形電極に信号を印加し、発生する振動により、メッシ
ュ部を有する噴霧部で霧化を行う噴霧装置において、 前記櫛形電極を複数対配置し、これらの櫛形電極対間の
中心位置に、メッシュ部を配置したことを特徴とする噴
霧装置。5. A spray device in which a pair of comb-shaped electrodes are formed on a piezoelectric element body, a signal is applied to the comb-shaped electrodes, and atomization is performed in a spraying section having a mesh portion by generated vibration. A spray device comprising a plurality of pairs arranged, and a mesh portion disposed at a center position between these comb-shaped electrode pairs.
櫛形電極に信号を印加し、発生する振動により、メッシ
ュ部を有する噴霧部で霧化を行う噴霧装置において、 前記櫛形電極は、中心方向に曲率を持った形状とし、こ
の中心位置にメッシュ部を配置したことを特徴とする噴
霧装置。6. A spray device in which a pair of comb-shaped electrodes are formed on a piezoelectric element body, a signal is applied to the comb-shaped electrodes, and atomization is performed in a spraying section having a mesh portion by generated vibration. A spraying device having a shape having a curvature in the center direction and a mesh portion being arranged at the center position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11033861A JP2000233158A (en) | 1999-02-12 | 1999-02-12 | Spraying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11033861A JP2000233158A (en) | 1999-02-12 | 1999-02-12 | Spraying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000233158A true JP2000233158A (en) | 2000-08-29 |
Family
ID=12398295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11033861A Pending JP2000233158A (en) | 1999-02-12 | 1999-02-12 | Spraying device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000233158A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7225807B2 (en) | 2001-03-15 | 2007-06-05 | Creare Incorporated | Systems and methods for aerosol delivery of agents |
| KR100958663B1 (en) | 2008-04-30 | 2010-05-20 | 주식회사 루프 | Apparatus for Spraying Liquid Using Porous Thin Membrane |
| KR100985761B1 (en) | 2010-06-10 | 2010-10-06 | (주) 케이.아이.씨.에이 | Combination structure of mesh unified with pzt and silicon holder and bottle |
| US7954486B2 (en) | 2004-04-02 | 2011-06-07 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services | Aerosol delivery systems and methods |
| JP2012525944A (en) * | 2009-05-11 | 2012-10-25 | モナシュ、ユニバーシティ | A microfluidic device for liquid atomization |
| WO2014002769A1 (en) * | 2012-06-26 | 2014-01-03 | オムロンヘルスケア株式会社 | Liquid spraying device |
| WO2014002771A1 (en) * | 2012-06-26 | 2014-01-03 | オムロンヘルスケア株式会社 | Liquid spraying device |
| CN106964531A (en) * | 2012-02-24 | 2017-07-21 | 精工爱普生株式会社 | Ultrasonic transducer element chip, detector and electronic equipment |
-
1999
- 1999-02-12 JP JP11033861A patent/JP2000233158A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7225807B2 (en) | 2001-03-15 | 2007-06-05 | Creare Incorporated | Systems and methods for aerosol delivery of agents |
| US7954486B2 (en) | 2004-04-02 | 2011-06-07 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services | Aerosol delivery systems and methods |
| US8656908B2 (en) | 2004-04-02 | 2014-02-25 | The United States Of America As Represented By The Secretary Of The Department Of Health And Human Services, Centers For Disease Control And Prevention | Aerosol delivery systems and methods |
| KR100958663B1 (en) | 2008-04-30 | 2010-05-20 | 주식회사 루프 | Apparatus for Spraying Liquid Using Porous Thin Membrane |
| JP2012525944A (en) * | 2009-05-11 | 2012-10-25 | モナシュ、ユニバーシティ | A microfluidic device for liquid atomization |
| US8991722B2 (en) | 2009-05-11 | 2015-03-31 | Monash University | Microfluidic apparatus for the atomisation of a liquid |
| KR100985761B1 (en) | 2010-06-10 | 2010-10-06 | (주) 케이.아이.씨.에이 | Combination structure of mesh unified with pzt and silicon holder and bottle |
| CN106964531A (en) * | 2012-02-24 | 2017-07-21 | 精工爱普生株式会社 | Ultrasonic transducer element chip, detector and electronic equipment |
| CN106964531B (en) * | 2012-02-24 | 2019-07-09 | 精工爱普生株式会社 | Ultrasonic transducer element chip, detector and electronic equipment |
| WO2014002769A1 (en) * | 2012-06-26 | 2014-01-03 | オムロンヘルスケア株式会社 | Liquid spraying device |
| WO2014002771A1 (en) * | 2012-06-26 | 2014-01-03 | オムロンヘルスケア株式会社 | Liquid spraying device |
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