JPS6366022B2 - - Google Patents
Info
- Publication number
- JPS6366022B2 JPS6366022B2 JP60026239A JP2623985A JPS6366022B2 JP S6366022 B2 JPS6366022 B2 JP S6366022B2 JP 60026239 A JP60026239 A JP 60026239A JP 2623985 A JP2623985 A JP 2623985A JP S6366022 B2 JPS6366022 B2 JP S6366022B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pipe
- tip
- ion source
- needle tip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 description 22
- 238000010884 ion-beam technique Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- -1 TiC Chemical class 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002164 ion-beam lithography Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
- H01J2237/0802—Field ionization sources
- H01J2237/0807—Gas field ion sources [GFIS]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60026239A JPS60193247A (ja) | 1985-02-15 | 1985-02-15 | 点状ガスイオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60026239A JPS60193247A (ja) | 1985-02-15 | 1985-02-15 | 点状ガスイオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60193247A JPS60193247A (ja) | 1985-10-01 |
| JPS6366022B2 true JPS6366022B2 (fr) | 1988-12-19 |
Family
ID=12187756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60026239A Granted JPS60193247A (ja) | 1985-02-15 | 1985-02-15 | 点状ガスイオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60193247A (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0828197B2 (ja) * | 1986-06-27 | 1996-03-21 | ソニー株式会社 | イオンビ−ム装置 |
-
1985
- 1985-02-15 JP JP60026239A patent/JPS60193247A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60193247A (ja) | 1985-10-01 |
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