JPS6365236U - - Google Patents
Info
- Publication number
- JPS6365236U JPS6365236U JP15964486U JP15964486U JPS6365236U JP S6365236 U JPS6365236 U JP S6365236U JP 15964486 U JP15964486 U JP 15964486U JP 15964486 U JP15964486 U JP 15964486U JP S6365236 U JPS6365236 U JP S6365236U
- Authority
- JP
- Japan
- Prior art keywords
- holding tools
- positioning
- semiconductor wafer
- wafer cassette
- blocking section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964486U JPS6365236U (enExample) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964486U JPS6365236U (enExample) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365236U true JPS6365236U (enExample) | 1988-04-30 |
Family
ID=31084270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15964486U Pending JPS6365236U (enExample) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365236U (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03156953A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | 回転式ストッカーの固定装置 |
| JPH03156954A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | ウエハキャリヤの洗浄槽に設けられる位置決め装置 |
-
1986
- 1986-10-17 JP JP15964486U patent/JPS6365236U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03156953A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | 回転式ストッカーの固定装置 |
| JPH03156954A (ja) * | 1989-11-15 | 1991-07-04 | Ebara Corp | ウエハキャリヤの洗浄槽に設けられる位置決め装置 |