JPS6365236U - - Google Patents

Info

Publication number
JPS6365236U
JPS6365236U JP15964486U JP15964486U JPS6365236U JP S6365236 U JPS6365236 U JP S6365236U JP 15964486 U JP15964486 U JP 15964486U JP 15964486 U JP15964486 U JP 15964486U JP S6365236 U JPS6365236 U JP S6365236U
Authority
JP
Japan
Prior art keywords
holding tools
positioning
semiconductor wafer
wafer cassette
blocking section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15964486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15964486U priority Critical patent/JPS6365236U/ja
Publication of JPS6365236U publication Critical patent/JPS6365236U/ja
Pending legal-status Critical Current

Links

JP15964486U 1986-10-17 1986-10-17 Pending JPS6365236U (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15964486U JPS6365236U (Direct) 1986-10-17 1986-10-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15964486U JPS6365236U (Direct) 1986-10-17 1986-10-17

Publications (1)

Publication Number Publication Date
JPS6365236U true JPS6365236U (Direct) 1988-04-30

Family

ID=31084270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15964486U Pending JPS6365236U (Direct) 1986-10-17 1986-10-17

Country Status (1)

Country Link
JP (1) JPS6365236U (Direct)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156953A (ja) * 1989-11-15 1991-07-04 Ebara Corp 回転式ストッカーの固定装置
JPH03156954A (ja) * 1989-11-15 1991-07-04 Ebara Corp ウエハキャリヤの洗浄槽に設けられる位置決め装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03156953A (ja) * 1989-11-15 1991-07-04 Ebara Corp 回転式ストッカーの固定装置
JPH03156954A (ja) * 1989-11-15 1991-07-04 Ebara Corp ウエハキャリヤの洗浄槽に設けられる位置決め装置

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