JPS6364038U - - Google Patents
Info
- Publication number
- JPS6364038U JPS6364038U JP15691986U JP15691986U JPS6364038U JP S6364038 U JPS6364038 U JP S6364038U JP 15691986 U JP15691986 U JP 15691986U JP 15691986 U JP15691986 U JP 15691986U JP S6364038 U JPS6364038 U JP S6364038U
- Authority
- JP
- Japan
- Prior art keywords
- support block
- semiconductor wafer
- target portion
- suction
- suction target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 4
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15691986U JPS6364038U (it) | 1986-10-13 | 1986-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15691986U JPS6364038U (it) | 1986-10-13 | 1986-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364038U true JPS6364038U (it) | 1988-04-27 |
Family
ID=31078988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15691986U Pending JPS6364038U (it) | 1986-10-13 | 1986-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364038U (it) |
-
1986
- 1986-10-13 JP JP15691986U patent/JPS6364038U/ja active Pending
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