JPH0275724U - - Google Patents
Info
- Publication number
- JPH0275724U JPH0275724U JP15471488U JP15471488U JPH0275724U JP H0275724 U JPH0275724 U JP H0275724U JP 15471488 U JP15471488 U JP 15471488U JP 15471488 U JP15471488 U JP 15471488U JP H0275724 U JPH0275724 U JP H0275724U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- processing
- processing space
- vacuum chamber
- support body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 235000012431 wafers Nutrition 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15471488U JPH0711466Y2 (ja) | 1988-11-28 | 1988-11-28 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15471488U JPH0711466Y2 (ja) | 1988-11-28 | 1988-11-28 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0275724U true JPH0275724U (it) | 1990-06-11 |
| JPH0711466Y2 JPH0711466Y2 (ja) | 1995-03-15 |
Family
ID=31431692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15471488U Expired - Lifetime JPH0711466Y2 (ja) | 1988-11-28 | 1988-11-28 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0711466Y2 (it) |
-
1988
- 1988-11-28 JP JP15471488U patent/JPH0711466Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0711466Y2 (ja) | 1995-03-15 |
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