JPS6364036U - - Google Patents
Info
- Publication number
- JPS6364036U JPS6364036U JP15685386U JP15685386U JPS6364036U JP S6364036 U JPS6364036 U JP S6364036U JP 15685386 U JP15685386 U JP 15685386U JP 15685386 U JP15685386 U JP 15685386U JP S6364036 U JPS6364036 U JP S6364036U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- detection means
- wafer
- continuity
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15685386U JPS6364036U (de) | 1986-10-14 | 1986-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15685386U JPS6364036U (de) | 1986-10-14 | 1986-10-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364036U true JPS6364036U (de) | 1988-04-27 |
Family
ID=31078863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15685386U Pending JPS6364036U (de) | 1986-10-14 | 1986-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364036U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0277672U (de) * | 1988-11-30 | 1990-06-14 |
-
1986
- 1986-10-14 JP JP15685386U patent/JPS6364036U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0277672U (de) * | 1988-11-30 | 1990-06-14 |
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