JPS6364032U - - Google Patents
Info
- Publication number
- JPS6364032U JPS6364032U JP15853286U JP15853286U JPS6364032U JP S6364032 U JPS6364032 U JP S6364032U JP 15853286 U JP15853286 U JP 15853286U JP 15853286 U JP15853286 U JP 15853286U JP S6364032 U JPS6364032 U JP S6364032U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- developer
- developing device
- liquid tank
- photoresist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15853286U JPS6364032U (cs) | 1986-10-15 | 1986-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15853286U JPS6364032U (cs) | 1986-10-15 | 1986-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6364032U true JPS6364032U (cs) | 1988-04-27 |
Family
ID=31082109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15853286U Pending JPS6364032U (cs) | 1986-10-15 | 1986-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6364032U (cs) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5655048A (en) * | 1979-10-11 | 1981-05-15 | Matsushita Electric Ind Co Ltd | Developing method and device therefor |
| JPS62102534A (ja) * | 1985-10-29 | 1987-05-13 | Kurotani Nobuko | 半導体材料の処理装置 |
| JPS62269316A (ja) * | 1986-05-19 | 1987-11-21 | Kurotani Iwao | 半導体材料の現像処理装置 |
-
1986
- 1986-10-15 JP JP15853286U patent/JPS6364032U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5655048A (en) * | 1979-10-11 | 1981-05-15 | Matsushita Electric Ind Co Ltd | Developing method and device therefor |
| JPS62102534A (ja) * | 1985-10-29 | 1987-05-13 | Kurotani Nobuko | 半導体材料の処理装置 |
| JPS62269316A (ja) * | 1986-05-19 | 1987-11-21 | Kurotani Iwao | 半導体材料の現像処理装置 |
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