JPS61186233U - - Google Patents
Info
- Publication number
- JPS61186233U JPS61186233U JP7023185U JP7023185U JPS61186233U JP S61186233 U JPS61186233 U JP S61186233U JP 7023185 U JP7023185 U JP 7023185U JP 7023185 U JP7023185 U JP 7023185U JP S61186233 U JPS61186233 U JP S61186233U
- Authority
- JP
- Japan
- Prior art keywords
- slider
- holds
- holding tank
- growth
- bathtub part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007791 liquid phase Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985070231U JPH0517878Y2 (cs) | 1985-05-13 | 1985-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985070231U JPH0517878Y2 (cs) | 1985-05-13 | 1985-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61186233U true JPS61186233U (cs) | 1986-11-20 |
| JPH0517878Y2 JPH0517878Y2 (cs) | 1993-05-13 |
Family
ID=30606641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985070231U Expired - Lifetime JPH0517878Y2 (cs) | 1985-05-13 | 1985-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517878Y2 (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58120600A (ja) * | 1981-12-31 | 1983-07-18 | ウエスタ−ン・エレクトリツク・カムパニ−・インコ−ポレ−テツド | ３―ｖ族化合物半導体のエピタキシカル成長方法 |
| JPS58138330U (ja) * | 1982-03-11 | 1983-09-17 | 日本電気株式会社 | 液相エピタキシヤル成長装置 |
-
1985
- 1985-05-13 JP JP1985070231U patent/JPH0517878Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58120600A (ja) * | 1981-12-31 | 1983-07-18 | ウエスタ−ン・エレクトリツク・カムパニ−・インコ−ポレ−テツド | ３―ｖ族化合物半導体のエピタキシカル成長方法 |
| JPS58138330U (ja) * | 1982-03-11 | 1983-09-17 | 日本電気株式会社 | 液相エピタキシヤル成長装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0517878Y2 (cs) | 1993-05-13 |