JPS6362650A - Polishing machine - Google Patents

Abstract

PURPOSE:To simplify the structure and to reduce the size, by combining such a rough work grinding wheel and a finish work grinding wheel as having the inner diameter larger than the outer diameter of the counterpart and mounting them concentrically thereby enabling polishing with uniform roughness. CONSTITUTION:A motor 9 is driven to move a moving table 6 upward so as to set the moving table 6 at a position where the edge of a rough work grinding wheel 1 will advance by a distance corresponding to a finish margin (b) from the edge of a finish work grinding wheel 10. Then a motor 22 is driven to move a moving table 14 downward so as to set the moving table 14 at a position where the edge of the grinding wheel 10 is lower by a distance corresponding to the sum of rough work margin (a) and finish margin (b) than the upper face of a work W. When a table 25 moves to the left of an arrow A, the rough work margin (a) of the work W is polished by the grinding wheel 1 then the finish margin (b) is polished by the grinding wheel 10. Here, the portion of the work.W polished by the grinding wheel 1 is sequentially finished by the grinding wheel 10, thereby rough work and finish work are carried out simultaneously during single process of table resulting in an efficient polishing work.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a polishing machine equipped with a roughing grindstone and a finishing grindstone, and in particular, each of the grindstones is arranged concentrically,
The present invention relates to a polishing machine that can perform polishing with uniform surface roughness.

(Background of the Invention) In the polishing technology, for example, polishing the back side of a cliff conductor, the front and back surfaces of a glass for a compact disk, etc. is performed by rough-machining using a rough-machining grinder having a rough-machining grindstone. Finished with a finishing grinder equipped with a finishing whetstone.
Conventionally, this has been generally done by rough machining, or by performing rough machining and finishing machining sequentially using a composite grinder with a rough machining whetstone and a finishing whetstone arranged around a single table. .

Incidentally, high product quality is required for the back surface of the semiconductor wafer, the front and back surfaces of the glass for compact discs, etc., and it is necessary that the processed surfaces be polished to a uniform surface roughness.

However, the conventional polishing techniques described above have a problem in that it is difficult to polish with uniform surface roughness.

In other words, in order to make the surface roughness uniform, it is necessary that at least the edge of the tori-1 is uniform.

The finishing allowance is finely polished with a finishing whetstone,
A uniform finishing stock is obtained by grinding the surface ground with the roughing wheel in 517 rows with the finishing wheel. Conventionally, in order to obtain a uniform finishing allowance, the main axis of the roughing grindstone and the main axis of the finishing grindstone were carved on the surface of the table on which the workpiece was placed so that they were at the same angle. However, in reality, there are errors in the corners of each attachment, and it is difficult to completely eliminate these errors. Furthermore, those that employ the rough-machining sanding machine and finishing sanding machine are installed on different machines, and those that employ the above-mentioned compound sanding machine are mounted on the same machine. Even at the top, they are placed at different positions, so it is difficult to make the directions and directions of the respective errors the same. Therefore, in conventional polishing machines, the main axis of the roughing grindstone and the main axis of the finishing grindstone are installed at a misalignment at the corners.

For example, as shown in FIGS. 3A and 3B, a first main frame 32 provided with a roughing whetstone 3I and a finishing whetstone 33
In some cases, the second main shaft 34 provided with the second main shaft 34 is attached in the opposite direction to a line perpendicular to the surface of the table 35. Therefore, the machining surface of the workpiece W is the rough machining grindstone 3.
1, the processed surface S is polished with the finishing grindstone 33, and the processed surface S is polished with the finishing grindstone 33. is the processed surface S as shown in FIG. 3B.
, the surface slopes downward to the right in the opposite direction. In other words, the finish 1 of the machined surface S2 polished by the finishing grindstone 33
As shown in FIG. 3B, the bulging distance is the minimum hl on the left end side and the maximum hl on the right end side, and is different overall in -1-. Therefore, the surface roughness of the machined surface S differs at each position, resulting in a machined surface with non-uniform surface roughness.

In addition, in the conventional polishing technology described above, in those that employ a rough polishing machine and a finishing polisher, it is necessary to use two polishers, so the equipment is large and the Since it is necessary to position the workpiece twice, there is a problem that processing efficiency is low. If the compound grinding machine described in 1irj. -4- Since the grindstone for grinding is arranged around the table, a large table must be used, and there is a problem that the apparatus is large.

(Objective of the Invention) The present invention has been made in order to solve the problems mentioned above in the prior art, and has the following objects: 7. The first spindle equipped with a grindstone for Z processing and the second spindle equipped with a grindstone for finishing can be arranged so that there is no large deviation in the mounting IJ angle between them. It is an object of the present invention to provide a small-sized polishing machine having a simple structure, capable of polishing with uniform surface roughness, and having a simple structure.

(Structure of the Invention) As a result of extensive research aimed at achieving the above object, the inventors discovered the following. By mounting the first main shaft 1 provided with the roughing mouth 11 grinding wheel and the second main shaft 1 provided with the grinding wheel for finishing in a concentric manner, the deviation of the corners between the two can be reduced. Can be done. On the other hand, in conventional polishing machines, the first spindle and the second spindle are taken separately, so they are both separated by their respective removal points.
An error occurs in the IJ angle, and a deviation corresponding to the sum of the respective errors occurs between the two. However, when configured as in the present invention, since one spindle is directly attached to the other spindle, only errors occur from time to time in the attachment, and there is no large misalignment compared to the conventional method. It never occurs.

Furthermore, by using a combination of a roughing grindstone and a finishing grindstone in which the inner diameter of one is larger than the outer diameter of the other, both can be arranged concentrically, and furthermore, the first spindle By providing the grinding wheel and the second main shaft relatively movable in the axial direction, the relative position of the end surface of the grindstone can be easily adjusted. Therefore, by setting the end face of the roughing whetstone at a position that is recessed from the end face of the finishing whetstone by an amount equivalent to the finishing allowance, rough machining and finishing can be performed at the same time. It can be carried out. In addition, first, by setting the end face of the rough machining whetstone to a position protruding from the end face of the finishing whetstone, rough machining 1 to
Next, by setting the end face of the rough machining whetstone to a position recessed from the end face of the finishing whetstone, it is also possible to perform the first finishing process. etc.'1[The pattern is revealed.

The present invention has been completed based on the above-mentioned matters, and its configuration includes a first spindle with a roughing C grindstone installed at the tip (J) and a finishing grindstone installed at the tip. In the grinding machine, each of the grinding wheels has an inner diameter larger than the outer diameter of the other and is arranged concentrically, and each of the grinding wheels has one main shaft that is connected to the other. The polishing machine is characterized in that the polishing machine is mounted concentrically within the polishing machine so as to be relatively movable in the axial and rotational directions.

(Embodiment) An embodiment of the present invention will be explained with reference to FIGS. 1 and 2. In FIG. 11th: The shaft 3 is disposed concentrically with the second main shaft I2, and is supported by upper and lower bearings 4 so as to be movable in the rotational direction and axial direction. .

A first drive motor 5 for rotational driving is connected to one -1 end of the first main shaft 3, and the first drive motor 5 is supported by the No. 1 moving table 6. The first moving table 6 is connected to the second moving table 1/
The feed screw 8 is slidably provided on a pair of left and right guide rails 7 provided on the first moving table 6, and is connected to the first moving table 6. The feed screw 8 is driven by a first feed motor 9 for adjusting the feed NtUM. Therefore, the rough machining grindstone 1 and the first main shaft 3 are rotationally driven by driving the first drive motor 5, and their vertical positions are adjusted by driving the first feed motor 9.

Reference numeral 10 denotes a cylindrical finishing grindstone, whose inner diameter is larger than the outer diameter of the roughing grindstone I, and is attached to a flange II provided at the end of the second main shaft 12. I'm here. Second
The ten shaft 12 has a cylindrical shape, and the outer periphery of both lower ends thereof is a bearing 13.
It is rotatably supported by the second moving table I4. A pulley I8 is attached to the intermediate outer periphery +T< of the second main shaft 12, and a drive bell l-19 driven by a drive pulley 17 is wound around the pulley 18. The drive pulley 17 is mounted on a drive shaft 16, and the drive shaft 16 is connected to a second drive motor 15 for rotational driving supported on the outer surface of the second moving table 14.

The second moving table 14 is slidably provided on a pair of left and right guide rails 20 provided on the machine body 23, and is driven by a second feed motor 22 for adjusting the feed lVt provided on the machine body 23. It is connected to the second feed screw 21 which is driven. Therefore, the first finishing grindstone 10 and the second main shaft 12 are rotationally driven by driving the second drive motor 15, and their vertical positions are adjusted by driving the second feed motor 22.

24 is a bed, and the bed 24-1- is provided with a table 25 so as to be able to reciprocate linearly in the direction of the arrow.

The table 25 has a suction mechanism (
(not shown), and ■ indicates that the workpiece W is placed on the table 2.
This is the position where it is placed on 5.

Reference numeral 11 indicates a starting position of machining, which is a point on the axes of the first spindle 3 and the second spindle 12.

Note that the first drive motor 5. 2nd drive motor 15° 1st feed motor 9. Each operation of the second feed motor 22, table 25, etc. is configured to be controlled by a control device (not shown).

91 This embodiment is constructed as described above, and polishing can be performed in various ways, but representative examples will be explained below.

First, the table 25 is positioned and stopped at the position I shown by the two-dot chain line in FIG. 1, and the pressurized object W is placed on the table 25'' and held by suction. Thereafter, the table 25 is moved to position H indicated by the solid line and stopped 1-.

Next, the first feed motor 9 is driven to move the first moving table 6 upward, and as shown in FIG. It is set at a position where it can be immersed by a distance corresponding to the distance E). Thereafter, the second feed motor 22 is driven to move the second moving table 4 downward, and as shown in FIG. It is set so that it is located downward by a distance corresponding to the sum of the curvature distance a and the shading distance a.

After setting the positions of the table 25, the roughing grindstone 1, and the finishing grindstone ■0 as described above, move the table 25 to the first
Move to the left in the direction of the arrow shown in FIG. As the table 25 moves, the workpiece W is first polished by the rough machining whetstone 1, and then by the finishing whetstone 10, the finishing allowance J- is polished. Ru.

At this time, the part of the workpiece W that has been ground by 3L on the rough grinding wheel 1 is sequentially finished by the finishing grindstone The polishing process is performed almost simultaneously.Therefore, the polishing process can be performed efficiently.

Further, rough machining can be performed during the forward stroke of the table, and finishing machining can be performed during the backward stroke of the table. That is, first, the first feed motor 9 is driven so that the end surface of the rough grinding wheel 1 is finished.
It is set at a position protruding from the end face of the grinding wheel IO, and the second feed motor 22 is driven to set the end face of the roughing grindstone 1 to a position corresponding to rough machining a of the workpiece W. Thereafter, the table 25 is moved in the left direction of arrow A, which is the forward stroke.

The workpiece W is rough-machined by the rough-machining grindstone 1 corresponding to the rough machining process a. Next, the first feed motor 9 is driven to set the end surface of the rough machining whetstone 1 to the position where it is recessed from the end surface of the finishing whetstone 10, and the second feed motor 22 is driven to set the end surface of the rough machining whetstone 1 to a position where it is recessed from the end surface of the finishing whetstone 10. The end face of the grindstone 10 is set at a position corresponding to the first cutting of the workpiece W. After that, table 2
5 in the right direction of the arrow Δ, which is the backward stroke. Kanaji [
The object W is subjected to finishing processing using the finishing grindstone ① corresponding to the finishing allowance.

In this example, the first
Attachment of the main shaft 3 and the second main shaft 12 (the misalignment of the J angle
Since the main support 3 is supported directly by the bearing 4 on the second main shaft 12, the mounting using the bearing 4 is based only on the accuracy of the corner, and the installation of the second main support I2 is different from the conventional method. It is not affected by corner errors. Therefore, compared to conventional polishing machines, the deviation is much smaller, and the work of picking up each shaft 3, 12 can be done easily, and the polishing can be done with a fairly uniform finishing allowance. be able to.

In addition, the finishing whetstone ■0 is placed on the outside and has a large diameter, so it has a long life and can maintain accuracy for a long time.

It goes without saying that the present invention is not limited to this embodiment. For example, the rough machining whetstone I and the finishing whetstone 3
and the second main shaft 12 may be arranged oppositely. At that time, the position of the table 25 when starting machining is as follows:
It will be set at the position marked ■ shown in FIG. Also,
The rough processing grindstone I and the finishing grindstone IO can be placed close to each other as long as they can move relative to each other. Therefore, there is no need to increase the size of the grindstone portion, and the grindstone portion can be configured compactly.

The table 25 on which the workpiece W is placed may be configured to be rotated during the polishing process, and it is possible to polish a workpiece with a diameter larger than the diameter of each grindstone. can. Further, it may be provided on a large-diameter rotary indexing table, and in that case, the table 2
5 can be arranged at equal intervals, and the polishing work can be automated and made more efficient. .

(Effects of the Invention) In the polishing machine of the present invention, the first main shaft and the second main shaft are provided in the same 13-6 shape. Moreover, it can be adjusted in the cylinder and can be finished with uniform surface roughness.

Furthermore, since the grindstone portion and the main shaft portion are arranged concentrically, the polishing machine can be configured to be compact.

Furthermore, rough machining and sharpening machining can be performed simultaneously during the table stroke, and polishing can be performed efficiently.

[Brief explanation of drawings]

FIG. 1 is a detailed explanatory diagram of the present invention, and is a city view showing a partially broken surface. FIG. 2 is an explanatory diagram illustrating the operating state of the main parts of FIG. 1. FIGS. 3A and 3B are explanatory diagrams of a conventional example. DESCRIPTION OF SYMBOLS 1... Grindstone for rough machining, 3... First main shaft, 4... Bearing, 5... First drive motor, 6... First moving table, 9...
・First feed motor, 10... Grindstone for grinding, 12.
...Second main shaft, I3...bearing, ■4...second moving table, 15...second drive motor, 22...second feed motor, 23...body.

Claims (1)

[Claims] (1) In a polishing machine equipped with a first spindle having a rough processing grindstone at its tip and a second spindle having a finishing grindstone at its tip, each of the grindstones has an inner diameter of one wheel and an outer diameter of the other. The main shafts have a larger diameter and are arranged concentrically, and each of the main shafts is mounted so that one of the main shafts is concentrically within the other and can move relatively in the axial direction and rotational direction. Polishing machine.