JPS6361144U - - Google Patents

Info

Publication number
JPS6361144U
JPS6361144U JP15505286U JP15505286U JPS6361144U JP S6361144 U JPS6361144 U JP S6361144U JP 15505286 U JP15505286 U JP 15505286U JP 15505286 U JP15505286 U JP 15505286U JP S6361144 U JPS6361144 U JP S6361144U
Authority
JP
Japan
Prior art keywords
wafer
rotary table
transfer device
positioning
lowers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15505286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15505286U priority Critical patent/JPS6361144U/ja
Publication of JPS6361144U publication Critical patent/JPS6361144U/ja
Pending legal-status Critical Current

Links

JP15505286U 1986-10-09 1986-10-09 Pending JPS6361144U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15505286U JPS6361144U (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15505286U JPS6361144U (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Publications (1)

Publication Number Publication Date
JPS6361144U true JPS6361144U (enrdf_load_stackoverflow) 1988-04-22

Family

ID=31075405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15505286U Pending JPS6361144U (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Country Status (1)

Country Link
JP (1) JPS6361144U (enrdf_load_stackoverflow)

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