JPS6278752U - - Google Patents
Info
- Publication number
- JPS6278752U JPS6278752U JP16983485U JP16983485U JPS6278752U JP S6278752 U JPS6278752 U JP S6278752U JP 16983485 U JP16983485 U JP 16983485U JP 16983485 U JP16983485 U JP 16983485U JP S6278752 U JPS6278752 U JP S6278752U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- plate
- wafer
- model registration
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 13
- 230000003028 elevating effect Effects 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims 4
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16983485U JPS6278752U (enrdf_load_stackoverflow) | 1985-11-06 | 1985-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16983485U JPS6278752U (enrdf_load_stackoverflow) | 1985-11-06 | 1985-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6278752U true JPS6278752U (enrdf_load_stackoverflow) | 1987-05-20 |
Family
ID=31104004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16983485U Pending JPS6278752U (enrdf_load_stackoverflow) | 1985-11-06 | 1985-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6278752U (enrdf_load_stackoverflow) |
-
1985
- 1985-11-06 JP JP16983485U patent/JPS6278752U/ja active Pending
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