JPS6361122U - - Google Patents

Info

Publication number
JPS6361122U
JPS6361122U JP15588186U JP15588186U JPS6361122U JP S6361122 U JPS6361122 U JP S6361122U JP 15588186 U JP15588186 U JP 15588186U JP 15588186 U JP15588186 U JP 15588186U JP S6361122 U JPS6361122 U JP S6361122U
Authority
JP
Japan
Prior art keywords
diffusion furnace
semiconductor manufacturing
inert gas
cover
loading mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15588186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15588186U priority Critical patent/JPS6361122U/ja
Publication of JPS6361122U publication Critical patent/JPS6361122U/ja
Pending legal-status Critical Current

Links

JP15588186U 1986-10-09 1986-10-09 Pending JPS6361122U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15588186U JPS6361122U (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15588186U JPS6361122U (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Publications (1)

Publication Number Publication Date
JPS6361122U true JPS6361122U (enrdf_load_stackoverflow) 1988-04-22

Family

ID=31076983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15588186U Pending JPS6361122U (enrdf_load_stackoverflow) 1986-10-09 1986-10-09

Country Status (1)

Country Link
JP (1) JPS6361122U (enrdf_load_stackoverflow)

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