JPS6360949U - - Google Patents
Info
- Publication number
- JPS6360949U JPS6360949U JP15586286U JP15586286U JPS6360949U JP S6360949 U JPS6360949 U JP S6360949U JP 15586286 U JP15586286 U JP 15586286U JP 15586286 U JP15586286 U JP 15586286U JP S6360949 U JPS6360949 U JP S6360949U
- Authority
- JP
- Japan
- Prior art keywords
- reflecting mirror
- measuring device
- light
- reflecting
- spectrometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005136 cathodoluminescence Methods 0.000 claims description 6
- 238000004020 luminiscence type Methods 0.000 claims description 4
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 2
- 239000000284 extract Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
第１図及び第２図は、本考案によるカソードル
ミネツセンス測定装置の実施例を示す略線図であ
る。第３図、第４図及び第５図は、従来のカソー
ドルミネツセンス測定装置を示す略線図である。
１……走査型電子顕微鏡の鏡筒、２……試料、
３……入射電子線、４……反射鏡の第１焦点、５
……カソードルミネツセンス光、６……凹面反射
鏡、７……反射鏡の第２焦点、８……第２反射鏡
、９……第３反射鏡、１０……分光器、１１……
透過電子顕微鏡構成部品。
1 and 2 are schematic diagrams showing an embodiment of the cathode luminescence measuring device according to the present invention. FIG. 3, FIG. 4, and FIG. 5 are schematic diagrams showing conventional cathodoluminescence measuring devices. 1... Lens barrel of a scanning electron microscope, 2... Sample,
3... Incident electron beam, 4... First focal point of the reflecting mirror, 5
... Cathodoluminescence light, 6 ... Concave reflecting mirror, 7 ... Second focal point of the reflecting mirror, 8 ... Second reflecting mirror, 9 ... Third reflecting mirror, 10 ... Spectrometer, 11 ...
Transmission electron microscope components.
Claims (1)
料からの発光を、大気中に取出し、分光器によつ
て分光測定するカソードルミネツセンス測定装置
において、 上記試料からの発光を補集する回転曲面を有す
る第１の反射鏡が、上記試料の上方に設けられ、 上記第１の反射鏡からの反射光を反射して上記
分光器に導く回転曲面を有する第２の反射鏡が、
上記分光器の光取り入れ口側に、上記分光器の光
取り入れ口の光軸と上記第２の反射鏡の反射光の
光軸を上記分光器の光取り入れ口の受光角以内の
角度に一致させ、且つ上記第２の反射鏡からの反
射光の発散角を該分光器の光取り入れ口の受光角
以内の角度とするように配置されていることを特
徴とするカソードルミネツセンス測定装置。 ２ 上記第１と第２の反射鏡の反射面が、凹面の
回転曲面を有し且つ真空中に配置されていること
を特徴とする実用新案登録請求の範囲第１項に記
載のカソードルミネツセンス測定装置。 ３ 上記第１の反射鏡の反射面が、凹面の回転曲
面であり、 上記第２の反射鏡の反射面が、凸面の回転曲面
であり、 上記第１と第２の反射鏡が、真空中に配置され
ていることを特徴とする実用新案登録請求の範囲
第１項に記載のカソードルミネツセンス測定装置
。 ４ 上記分光器の光取り入れ口が、受光角２０°
で水平で配置された光フアイバから成り、上記第
１及び第２の反射鏡が、上記第２反射鏡からの光
の進行方向を水平より１０°以内とし、発散角を
２０°以下とするように、配されていることを特
徴とする実用新案登録請求の範囲第１項に記載の
カソードルミネツセンス測定装置。[Claims for Utility Model Registration] 1. In a cathode luminescence measuring device that irradiates a sample with an electron beam in a vacuum, extracts the emitted light from the sample into the atmosphere, and performs spectroscopic measurement using a spectrometer, A first reflecting mirror having a rotating curved surface that collects light emitted from the sample is provided above the sample, and a first reflecting mirror having a rotating curved surface that reflects the reflected light from the first reflecting mirror and guides it to the spectroscope. The second reflector is
On the light intake side of the spectrometer, the optical axis of the light intake of the spectrometer and the optical axis of the reflected light of the second reflecting mirror are aligned at an angle within the acceptance angle of the light intake of the spectrometer. , and a cathode luminescence measurement device, characterized in that the cathode luminescence measuring device is arranged so that the divergence angle of the reflected light from the second reflecting mirror is within the acceptance angle of the light intake of the spectroscope. 2. The cathode luminaire according to claim 1, wherein the reflecting surfaces of the first and second reflecting mirrors have concave rotational curved surfaces and are placed in a vacuum. Sense measuring device. 3 The reflecting surface of the first reflecting mirror is a concave rotating curved surface, the reflecting surface of the second reflecting mirror is a convex rotating curved surface, and the first and second reflecting mirrors are in a vacuum. The cathodoluminescence measuring device according to claim 1, wherein the cathodoluminescence measuring device is arranged in a utility model. 4 The light intake of the above spectrometer has an acceptance angle of 20°.
The first and second reflecting mirrors are configured such that the traveling direction of the light from the second reflecting mirror is within 10° from the horizontal and the divergence angle is 20° or less. The cathodoluminescence measuring device according to claim 1, wherein the cathodoluminescence measuring device is arranged in a utility model.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15586286U JPS6360949U (en) | 1986-10-11 | 1986-10-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15586286U JPS6360949U (en) | 1986-10-11 | 1986-10-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6360949U true JPS6360949U (en) | 1988-04-22 |
Family
ID=31076945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15586286U Pending JPS6360949U (en) | 1986-10-11 | 1986-10-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6360949U (en) |
-
1986
- 1986-10-11 JP JP15586286U patent/JPS6360949U/ja active Pending
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