JPH01174845U - - Google Patents
Info
- Publication number
- JPH01174845U JPH01174845U JP6995288U JP6995288U JPH01174845U JP H01174845 U JPH01174845 U JP H01174845U JP 6995288 U JP6995288 U JP 6995288U JP 6995288 U JP6995288 U JP 6995288U JP H01174845 U JPH01174845 U JP H01174845U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- transparent plate
- mirror plate
- plate
- optical image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 claims 2
- 238000003384 imaging method Methods 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
Description
第１図は本考案の実施例装置の要部を示した断
面図、第２図は従来装置の要部を示した断面図、
第３図は第２図の要部の斜視図である。
１：真空筐体、２：観察室、３：観察窓、４：
撮影室、５：像面位置、６：蛍光物質、７：直角
プリズム、７ａ：上面、７ｂ：斜面、８：軸体、
９：観察窓、１０：ＴＶカメラ、１１：電子線光
軸、１２：エネルギーアナライザ、１３：蛍光板
、１３Ｍ：蛍光板中点、１４：反射板、１４Ｍ：
反射板中点、１５：軸体、１５Ｍ：軸体中心線、
１６：保持具、１７：交点。
FIG. 1 is a sectional view showing the main parts of an embodiment of the device of the present invention, FIG. 2 is a sectional view showing the main parts of a conventional device,
FIG. 3 is a perspective view of the main part of FIG. 2. 1: Vacuum housing, 2: Observation room, 3: Observation window, 4:
Photographing room, 5: Image plane position, 6: Fluorescent material, 7: Right angle prism, 7a: Top surface, 7b: Slope, 8: Shaft body,
9: Observation window, 10: TV camera, 11: Electron beam optical axis, 12: Energy analyzer, 13: Fluorescent screen, 13M: Midpoint of fluorescent screen, 14: Reflector, 14M:
Reflector midpoint, 15: shaft body, 15M: shaft body center line,
16: Holder, 17: Intersection.
Claims (1)
学像に変換する手段を真空筐体内に設けると共に
、像変換手段の下部に電子線分析手段を配置した
電子顕微鏡において、蛍光物質が表面に塗布され
た平板状の透明板と、該透明板の裏面の光学像を
反射させるための平板状の鏡板と、該鏡板によつ
て反射された光学像を真空筐体の外部より観察す
るための観察窓と、前記透明板と前記鏡板とをそ
れらが楔形をなすように取付けた軸体とを設け、
該軸体を回転させることにより、透明板が前記結
像レンズ系の光軸と略垂直に交わる光学像の観察
のための位置と、前記透明板と鏡板が前記光軸と
平行で光軸と交わらず前記電子線分析手段に電子
線が入射する位置とに切換えられるように構成し
たことを特徴とする透過電子顕微鏡。 In an electron microscope, a means for converting an electron beam image formed by an imaging lens system into an optical image is provided in a vacuum casing, and an electron beam analysis means is arranged below the image converting means. a flat transparent plate coated with a coating, a flat mirror plate for reflecting an optical image on the back side of the transparent plate, and a flat mirror plate for observing the optical image reflected by the mirror plate from outside the vacuum casing. an observation window, and a shaft body to which the transparent plate and the mirror plate are attached so that they form a wedge shape,
By rotating the shaft, a position for observing an optical image is established, where the transparent plate intersects the optical axis of the imaging lens system substantially perpendicularly, and a position where the transparent plate and mirror plate are parallel to the optical axis and coincide with the optical axis. A transmission electron microscope characterized in that the transmission electron microscope is configured to be switched to a position where the electron beam is incident on the electron beam analysis means without intersecting the electron beam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6995288U JPH062200Y2 (en) | 1988-05-27 | 1988-05-27 | Transmission electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6995288U JPH062200Y2 (en) | 1988-05-27 | 1988-05-27 | Transmission electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174845U true JPH01174845U (en) | 1989-12-12 |
| JPH062200Y2 JPH062200Y2 (en) | 1994-01-19 |
Family
ID=31295214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6995288U Expired - Lifetime JPH062200Y2 (en) | 1988-05-27 | 1988-05-27 | Transmission electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062200Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005203106A (en) * | 2004-01-13 | 2005-07-28 | Jeol Ltd | Transmission electron microscope |
| WO2009117077A2 (en) * | 2008-03-19 | 2009-09-24 | Fama Leo A | Method and apparatus allowing simultaneous direct observation and electron capture of scintillation images in an electron microscope |
-
1988
- 1988-05-27 JP JP6995288U patent/JPH062200Y2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005203106A (en) * | 2004-01-13 | 2005-07-28 | Jeol Ltd | Transmission electron microscope |
| WO2009117077A2 (en) * | 2008-03-19 | 2009-09-24 | Fama Leo A | Method and apparatus allowing simultaneous direct observation and electron capture of scintillation images in an electron microscope |
| WO2009117077A3 (en) * | 2008-03-19 | 2009-11-12 | Fama Leo A | Method and apparatus allowing simultaneous direct observation and electron capture of scintillation images in an electron microscope |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062200Y2 (en) | 1994-01-19 |
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