JPS6360472U - - Google Patents

Info

Publication number
JPS6360472U
JPS6360472U JP15278186U JP15278186U JPS6360472U JP S6360472 U JPS6360472 U JP S6360472U JP 15278186 U JP15278186 U JP 15278186U JP 15278186 U JP15278186 U JP 15278186U JP S6360472 U JPS6360472 U JP S6360472U
Authority
JP
Japan
Prior art keywords
baskets
stages
offset
vertical direction
configuration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15278186U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0421821Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15278186U priority Critical patent/JPH0421821Y2/ja
Publication of JPS6360472U publication Critical patent/JPS6360472U/ja
Application granted granted Critical
Publication of JPH0421821Y2 publication Critical patent/JPH0421821Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Weting (AREA)
JP15278186U 1986-10-02 1986-10-02 Expired JPH0421821Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15278186U JPH0421821Y2 (enrdf_load_stackoverflow) 1986-10-02 1986-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15278186U JPH0421821Y2 (enrdf_load_stackoverflow) 1986-10-02 1986-10-02

Publications (2)

Publication Number Publication Date
JPS6360472U true JPS6360472U (enrdf_load_stackoverflow) 1988-04-22
JPH0421821Y2 JPH0421821Y2 (enrdf_load_stackoverflow) 1992-05-19

Family

ID=31071070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15278186U Expired JPH0421821Y2 (enrdf_load_stackoverflow) 1986-10-02 1986-10-02

Country Status (1)

Country Link
JP (1) JPH0421821Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0421821Y2 (enrdf_load_stackoverflow) 1992-05-19

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