JPS6359822B2 - - Google Patents

Info

Publication number
JPS6359822B2
JPS6359822B2 JP59281264A JP28126484A JPS6359822B2 JP S6359822 B2 JPS6359822 B2 JP S6359822B2 JP 59281264 A JP59281264 A JP 59281264A JP 28126484 A JP28126484 A JP 28126484A JP S6359822 B2 JPS6359822 B2 JP S6359822B2
Authority
JP
Japan
Prior art keywords
slurry
wafer
surface plate
carrier
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59281264A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61159368A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59281264A priority Critical patent/JPS61159368A/ja
Publication of JPS61159368A publication Critical patent/JPS61159368A/ja
Publication of JPS6359822B2 publication Critical patent/JPS6359822B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP59281264A 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における砥粒スラリ−供給装置 Granted JPS61159368A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59281264A JPS61159368A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における砥粒スラリ−供給装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59281264A JPS61159368A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における砥粒スラリ−供給装置

Publications (2)

Publication Number Publication Date
JPS61159368A JPS61159368A (ja) 1986-07-19
JPS6359822B2 true JPS6359822B2 (cg-RX-API-DMAC7.html) 1988-11-21

Family

ID=17636648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59281264A Granted JPS61159368A (ja) 1984-12-28 1984-12-28 ウエ−ハ用ラツプ機における砥粒スラリ−供給装置

Country Status (1)

Country Link
JP (1) JPS61159368A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09262768A (ja) * 1996-03-27 1997-10-07 Shin Etsu Handotai Co Ltd ワークのラップ加工方法及び装置

Also Published As

Publication number Publication date
JPS61159368A (ja) 1986-07-19

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