JPS6358118A - Characteristics measuring apparatus for ultrasonic vibration detecting sensor - Google Patents
Characteristics measuring apparatus for ultrasonic vibration detecting sensorInfo
- Publication number
- JPS6358118A JPS6358118A JP20212986A JP20212986A JPS6358118A JP S6358118 A JPS6358118 A JP S6358118A JP 20212986 A JP20212986 A JP 20212986A JP 20212986 A JP20212986 A JP 20212986A JP S6358118 A JPS6358118 A JP S6358118A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- ultrasonic
- ultrasonic wave
- ultrasonic vibration
- detection sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 claims abstract description 14
- 230000001133 acceleration Effects 0.000 claims description 7
- 230000000694 effects Effects 0.000 abstract description 3
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明はアコースティック・エミッション検出等に使
用さｎる超音波振動検出用センサの特性測定装置Ｆこ関
する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a characteristic measuring device F of a sensor for detecting ultrasonic vibrations used for detecting acoustic emissions and the like.
超音波振動検出用センサの特性を測定する方法として密
着法が一般的に用いられている。The contact method is generally used as a method for measuring the characteristics of ultrasonic vibration detection sensors.
この方法は基準となる超音波発生器の超音波発生面に超
音波検出用センナを密着させ、超音波発生器に加えた電
圧と、超音波検出用センサの出力電圧との比を求めるよ
うにしたものである。This method involves placing an ultrasonic detection sensor in close contact with the ultrasonic generation surface of a reference ultrasonic generator, and calculating the ratio between the voltage applied to the ultrasonic generator and the output voltage of the ultrasonic detection sensor. This is what I did.
ところが、上述の従来技術では、超音波発生器の特性を
含んだ相対値で超音波振動検出用センサの特性を測定す
るため、超音波発生器の特性誤差がそのまま超音波振動
検出用センサの特性誤差として測定され測定精度が著し
く劣化するとともに、周波数、速度、加速度等の物理量
を定量的に測定することができないという問題を有する
。However, in the above-mentioned conventional technology, since the characteristics of the ultrasonic vibration detection sensor are measured using relative values that include the characteristics of the ultrasonic generator, the characteristic error of the ultrasonic generator directly affects the characteristics of the ultrasonic vibration detection sensor. It is measured as an error and the measurement accuracy is significantly degraded, and there is a problem that physical quantities such as frequency, velocity, acceleration, etc. cannot be measured quantitatively.
この発ＢＡは上述の問題点に着目してなさｎ、たもので
、超音波発生器の特性による影響を受けることなく超音
波振動検出用センサの特性を高精度に測定し得るととも
に、各周波数（こ対して加速度。This BA was created by focusing on the above-mentioned problems, and it is possible to measure the characteristics of the ultrasonic vibration detection sensor with high precision without being affected by the characteristics of the ultrasonic generator, and also to (In contrast, acceleration.
速度、変位等の物理量を定量的に測定し得る超音波振動
検出用センサの特性測定装置を提供することを目的とす
る。An object of the present invention is to provide a characteristic measuring device for an ultrasonic vibration detection sensor that can quantitatively measure physical quantities such as velocity and displacement.
〔問題点を解決するための手段および作用〕この発明は
超音波発生器に密着して設けた超音波振動検出用センサ
の変位量をレーザセンサで検出し、このレーザセンサの
出力が希望する値、すなわち超音波振動検出用センサの
変位量等が希望する値になるように制御回路で超音波発
生器の駆動回路を制御しながら、特性測定器にて超音波
振動検出用センサの特性を測定するようにしたものであ
る。[Means and effects for solving the problem] This invention uses a laser sensor to detect the amount of displacement of an ultrasonic vibration detection sensor provided in close contact with an ultrasonic generator, and the output of this laser sensor is set to a desired value. In other words, the characteristics of the ultrasonic vibration detection sensor are measured using a characteristic measuring device while the control circuit controls the drive circuit of the ultrasonic generator so that the amount of displacement etc. of the ultrasonic vibration detection sensor becomes the desired value. It was designed to do so.
以下、図面を参照してこの発明の一実施例を説明する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
添付図において１は超音波発生器で、超音波発生器駆動
回路３により駆動される。超音波発生器の超音波発生面
２の上にＰＺＴ （ジルコン酸チタン酸鉛磁器）等の圧
電素子を用いた超音波振動検出用センサ４を密着させて
設け、このセンサ４の変位量をレーザセンサ５で検出す
る。In the accompanying drawings, reference numeral 1 denotes an ultrasonic generator, which is driven by an ultrasonic generator drive circuit 3. An ultrasonic vibration detection sensor 4 using a piezoelectric element such as PZT (lead zirconate titanate porcelain) is installed in close contact with the ultrasonic generation surface 2 of the ultrasonic generator, and the displacement of this sensor 4 is measured by a laser beam. Detected by sensor 5.
この実施例に用いられるレーザセンサ５はレーザ発振器
６から出射さｎたレーザビームＲをビームスプリッタ７
で２つの光路に分け、一方のレーザビーム＆をミラー８
により超音波発生器１に設けらｎた貫通孔２ａｉ介して
超音波振動検出用センサ４に照射させ、ここで反射して
戻ってきたレーザビーム鳥をビームスプリッタ９で光路
を所定方向に変更してビームスプリッタ１０に導ひくと
ともに、他方のレーザビームＲ）２を音響変調器（ＡＣ
Ｍ）１１に送り、ドライバ１２の周波数だけレーザ周波
数をシフトさせてミラー１３．１４によりビームスブリ
、り１０に導びいている。こｎらのレーザビーム属、へ
の光束をビームスプリッタ１０で一致せしめて干渉させ
たのち、フォトデテクタ１５で電気信号に変換し、この
出力をプリアンプ１６を介して復調器１７に送り超音波
振動検出用センサ４の振動波形を出力させる。A laser sensor 5 used in this embodiment transmits a laser beam R emitted from a laser oscillator 6 to a beam splitter 7.
The laser beam is split into two optical paths by the mirror 8.
The ultrasonic vibration detection sensor 4 is irradiated with the laser beam through a through hole 2ai provided in the ultrasonic generator 1, and the optical path of the laser beam reflected and returned is changed to a predetermined direction by a beam splitter 9. and guide the other laser beam R) 2 to the beam splitter 10, and the other laser beam R) 2 to an acoustic modulator (AC
M) 11, the laser frequency is shifted by the frequency of the driver 12, and the beam is guided to the beam spotter 10 by mirrors 13 and 14. After the beams of these laser beams are matched by a beam splitter 10 and interfered with each other, a photodetector 15 converts them into electrical signals, and this output is sent to a demodulator 17 via a preamplifier 16 to generate ultrasonic vibrations. The vibration waveform of the detection sensor 4 is output.
このレーザセンサ５の出力は制御回路１８に送らｎる。The output of this laser sensor 5 is sent to a control circuit 18.
この制御回路１８はレーザセンサ５の出力にもとづいて
超音波検出用センサ４の変位量が希望する値になるよう
に超音波発生器駆動回路３を制御している。ここで超音
波発生器駆動回路３は特性測定器１９より駆動周波数を
受は復調器１７の出力レベルが希望する値になるように
駆動出力を出力して超音波発生器１を駆動する。This control circuit 18 controls the ultrasonic generator drive circuit 3 based on the output of the laser sensor 5 so that the amount of displacement of the ultrasonic detection sensor 4 becomes a desired value. Here, the ultrasonic generator drive circuit 3 receives the drive frequency from the characteristic measuring device 19 and outputs a drive output to drive the ultrasonic generator 1 so that the output level of the demodulator 17 becomes a desired value.
超音波検出用センサ４の電気出力は特性測定器１９によ
って測定さｎ１特性測定器１９の周波数を変化させるこ
とにより超音波振動検出用センサ４の周波数特性が得ら
ｎる。The electrical output of the ultrasonic vibration detection sensor 4 is measured by a characteristic measuring device 19, and by changing the frequency of the characteristic measuring device 19, the frequency characteristics of the ultrasonic vibration detection sensor 4 can be obtained.
このように、超音波検出用センサ４の変位量等をレーザ
センサ５で監視し、超音波検出用センサ４の変位量等が
希望する値となるように制御することにより、超音波発
生器１の特性の影響を受けずに超音波振動検出用センサ
４の特性を測定することが可能になる。In this way, by monitoring the amount of displacement etc. of the ultrasonic detection sensor 4 with the laser sensor 5 and controlling the amount of displacement etc. of the ultrasonic detection sensor 4 to a desired value, the ultrasonic generator 1 It becomes possible to measure the characteristics of the ultrasonic vibration detection sensor 4 without being affected by the characteristics of the ultrasonic vibration detection sensor 4.
すなわち、超音波検出用センサ４の加速度、速度、変位
等の量を絶対値で知ることができるため、超音波検出用
センサ４のこれら加速度、速度、変位等に対する応答を
正確に測定することができる。That is, since the amount of acceleration, velocity, displacement, etc. of the ultrasonic detection sensor 4 can be known as an absolute value, it is possible to accurately measure the response of the ultrasonic detection sensor 4 to the acceleration, velocity, displacement, etc. can.
なお、この発明は上記実施例に限定さｎるものではなく
、要旨を変更しない範囲において種々変形して実施する
ことができる。Note that the present invention is not limited to the above-mentioned embodiments, and can be implemented with various modifications without changing the gist.
し発明の効果〕
以上述べたようにこの発明の構成によれば、レーザセン
サにより超音波検出用センサの変位量が希望する値にな
るように超音波発生器駆動回路を制御することにより、
超音波発生器の特性による影響を受けることなく超音波
振く動検出用センサの特性を高精度に測定し得るととも
に、レーザセンサを用いることにより周波数だけでなく
速度や加速度等の物理量を定量的に測定し得る超音波振
動検出用センサの特性測定装置を提供することができる
。[Effects of the Invention] As described above, according to the configuration of the present invention, by controlling the ultrasonic generator drive circuit so that the displacement amount of the ultrasonic detection sensor becomes a desired value by the laser sensor,
The characteristics of the ultrasonic vibration detection sensor can be measured with high precision without being affected by the characteristics of the ultrasonic generator, and by using a laser sensor, it is possible to quantitatively measure not only the frequency but also physical quantities such as velocity and acceleration. It is possible to provide a characteristic measuring device for an ultrasonic vibration detection sensor that can measure the characteristics of an ultrasonic vibration detection sensor.
１・・・超音波発生器 ２・・・超音波発生面３・・
・超音波発生器駆動回路
４・・・超音波振動検出用センサ
５・・・レーザセンサ ６・・・レーザ発振器７．９
，１０ ・・・ビームスプリ、り８．１３，１４・・
・ミラー １１・・・音響変調器１２・・・ドライバ
１５・・フォトデテクタ１６・・・プリアンプ
１７・・・復調器１８・・・制御回路 １９・・特
性測定器で哩士1... Ultrasonic generator 2... Ultrasonic generation surface 3...
- Ultrasonic generator drive circuit 4... Ultrasonic vibration detection sensor 5... Laser sensor 6... Laser oscillator 7.9
,10...Beam sprit, ri8.13,14...
・Mirror 11...Acoustic modulator 12...Driver
15...Photodetector 16...Preamplifier
17... Demodulator 18... Control circuit 19... Characteristic measuring device
Claims (1)
と、上記超音波発生器に密着して設けられた超音波振動
検出用センサと、この超音波振動検出用センサの特性を
測定する特性測定器と、上記超音波振動検出用センサの
加速度、速度、変位等の量を検出するレーザセンサと、
このレーザセンサの出力にもとづき上記超音波発生器の
加速度、速度、変位等の量が希望する値になるように上
記駆動回路を制御する制御回路とを具備したことを特徴
とする超音波振動検出用センサの特性測定装置。Measure the characteristics of an ultrasonic generator, a drive circuit that drives this ultrasonic generator, an ultrasonic vibration detection sensor provided in close contact with the ultrasonic generator, and this ultrasonic vibration detection sensor. a characteristic measuring device, a laser sensor that detects the amount of acceleration, velocity, displacement, etc. of the ultrasonic vibration detection sensor;
Ultrasonic vibration detection characterized by comprising a control circuit that controls the drive circuit so that the amount of acceleration, velocity, displacement, etc. of the ultrasonic generator becomes a desired value based on the output of the laser sensor. Equipment for measuring the characteristics of sensors for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20212986A JPH0663826B2 (en) | 1986-08-27 | 1986-08-27 | Characteristic measuring device for ultrasonic vibration detection sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20212986A JPH0663826B2 (en) | 1986-08-27 | 1986-08-27 | Characteristic measuring device for ultrasonic vibration detection sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6358118A true JPS6358118A (en) | 1988-03-12 |
| JPH0663826B2 JPH0663826B2 (en) | 1994-08-22 |
Family
ID=16452443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20212986A Expired - Fee Related JPH0663826B2 (en) | 1986-08-27 | 1986-08-27 | Characteristic measuring device for ultrasonic vibration detection sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0663826B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105698917A (en) * | 2016-03-17 | 2016-06-22 | 辽宁石油化工大学 | Infrasonic wave detection apparatus and detection method thereof |
| CN108709629A (en) * | 2018-06-25 | 2018-10-26 | 华南理工大学 | Film square vibration detection control device and method based on laser displacement sensor |
-
1986
- 1986-08-27 JP JP20212986A patent/JPH0663826B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105698917A (en) * | 2016-03-17 | 2016-06-22 | 辽宁石油化工大学 | Infrasonic wave detection apparatus and detection method thereof |
| CN108709629A (en) * | 2018-06-25 | 2018-10-26 | 华南理工大学 | Film square vibration detection control device and method based on laser displacement sensor |
| CN108709629B (en) * | 2018-06-25 | 2024-03-22 | 华南理工大学 | Square film vibration detection control device and method based on laser displacement sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0663826B2 (en) | 1994-08-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| LAPS | Cancellation because of no payment of annual fees |