JPS635641U - - Google Patents
Info
- Publication number
- JPS635641U JPS635641U JP9667186U JP9667186U JPS635641U JP S635641 U JPS635641 U JP S635641U JP 9667186 U JP9667186 U JP 9667186U JP 9667186 U JP9667186 U JP 9667186U JP S635641 U JPS635641 U JP S635641U
- Authority
- JP
- Japan
- Prior art keywords
- rod member
- wafer support
- support
- support rod
- semiconductor wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 8
- 230000002093 peripheral effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9667186U JPS635641U (it) | 1986-06-26 | 1986-06-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9667186U JPS635641U (it) | 1986-06-26 | 1986-06-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635641U true JPS635641U (it) | 1988-01-14 |
Family
ID=30962662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9667186U Pending JPS635641U (it) | 1986-06-26 | 1986-06-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635641U (it) |
-
1986
- 1986-06-26 JP JP9667186U patent/JPS635641U/ja active Pending
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