JPS6356257U - - Google Patents
Info
- Publication number
- JPS6356257U JPS6356257U JP14828386U JP14828386U JPS6356257U JP S6356257 U JPS6356257 U JP S6356257U JP 14828386 U JP14828386 U JP 14828386U JP 14828386 U JP14828386 U JP 14828386U JP S6356257 U JPS6356257 U JP S6356257U
- Authority
- JP
- Japan
- Prior art keywords
- inner container
- container
- mounting portion
- deposition substrate
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 3
- 238000001816 cooling Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14828386U JPS6356257U (cs) | 1986-09-27 | 1986-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14828386U JPS6356257U (cs) | 1986-09-27 | 1986-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6356257U true JPS6356257U (cs) | 1988-04-15 |
Family
ID=31062404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14828386U Pending JPS6356257U (cs) | 1986-09-27 | 1986-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6356257U (cs) |
-
1986
- 1986-09-27 JP JP14828386U patent/JPS6356257U/ja active Pending
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