JPH0187529U - - Google Patents
Info
- Publication number
- JPH0187529U JPH0187529U JP18317387U JP18317387U JPH0187529U JP H0187529 U JPH0187529 U JP H0187529U JP 18317387 U JP18317387 U JP 18317387U JP 18317387 U JP18317387 U JP 18317387U JP H0187529 U JPH0187529 U JP H0187529U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- reaction tank
- supplying
- reaction
- plasma cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18317387U JPH0187529U (cs) | 1987-12-01 | 1987-12-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18317387U JPH0187529U (cs) | 1987-12-01 | 1987-12-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187529U true JPH0187529U (cs) | 1989-06-09 |
Family
ID=31474605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18317387U Pending JPH0187529U (cs) | 1987-12-01 | 1987-12-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187529U (cs) |
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1987
- 1987-12-01 JP JP18317387U patent/JPH0187529U/ja active Pending