JPS635624U - - Google Patents
Info
- Publication number
- JPS635624U JPS635624U JP9862586U JP9862586U JPS635624U JP S635624 U JPS635624 U JP S635624U JP 9862586 U JP9862586 U JP 9862586U JP 9862586 U JP9862586 U JP 9862586U JP S635624 U JPS635624 U JP S635624U
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- insulating plates
- support columns
- wafer
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986098625U JPH0525228Y2 (de) | 1986-06-27 | 1986-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986098625U JPH0525228Y2 (de) | 1986-06-27 | 1986-06-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS635624U true JPS635624U (de) | 1988-01-14 |
| JPH0525228Y2 JPH0525228Y2 (de) | 1993-06-25 |
Family
ID=30966735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986098625U Expired - Lifetime JPH0525228Y2 (de) | 1986-06-27 | 1986-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0525228Y2 (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49107676A (de) * | 1973-02-16 | 1974-10-12 |
-
1986
- 1986-06-27 JP JP1986098625U patent/JPH0525228Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49107676A (de) * | 1973-02-16 | 1974-10-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0525228Y2 (de) | 1993-06-25 |