JPS6217593U - - Google Patents

Info

Publication number
JPS6217593U
JPS6217593U JP10809885U JP10809885U JPS6217593U JP S6217593 U JPS6217593 U JP S6217593U JP 10809885 U JP10809885 U JP 10809885U JP 10809885 U JP10809885 U JP 10809885U JP S6217593 U JPS6217593 U JP S6217593U
Authority
JP
Japan
Prior art keywords
recess
parallel
plates
vacuum
parallel plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10809885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0237757Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10809885U priority Critical patent/JPH0237757Y2/ja
Publication of JPS6217593U publication Critical patent/JPS6217593U/ja
Application granted granted Critical
Publication of JPH0237757Y2 publication Critical patent/JPH0237757Y2/ja
Expired legal-status Critical Current

Links

JP10809885U 1985-07-17 1985-07-17 Expired JPH0237757Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10809885U JPH0237757Y2 (de) 1985-07-17 1985-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10809885U JPH0237757Y2 (de) 1985-07-17 1985-07-17

Publications (2)

Publication Number Publication Date
JPS6217593U true JPS6217593U (de) 1987-02-02
JPH0237757Y2 JPH0237757Y2 (de) 1990-10-12

Family

ID=30984974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10809885U Expired JPH0237757Y2 (de) 1985-07-17 1985-07-17

Country Status (1)

Country Link
JP (1) JPH0237757Y2 (de)

Also Published As

Publication number Publication date
JPH0237757Y2 (de) 1990-10-12

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