JPS6354294U - - Google Patents
Info
- Publication number
- JPS6354294U JPS6354294U JP14818386U JP14818386U JPS6354294U JP S6354294 U JPS6354294 U JP S6354294U JP 14818386 U JP14818386 U JP 14818386U JP 14818386 U JP14818386 U JP 14818386U JP S6354294 U JPS6354294 U JP S6354294U
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- quartz tube
- housed
- sealed
- maintained
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14818386U JPS6354294U (ru) | 1986-09-27 | 1986-09-27 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14818386U JPS6354294U (ru) | 1986-09-27 | 1986-09-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6354294U true JPS6354294U (ru) | 1988-04-12 |
Family
ID=31062226
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14818386U Pending JPS6354294U (ru) | 1986-09-27 | 1986-09-27 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6354294U (ru) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59214191A (ja) * | 1983-04-07 | 1984-12-04 | ルフラン・インコ−ポレ−テツド | 可撓性ヒ−タケ−ブル、可撓性ヒ−タケ−ブル装置および液体の加熱方法 |
-
1986
- 1986-09-27 JP JP14818386U patent/JPS6354294U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59214191A (ja) * | 1983-04-07 | 1984-12-04 | ルフラン・インコ−ポレ−テツド | 可撓性ヒ−タケ−ブル、可撓性ヒ−タケ−ブル装置および液体の加熱方法 |